MY163673A - Method and device for tempering electronic components - Google Patents

Method and device for tempering electronic components

Info

Publication number
MY163673A
MY163673A MYPI20080071A MYPI20080071A MY163673A MY 163673 A MY163673 A MY 163673A MY PI20080071 A MYPI20080071 A MY PI20080071A MY PI20080071 A MYPI20080071 A MY PI20080071A MY 163673 A MY163673 A MY 163673A
Authority
MY
Malaysia
Prior art keywords
chamber
test
electronic components
temperature
gas pressure
Prior art date
Application number
MYPI20080071A
Inventor
Maximilian Schaule
Alexander Bauer
Stefan Kurz
Franz Aschl
Original Assignee
Multitest Elektronische Systeme Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multitest Elektronische Systeme Gmbh filed Critical Multitest Elektronische Systeme Gmbh
Publication of MY163673A publication Critical patent/MY163673A/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Automation & Control Theory (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

DISCLOSED ARE A METHOD AND A DEVICE FOR TEMPERING ELECTRONIC COMPONENTS (5) WITHIN A HANDLER (1) FOR A FUNCTIONAL TEST. THE COMPONENTS (5) ARE INITIALLY PRE-TEMPERED IN A TEMPERATURE CHAMBER (2) BY CONVECTING A GAS AND ARE THEN DIRECTLY TEMPERED IN A CONDUCTIVE MANNER TO THE TEST TEMPERATURE IN A TEST CHAMBER (3). THE GAS PRESSURE (P1) INSIDE THE TEST CHAMBER (3) IS GREATER THAN THE GAS PRESSURE (P2) IN THE TEMPERATURE CHAMBER WHILE THE GAS PRESSURE (P2) IN THE TEMPERATURE CHAMBER (2) IS GREATER THAN THE AMBIENT PRESSURE (Pa). THE INLET (4) AND OUTLET (29) OF THE TEMPERATURE CHAMBER (2) ARE ALTERNATELY OPENED AND CLOSED. THE MOST ILLUSTRATIVE DRAWING IS:
MYPI20080071A 2006-04-03 2007-03-29 Method and device for tempering electronic components MY163673A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006015365A DE102006015365B4 (en) 2006-04-03 2006-04-03 Method and device for tempering electronic components

Publications (1)

Publication Number Publication Date
MY163673A true MY163673A (en) 2017-10-13

Family

ID=38513228

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20080071A MY163673A (en) 2006-04-03 2007-03-29 Method and device for tempering electronic components

Country Status (6)

Country Link
US (1) US20100108205A1 (en)
EP (1) EP1889133B1 (en)
AT (1) ATE422256T1 (en)
DE (1) DE102006015365B4 (en)
MY (1) MY163673A (en)
WO (1) WO2007115699A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008003903A1 (en) * 2008-01-10 2009-09-10 Multitest Elektronische Systeme Gmbh Electronic component i.e. integrated circuit, handling method for use during low temperature testing, involves irradiating tested components by electromagnetic radiation source such that components are heated to surrounding temperature
US7999563B2 (en) 2008-06-24 2011-08-16 Cascade Microtech, Inc. Chuck for supporting and retaining a test substrate and a calibration substrate
DE102012009796A1 (en) * 2012-05-18 2013-11-21 Micronas Gmbh test system
CN108291934B (en) * 2015-09-29 2021-04-06 株式会社村田制作所 Inspection device and inspection method for electronic components

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4918928A (en) * 1987-12-17 1990-04-24 Kabushiki Kaisha Kobe Seikosho Apparatus for testing IC devices at low temperature and cooling bag for use in testing IC devices at low temperature
US20020070745A1 (en) * 2000-04-27 2002-06-13 Johnson James E. Cooling system for burn-in unit
US6711961B2 (en) * 2000-10-24 2004-03-30 Air Liquide America Corporation Methods and apparatus for recycling cryogenic liquid or gas from test chambers
US6668570B2 (en) * 2001-05-31 2003-12-30 Kryotech, Inc. Apparatus and method for controlling the temperature of an electronic device under test
KR100482371B1 (en) * 2002-10-28 2005-04-14 삼성전자주식회사 test system of integrated circuit and method thereof
KR100542126B1 (en) * 2003-04-29 2006-01-11 미래산업 주식회사 Semiconductor Device Test Handler

Also Published As

Publication number Publication date
US20100108205A1 (en) 2010-05-06
EP1889133B1 (en) 2009-02-04
WO2007115699A2 (en) 2007-10-18
DE102006015365B4 (en) 2009-11-19
EP1889133A2 (en) 2008-02-20
WO2007115699A3 (en) 2008-01-10
ATE422256T1 (en) 2009-02-15
DE102006015365A1 (en) 2007-10-11

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