NL1006529C2 - Wafeldrager. - Google Patents

Wafeldrager. Download PDF

Info

Publication number
NL1006529C2
NL1006529C2 NL1006529A NL1006529A NL1006529C2 NL 1006529 C2 NL1006529 C2 NL 1006529C2 NL 1006529 A NL1006529 A NL 1006529A NL 1006529 A NL1006529 A NL 1006529A NL 1006529 C2 NL1006529 C2 NL 1006529C2
Authority
NL
Netherlands
Prior art keywords
wafer
wafers
carrier
wafer carrier
support
Prior art date
Application number
NL1006529A
Other languages
English (en)
Dutch (nl)
Inventor
David Lee Nyseth
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Application granted granted Critical
Publication of NL1006529C2 publication Critical patent/NL1006529C2/nl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B11/00—Other drilling tools
    • E21B11/005—Hand operated drilling tools
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B7/00—Special methods or apparatus for drilling
    • E21B7/003—Drilling with mechanical conveying means
    • E21B7/005—Drilling with mechanical conveying means with helical conveying means
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B7/00—Special methods or apparatus for drilling
    • E21B7/008—Drilling ice or a formation covered by ice

Landscapes

  • Engineering & Computer Science (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mining & Mineral Resources (AREA)
  • Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Earth Drilling (AREA)
  • Laminated Bodies (AREA)
NL1006529A 1996-07-12 1997-07-10 Wafeldrager. NL1006529C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US67888696 1996-07-12
US08/678,886 US5788082A (en) 1996-07-12 1996-07-12 Wafer carrier

Publications (1)

Publication Number Publication Date
NL1006529C2 true NL1006529C2 (nl) 1998-01-15

Family

ID=24724706

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1006529A NL1006529C2 (nl) 1996-07-12 1997-07-10 Wafeldrager.

Country Status (10)

Country Link
US (2) US5788082A (it)
JP (1) JPH1070185A (it)
KR (1) KR100287024B1 (it)
CN (1) CN1145193C (it)
DE (1) DE19731174C2 (it)
FR (1) FR2750963B1 (it)
GB (1) GB2315260B (it)
IT (1) IT1293424B1 (it)
NL (1) NL1006529C2 (it)
SG (1) SG65873A1 (it)

Cited By (3)

* Cited by examiner, † Cited by third party
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US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier

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US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
US7168564B2 (en) 1998-05-28 2007-01-30 Entegris, Inc. Composite substrate carrier

Also Published As

Publication number Publication date
CN1173039A (zh) 1998-02-11
HK1032142A1 (en) 2001-07-06
FR2750963B1 (fr) 1999-02-26
SG65873A1 (en) 1999-06-22
FR2750963A1 (fr) 1998-01-16
CN1145193C (zh) 2004-04-07
US6076617A (en) 2000-06-20
IT1293424B1 (it) 1999-03-01
DE19731174C2 (de) 2002-06-20
ITTO970606A1 (it) 1999-01-08
DE19731174A1 (de) 1998-01-15
GB9714701D0 (en) 1997-09-17
KR980012233A (ko) 1998-04-30
KR100287024B1 (ko) 2001-04-16
US5788082A (en) 1998-08-04
GB2315260B (en) 2000-11-29
JPH1070185A (ja) 1998-03-10
GB2315260A (en) 1998-01-28

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