MY197190A - Supporting module - Google Patents

Supporting module

Info

Publication number
MY197190A
MY197190A MYUI2018702617A MYUI2018702617A MY197190A MY 197190 A MY197190 A MY 197190A MY UI2018702617 A MYUI2018702617 A MY UI2018702617A MY UI2018702617 A MYUI2018702617 A MY UI2018702617A MY 197190 A MY197190 A MY 197190A
Authority
MY
Malaysia
Prior art keywords
wafer
ring
supporting
supporting module
platform
Prior art date
Application number
MYUI2018702617A
Inventor
Duen-Tsai Liau
Hung-I Lin
Po-Han Peng
Original Assignee
Mpi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mpi Corp filed Critical Mpi Corp
Publication of MY197190A publication Critical patent/MY197190A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A supporting module (100A) adapted to be connected to a wafer platform (54) to fix a wafer ring (60) on the wafer platform (54) is provided. The supporting module (100A) includes a supporting ring (100) and a plurality of fixing elements (120A). The supporting ring (100) is adapted to surround the wafer platform (54) and has a supporting surface (112) to support the wafer ring (60). The fixing elements (120A) are connected to the supporting ring (100) for holding the wafer ring (60) on the supporting surface (112) and restraining the wafer ring (60) from movement in a direction perpendicular to the supporting surface (112). In addition, a wafer moving equipment (50A) is also provided. (FIG. 2)
MYUI2018702617A 2017-09-15 2018-07-26 Supporting module MY197190A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW106213759U TWM553876U (en) 2017-09-15 2017-09-15 Supporting module and wafer moving equipment

Publications (1)

Publication Number Publication Date
MY197190A true MY197190A (en) 2023-05-31

Family

ID=61730301

Family Applications (1)

Application Number Title Priority Date Filing Date
MYUI2018702617A MY197190A (en) 2017-09-15 2018-07-26 Supporting module

Country Status (3)

Country Link
CN (1) CN208298807U (en)
MY (1) MY197190A (en)
TW (1) TWM553876U (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112548888B (en) * 2019-10-25 2025-12-09 深圳中科飞测科技股份有限公司 Fixing device, fixing method and detection equipment

Also Published As

Publication number Publication date
CN208298807U (en) 2018-12-28
TWM553876U (en) 2018-01-01

Similar Documents

Publication Publication Date Title
ZA202206492B (en) Structure for supporting marine installations and procedure for the execution thereof
TWD200220S (en) Susceptor for semiconductor substrate supporting apparatus
MX2020012724A (en) Egg support assembly, and associated device and method.
NO20161009A1 (en) Walkway for transferring personnel and equipment from a first facility to a second facility
EP3141231A3 (en) Devices and methods for improving the utility of an exoskeleton mobility base
EP3633473A4 (en) ADJUSTED SURFACE MACHINING PATH GENERATION PROCESS, DEVICE AND EQUIPMENT, AND SUPPORT
PL406114A1 (en) Clamping device
SG10201807897WA (en) Semi-automatic prober
SG10201808377WA (en) Wafer Support System, Wafer Support Device, System Comprising A Wafer And A Wafer Support Device As Well As Mask Aligner
WO2019090307A3 (en) Carrying devices
MX2017008809A (en) Cable management devices.
MX2019002759A (en) Floating module for modular solar panel platforms.
JP1752276S (en) electronic equipment stand
MY202399A (en) Method for assembling an apparatus intended for being placed in a body of water
MX391050B (en) CABLE PROCESSOR DEVICE.
SG10201701124TA (en) Substrate treating apparatus and substrate treating method
FI20175223L (en) Mounting support and method for mounting base and wall elements
JO3770B1 (en) Junction device for conveyor belts
MX395661B (en) Assembly and method for processing bead-apexes
MX2018014142A (en) Bed device.
MY199253A (en) Support apparatus for portable communication devices able to be applied on a motorcycle
MX2019011227A (en) Device for supporting body parts when painting said body parts.
MY179208A (en) Chuck table
EP3974325A4 (en) STATIC ELECTRICITY ELIMINATION DEVICE
TW200701386A (en) A semiconductor substrate processing apparatus with a passive substrate gripper