NL1007902C2 - Wien-filter. - Google Patents

Wien-filter. Download PDF

Info

Publication number
NL1007902C2
NL1007902C2 NL1007902A NL1007902A NL1007902C2 NL 1007902 C2 NL1007902 C2 NL 1007902C2 NL 1007902 A NL1007902 A NL 1007902A NL 1007902 A NL1007902 A NL 1007902A NL 1007902 C2 NL1007902 C2 NL 1007902C2
Authority
NL
Netherlands
Prior art keywords
filter
electrodes
axis
magnetic
magnetic poles
Prior art date
Application number
NL1007902A
Other languages
English (en)
Dutch (nl)
Inventor
Hindrik Willem Mook
Original Assignee
Univ Delft Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Delft Tech filed Critical Univ Delft Tech
Priority to NL1007902A priority Critical patent/NL1007902C2/nl
Priority to EP98962700A priority patent/EP1042784B1/de
Priority to AU17871/99A priority patent/AU1787199A/en
Priority to PCT/NL1998/000728 priority patent/WO1999034401A1/en
Priority to AT98962700T priority patent/ATE248435T1/de
Priority to JP2000526947A priority patent/JP4278300B2/ja
Priority to US09/582,247 priority patent/US6452169B1/en
Priority to DE69817618T priority patent/DE69817618T2/de
Application granted granted Critical
Publication of NL1007902C2 publication Critical patent/NL1007902C2/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/466—Static spectrometers using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Valve Device For Special Equipments (AREA)
  • Control Of Throttle Valves Provided In The Intake System Or In The Exhaust System (AREA)
  • Sorption Type Refrigeration Machines (AREA)
  • Inorganic Insulating Materials (AREA)
NL1007902A 1997-12-24 1997-12-24 Wien-filter. NL1007902C2 (nl)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NL1007902A NL1007902C2 (nl) 1997-12-24 1997-12-24 Wien-filter.
EP98962700A EP1042784B1 (de) 1997-12-24 1998-12-23 Wien filter
AU17871/99A AU1787199A (en) 1997-12-24 1998-12-23 Wien filter
PCT/NL1998/000728 WO1999034401A1 (en) 1997-12-24 1998-12-23 Wien filter
AT98962700T ATE248435T1 (de) 1997-12-24 1998-12-23 Wien filter
JP2000526947A JP4278300B2 (ja) 1997-12-24 1998-12-23 ウィーンフィルター
US09/582,247 US6452169B1 (en) 1997-12-24 1998-12-23 Wien filter
DE69817618T DE69817618T2 (de) 1997-12-24 1998-12-23 Wien filter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1007902A NL1007902C2 (nl) 1997-12-24 1997-12-24 Wien-filter.
NL1007902 1997-12-24

Publications (1)

Publication Number Publication Date
NL1007902C2 true NL1007902C2 (nl) 1999-06-25

Family

ID=19766257

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1007902A NL1007902C2 (nl) 1997-12-24 1997-12-24 Wien-filter.

Country Status (8)

Country Link
US (1) US6452169B1 (de)
EP (1) EP1042784B1 (de)
JP (1) JP4278300B2 (de)
AT (1) ATE248435T1 (de)
AU (1) AU1787199A (de)
DE (1) DE69817618T2 (de)
NL (1) NL1007902C2 (de)
WO (1) WO1999034401A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7183104B1 (en) 2002-08-23 2007-02-27 Duane Morris Llp Separator and particle detection system
GB0320187D0 (en) * 2003-08-28 2003-10-01 Shimadzu Res Lab Europe Ltd Particle optical apparatus
US7164139B1 (en) 2005-02-01 2007-01-16 Kla-Tencor Technologies Corporation Wien filter with reduced chromatic aberration
US7402799B2 (en) * 2005-10-28 2008-07-22 Northrop Grumman Corporation MEMS mass spectrometer
US8294093B1 (en) * 2011-04-15 2012-10-23 Fei Company Wide aperature wien ExB mass filter
US8274046B1 (en) 2011-05-19 2012-09-25 Hermes Microvision Inc. Monochromator for charged particle beam apparatus
US8592761B2 (en) 2011-05-19 2013-11-26 Hermes Microvision Inc. Monochromator for charged particle beam apparatus
US8835866B2 (en) * 2011-05-19 2014-09-16 Fei Company Method and structure for controlling magnetic field distributions in an ExB Wien filter
US8436317B1 (en) 2011-11-09 2013-05-07 Hermes-Microvision, Inc. Wien filter
KR101633978B1 (ko) 2014-06-20 2016-06-28 한국표준과학연구원 모노크로메이터 및 이를 구비한 하전입자빔 장치
JP6545053B2 (ja) * 2015-03-30 2019-07-17 東京エレクトロン株式会社 処理装置および処理方法、ならびにガスクラスター発生装置および発生方法
WO2018011837A1 (ja) * 2016-07-11 2018-01-18 株式会社 日立ハイテクノロジーズ モノクロメータを備えた荷電粒子線装置
GB201804386D0 (en) 2018-03-19 2018-05-02 Thermo Fisher Scient Bremen Gmbh Mass Spectrometer
DE112020007220T5 (de) * 2020-07-20 2023-03-09 Hitachi High-Tech Corporation Energiefilter, Energieanalyseeinrichtung und Ladungsträgerstrahleinrichtung, die damit versehen ist

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114442A (ja) * 1988-10-25 1990-04-26 Jeol Ltd エネルギー分析装置
EP0525927B1 (de) * 1991-07-23 1995-09-27 Nissin Electric Company, Limited Ionenquelle mit Massentrennvorrichtung

Also Published As

Publication number Publication date
ATE248435T1 (de) 2003-09-15
DE69817618D1 (de) 2003-10-02
EP1042784B1 (de) 2003-08-27
JP4278300B2 (ja) 2009-06-10
AU1787199A (en) 1999-07-19
EP1042784A1 (de) 2000-10-11
JP2002500414A (ja) 2002-01-08
WO1999034401A1 (en) 1999-07-08
DE69817618T2 (de) 2004-06-17
US6452169B1 (en) 2002-09-17

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Effective date: 20030701