MY193569A - Component holder and method for substitution - Google Patents

Component holder and method for substitution

Info

Publication number
MY193569A
MY193569A MYPI2018000783A MYPI2018000783A MY193569A MY 193569 A MY193569 A MY 193569A MY PI2018000783 A MYPI2018000783 A MY PI2018000783A MY PI2018000783 A MYPI2018000783 A MY PI2018000783A MY 193569 A MY193569 A MY 193569A
Authority
MY
Malaysia
Prior art keywords
cap
shaft
retention portion
carousel
component holder
Prior art date
Application number
MYPI2018000783A
Inventor
Pit Fong Jong
Han Jie Lee
Original Assignee
Visdynamics Res Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Visdynamics Res Sdn Bhd filed Critical Visdynamics Res Sdn Bhd
Priority to MYPI2018000783A priority Critical patent/MY193569A/en
Priority to PH1/2019/000160A priority patent/PH12019000160B1/en
Priority to CN201910412150.6A priority patent/CN110504201B/en
Publication of MY193569A publication Critical patent/MY193569A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Feeding Of Articles To Conveyors (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

A component holder (32) for a carousel (31) comprising: a shaft (350), at least a portion 5 of which includes a channel, the distal end of the shaft (350) including an outlet to said channel; said shaft (350) having a circumference sized to be received by an orifice on the carousel (31), a plate to limit upward movement through the orifice, and a retention portion at the proximal end of the shaft (350); and a cap (330) with biasing means for abutting against the carousel (31) and biasing the cap (330) away therefrom, and an opening for receiving the retention portion; wherein the cap (330) is rotatable about the longitudinal axis of the shaft (350) such that in a first orientation the retention portion abuts against the cap (330) to prevent separation therefrom, and in a second orientation the retention portion is moveable through the opening in the cap (330).
MYPI2018000783A 2018-05-18 2018-05-18 Component holder and method for substitution MY193569A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
MYPI2018000783A MY193569A (en) 2018-05-18 2018-05-18 Component holder and method for substitution
PH1/2019/000160A PH12019000160B1 (en) 2018-05-18 2019-04-10 Component holder and method for substitution
CN201910412150.6A CN110504201B (en) 2018-05-18 2019-05-17 Component retainer and replacement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2018000783A MY193569A (en) 2018-05-18 2018-05-18 Component holder and method for substitution

Publications (1)

Publication Number Publication Date
MY193569A true MY193569A (en) 2022-10-19

Family

ID=68585596

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2018000783A MY193569A (en) 2018-05-18 2018-05-18 Component holder and method for substitution

Country Status (3)

Country Link
CN (1) CN110504201B (en)
MY (1) MY193569A (en)
PH (1) PH12019000160B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9385020B2 (en) * 2011-12-19 2016-07-05 SCREEN Holdings Co., Ltd. Substrate holding and rotating device, substrate treatment apparatus including the device, and substrate treatment method
PT2929221T (en) * 2012-12-07 2019-05-31 Chesterton A W Co Split mechanical seal with axial biasing assembly
JP6205159B2 (en) * 2013-04-09 2017-09-27 芝浦メカトロニクス株式会社 Substrate gripping apparatus and substrate processing apparatus
JP6143572B2 (en) * 2013-06-18 2017-06-07 株式会社Ｓｃｒｅｅｎホールディングス Substrate holding and rotating apparatus, substrate processing apparatus including the same, and substrate processing method

Also Published As

Publication number Publication date
PH12019000160A1 (en) 2019-12-11
CN110504201B (en) 2025-03-21
CN110504201A (en) 2019-11-26
PH12019000160B1 (en) 2022-10-05

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