MY199742A - New movable 5s prism - Google Patents

New movable 5s prism

Info

Publication number
MY199742A
MY199742A MYPI2017704537A MYPI2017704537A MY199742A MY 199742 A MY199742 A MY 199742A MY PI2017704537 A MYPI2017704537 A MY PI2017704537A MY PI2017704537 A MYPI2017704537 A MY PI2017704537A MY 199742 A MY199742 A MY 199742A
Authority
MY
Malaysia
Prior art keywords
housing
prism
new movable
diffuser
optics
Prior art date
Application number
MYPI2017704537A
Inventor
Kuang Eng Oh
Original Assignee
Mi Equipment M Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mi Equipment M Sdn Bhd filed Critical Mi Equipment M Sdn Bhd
Priority to MYPI2017704537A priority Critical patent/MY199742A/en
Priority to PH12018000377A priority patent/PH12018000377A1/en
Priority to TW107140967A priority patent/TW201925760A/en
Priority to TW108211551U priority patent/TWM586797U/en
Priority to KR1020180146226A priority patent/KR20190062239A/en
Publication of MY199742A publication Critical patent/MY199742A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/02—Viewing or reading apparatus
    • G02B27/022—Viewing apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/27—Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

A semiconductor die multiple surfaces inspection system (1), comprising: a housing (2) substantially a polygon with a number of equilaterals; the housing (2) comprising an illumination source (11), a diffuser (12), and an optics (13) are aligned and arranged therein with respect to each of the housing (2) equilateral surface, whereby the illumination source (11) is closest to the equilateral surface providing illumination through the diffuser (12), then through the optics (13), and center region (CR) of the housing (2). (The most illustrative figure is FIG. 3-B)
MYPI2017704537A 2017-11-27 2017-11-27 New movable 5s prism MY199742A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
MYPI2017704537A MY199742A (en) 2017-11-27 2017-11-27 New movable 5s prism
PH12018000377A PH12018000377A1 (en) 2017-11-27 2018-11-16 New movable 5s prism
TW107140967A TW201925760A (en) 2017-11-27 2018-11-19 A semiconductor die multiple surfaces inspection system and method thereof
TW108211551U TWM586797U (en) 2017-11-27 2018-11-19 A semiconductor die multiple surfaces inspection system
KR1020180146226A KR20190062239A (en) 2017-11-27 2018-11-23 New movable 5s prism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2017704537A MY199742A (en) 2017-11-27 2017-11-27 New movable 5s prism

Publications (1)

Publication Number Publication Date
MY199742A true MY199742A (en) 2023-11-21

Family

ID=66845596

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2017704537A MY199742A (en) 2017-11-27 2017-11-27 New movable 5s prism

Country Status (4)

Country Link
KR (1) KR20190062239A (en)
MY (1) MY199742A (en)
PH (1) PH12018000377A1 (en)
TW (2) TWM586797U (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI894952B (en) * 2024-05-09 2025-08-21 均華精密工業股份有限公司 Optical detection apparatus in one-shot mode

Also Published As

Publication number Publication date
TW201925760A (en) 2019-07-01
KR20190062239A (en) 2019-06-05
TWM586797U (en) 2019-11-21
PH12018000377A1 (en) 2019-07-24

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