MY147014A - Capacitive area-changed mems gyroscope with adjustable resonance frequencies - Google Patents

Capacitive area-changed mems gyroscope with adjustable resonance frequencies

Info

Publication number
MY147014A
MY147014A MYPI20071872A MY147014A MY 147014 A MY147014 A MY 147014A MY PI20071872 A MYPI20071872 A MY PI20071872A MY 147014 A MY147014 A MY 147014A
Authority
MY
Malaysia
Prior art keywords
proof
mass
changed
spring
shaped
Prior art date
Application number
Inventor
Agus Santoso Dr Tamsir
Azrif Manut
Suraya Sulaiman
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI20071872 priority Critical patent/MY147014A/en
Priority to PCT/MY2008/000124 priority patent/WO2009057990A2/en
Publication of MY147014A publication Critical patent/MY147014A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

THERE IS DISCLOSED A SURFACE MICROMACHINED (MEMS) GYROSCOPE DEVICE WHERE THE RESONANCE FREQUENCIES ARE CAPABLE OF BEING ADJUSTED AND TUNED FOR OBTAINING MAXIMUM RESPONSE GAIN FOR HIGHER SENSITIVITY. THE MEMS GYROSCOPE COMPRISES OF A SUBSTRATE (1), A PROOF-MASS (2), A CAPACITIVE AREA-CHANGED PLATE (3), A DRIVING MODE ELECTRODE (4) AND A SENSING MODE ELECTRODE (5). THE PROOF-MASS (2) IS STRUCTURED AS A CROSS-SHAPED BODY THAT INCLUDES THE SENSING MODE AND DRIVING MODE ELECTRODES (4, 5) WHERE THE PROOF-MASS IS ADAPTED TO OSCILLATE BACK AND FORTH LATERALLY IS OVER THE CAPACITIVE AREA-CHANGED PLATE (3) DEFINING AN AREA-CHANGED CAPACITIVE TYPE MEMS GYROSCOPE. THE DRIVING AND SENSING MODE ELECTRODES (4, 5) ARE SHAPED AS A SYMMETRICAL BRANCH-FINGER STRUCTURE. THE PROOF- MASS IS CONNECTED TO THE SUBSTRATE (1) THROUGH A SPRING (6) AND THE BRANCH-FINGER STRUCTURE IS PROVIDED HAVING TWO DIFFERENT GAP SIDE-BY-SIDE AND NARROW-WIDE NARROW GAP SERIES CONFIGURATION, WHEREBY THE SPRING IS CONFIGURED AS A CIRCULAR-SHAPED, RECTANGULAR-SHAPED OR VARIATIONS OF THE SAME. THE SPRING CONSTANT (KX, KY) IS CONTROLLABLE AND ADJUSTABLE THROUGH THE APPLICATION OF VOLTAGE ON THE BRANCH FINGER ACTING AS ACTUATOR AND PSEUDO SPRING THUS PROVIDING TUNED RESONANT FREQUENCY FOR HIGHER SENSITIVITY.
MYPI20071872 2007-10-31 2007-10-31 Capacitive area-changed mems gyroscope with adjustable resonance frequencies MY147014A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI20071872 MY147014A (en) 2007-10-31 2007-10-31 Capacitive area-changed mems gyroscope with adjustable resonance frequencies
PCT/MY2008/000124 WO2009057990A2 (en) 2007-10-31 2008-10-22 Capacitive area-changed mems gyroscope with adjustable resonance frequencies

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20071872 MY147014A (en) 2007-10-31 2007-10-31 Capacitive area-changed mems gyroscope with adjustable resonance frequencies

Publications (1)

Publication Number Publication Date
MY147014A true MY147014A (en) 2012-10-15

Family

ID=40591678

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20071872 MY147014A (en) 2007-10-31 2007-10-31 Capacitive area-changed mems gyroscope with adjustable resonance frequencies

Country Status (2)

Country Link
MY (1) MY147014A (en)
WO (1) WO2009057990A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012224081A1 (en) * 2012-12-20 2014-06-26 Continental Teves Ag & Co. Ohg Sensor for detecting a rate of rotation of an object
US10273147B2 (en) 2013-07-08 2019-04-30 Motion Engine Inc. MEMS components and method of wafer-level manufacturing thereof
WO2015013827A1 (en) * 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor for sub-resonance angular rate sensing
WO2015103688A1 (en) 2014-01-09 2015-07-16 Motion Engine Inc. Integrated mems system
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
US11674803B2 (en) 2014-06-02 2023-06-13 Motion Engine, Inc. Multi-mass MEMS motion sensor
US11287486B2 (en) 2014-12-09 2022-03-29 Motion Engine, Inc. 3D MEMS magnetometer and associated methods
US10407299B2 (en) 2015-01-15 2019-09-10 Motion Engine Inc. 3D MEMS device with hermetic cavity
US11725941B2 (en) * 2019-01-08 2023-08-15 Panasonic Intellectual Property Management Co., Ltd. Sensing device
CN112710292B (en) * 2020-12-10 2022-11-01 中北大学南通智能光机电研究院 A Frequency Tunable Micromachined Gyroscope Based on Tunnel Magnetoresistance Detection
CN114046911B (en) * 2021-11-19 2023-11-17 山东理工大学 A MEMS resonant pressure sensor for electrostatically excited comb detection
CN115060245B (en) * 2021-12-25 2025-04-18 西北工业大学 A multi-ring resonant MEMS gyroscope with high processing error tolerance
US11932531B2 (en) 2022-01-13 2024-03-19 Taiwan Semiconductor Manufacturing Company, Ltd. Curved cantilever design to reduce stress in MEMS actuator
US11994390B2 (en) 2022-02-09 2024-05-28 Honeywell International Inc. Vibratory sensor with electronic balancing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10108197A1 (en) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Yaw rate sensor
KR100436367B1 (en) * 2001-12-14 2004-06-19 삼성전자주식회사 MEMS gyroscpoe having inertial masses vibrating vertically on a substrate
US7213458B2 (en) * 2005-03-22 2007-05-08 Honeywell International Inc. Quadrature reduction in MEMS gyro devices using quad steering voltages

Also Published As

Publication number Publication date
WO2009057990A3 (en) 2009-08-06
WO2009057990A2 (en) 2009-05-07

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