MY176743A - Polishing composition - Google Patents
Polishing compositionInfo
- Publication number
- MY176743A MY176743A MYPI2015703424A MYPI2015703424A MY176743A MY 176743 A MY176743 A MY 176743A MY PI2015703424 A MYPI2015703424 A MY PI2015703424A MY PI2015703424 A MYPI2015703424 A MY PI2015703424A MY 176743 A MY176743 A MY 176743A
- Authority
- MY
- Malaysia
- Prior art keywords
- polishing composition
- abrasives
- polishing
- silica abrasives
- silica
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 239000003082 abrasive agent Substances 0.000 abstract 6
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 239000002253 acid Substances 0.000 abstract 1
- 238000001354 calcination Methods 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
To provide a polishing composition capable of achieving an excellent polishing rate by using silica abrasives. The polishing composition disclosed here includes abrasives, an acid, and water. The abrasives include silica abrasives A. The silica abrasives A are those that have been subjected to at least one of calcination and cracking. The polishing composition containing such silica abrasives A can achieve a higher polishing rate in polishing of an object to be polished.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014201432A JP6480139B2 (en) | 2014-09-30 | 2014-09-30 | Polishing composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY176743A true MY176743A (en) | 2020-08-20 |
Family
ID=55864089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI2015703424A MY176743A (en) | 2014-09-30 | 2015-09-28 | Polishing composition |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6480139B2 (en) |
| MY (1) | MY176743A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200135851A (en) * | 2018-03-28 | 2020-12-03 | 가부시키가이샤 후지미인코퍼레이티드 | Gallium compound based semiconductor substrate polishing composition |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3877827B2 (en) * | 1997-02-12 | 2007-02-07 | 東亞合成株式会社 | Method for producing ultra high purity spherical silica fine particles |
| JP4257687B2 (en) * | 1999-01-11 | 2009-04-22 | 株式会社トクヤマ | Abrasive and polishing method |
| JP2004127327A (en) * | 1999-12-27 | 2004-04-22 | Showa Denko Kk | Composition for polishing magnetic disk substrate |
| JP3877924B2 (en) * | 2000-01-24 | 2007-02-07 | 昭和電工株式会社 | Magnetic disk substrate polishing composition |
| JP4620851B2 (en) * | 2000-09-25 | 2011-01-26 | 宇部日東化成株式会社 | Method for producing hemispherical silica fine particles and hemispherical silica fine particles |
| JP2005327782A (en) * | 2004-05-12 | 2005-11-24 | Ministry Of National Defense Chung Shan Inst Of Science & Technology | Chemical mechanical polishing slurry for semiconductor copper metal layer |
| JP2007073548A (en) * | 2005-09-02 | 2007-03-22 | Fujimi Inc | Polishing method |
| US8273142B2 (en) * | 2010-09-02 | 2012-09-25 | Cabot Microelectronics Corporation | Silicon polishing compositions with high rate and low defectivity |
| JP2012116734A (en) * | 2010-12-03 | 2012-06-21 | Jgc Catalysts & Chemicals Ltd | Crystalline silica sol and method for producing the same |
| JP2012155785A (en) * | 2011-01-25 | 2012-08-16 | Showa Denko Kk | Method for manufacturing substrate for magnetic recording medium |
| JP6259182B2 (en) * | 2012-12-12 | 2018-01-10 | 株式会社フジミインコーポレーテッド | Polishing liquid for primary polishing of magnetic disk substrate with nickel phosphorus plating |
| JP2014117754A (en) * | 2012-12-13 | 2014-06-30 | Osaka Univ | Polishing abrasive grain and polishing method |
| JP6092623B2 (en) * | 2012-12-28 | 2017-03-08 | 花王株式会社 | Manufacturing method of magnetic disk substrate |
| JP5712336B2 (en) * | 2012-12-28 | 2015-05-07 | Hoya株式会社 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method for manufacturing mask blank substrate, method for manufacturing substrate with multilayer reflective film, and method for manufacturing semiconductor device |
-
2014
- 2014-09-30 JP JP2014201432A patent/JP6480139B2/en active Active
-
2015
- 2015-09-28 MY MYPI2015703424A patent/MY176743A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP6480139B2 (en) | 2019-03-06 |
| JP2016069553A (en) | 2016-05-09 |
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