MY192591A - Device and method for limiting force - Google Patents

Device and method for limiting force

Info

Publication number
MY192591A
MY192591A MYPI2015001485A MYPI2015001485A MY192591A MY 192591 A MY192591 A MY 192591A MY PI2015001485 A MYPI2015001485 A MY PI2015001485A MY PI2015001485 A MYPI2015001485 A MY PI2015001485A MY 192591 A MY192591 A MY 192591A
Authority
MY
Malaysia
Prior art keywords
gripper
force exerted
actuator
spring
force
Prior art date
Application number
MYPI2015001485A
Inventor
Philippe Roy
Pascal Dromard
Original Assignee
Ismeca Semiconductor Holding Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ismeca Semiconductor Holding Sa filed Critical Ismeca Semiconductor Holding Sa
Publication of MY192591A publication Critical patent/MY192591A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)
  • Measuring Leads Or Probes (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Linear Motors (AREA)
  • Environmental & Geological Engineering (AREA)

Abstract

Force-limiting device (1), mounted between a linear actuator and a gripper of an electronic component, for limiting the force exerted by a linear actuator on the gripper of an electronic component, including: a first element (4, 7, 40, 41) arranged so as to be attached to said actuator so as to be linearly movable by said actuator; a second element (5, 6, 23, 50) arranged so as to be connected to said gripper so as to linearly move said gripper; an elastically compressible spring (3) arranged between the first element (4, 7, 40, 41) and the second element (5, 6, 23, 50) in order to transmit and limit the force exerted by the first element on the second element; an electrical contact arranged so as to be in a first state when said spring (3) limits the force exerted on the second element, and in a second state when said spring does not limit the force exerted on the second element. (Fig. 2)
MYPI2015001485A 2012-12-19 2013-12-19 Device and method for limiting force MY192591A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH28742012 2012-12-19
PCT/EP2013/077437 WO2014096218A1 (en) 2012-12-19 2013-12-19 Device and method for limiting force

Publications (1)

Publication Number Publication Date
MY192591A true MY192591A (en) 2022-08-29

Family

ID=49956136

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2015001485A MY192591A (en) 2012-12-19 2013-12-19 Device and method for limiting force

Country Status (6)

Country Link
EP (1) EP2936176A1 (en)
KR (1) KR20150097535A (en)
CN (1) CN105008941B (en)
MY (1) MY192591A (en)
PH (1) PH12015501241A1 (en)
WO (1) WO2014096218A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3311959A1 (en) 2016-10-19 2018-04-25 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO High-precision linear actuator
EP3757586B1 (en) * 2019-06-26 2023-07-05 Etel S.A. Method and automated motion system for controlling a component handler

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4163970A (en) * 1975-05-23 1979-08-07 Allinquant F M Pneumatic springs and other telescopic systems
US5422554A (en) * 1993-03-05 1995-06-06 Motorola, Inc. Vacuum nozzle capable of adjustable placing force
JP3225340B2 (en) * 1995-07-27 2001-11-05 株式会社新川 Lead frame suction holding device
DE60317634T2 (en) * 2002-02-20 2008-10-30 Ismeca Semiconductor Holding Sa CONTACT ACTUATOR WITH CONTACT FORCED CONTROL
US7583100B2 (en) * 2006-11-30 2009-09-01 Sts Instruments, Inc. Test head for testing electrical components
US7839138B2 (en) * 2007-01-29 2010-11-23 Electro Scientific Industries, Inc. Adjustable force electrical contactor
TWI497084B (en) * 2010-09-30 2015-08-21 Ismeca Semiconductor Holding Electrical contact and test platform
CN103229610B (en) * 2010-11-30 2016-01-20 上野精机株式会社 Holding device, inspection device and sorting device for electronic parts

Also Published As

Publication number Publication date
WO2014096218A1 (en) 2014-06-26
EP2936176A1 (en) 2015-10-28
PH12015501241A1 (en) 2015-08-17
CN105008941A (en) 2015-10-28
CN105008941B (en) 2018-12-04
KR20150097535A (en) 2015-08-26

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