NL192649C - Inrichting voor het genereren van negatief geladen ionen. - Google Patents

Inrichting voor het genereren van negatief geladen ionen. Download PDF

Info

Publication number: NL192649C
Authority: NL; Netherlands
Prior art keywords: cathode; anode; negatively charged; arc; vacuum vessel
Prior art date: 1987-12-25

Application number

NL8803157A

Other languages

English (en)

Dutch (nl)

Other versions

NL8803157A (nl

NL192649B (nl

Original Assignee

Mitsubishi Electric Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-12-25

Filing date

1988-12-23

Publication date

1997-11-04

1987-12-25 Priority claimed from JP62326850A external-priority patent/JPH0731995B2/ja

1988-05-10 Priority claimed from JP63111467A external-priority patent/JP2656067B2/ja

1988-07-26 Priority claimed from JP63184643A external-priority patent/JP2618006B2/ja

1988-12-23 Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp

1989-07-17 Publication of NL8803157A publication Critical patent/NL8803157A/nl

1997-07-01 Publication of NL192649B publication Critical patent/NL192649B/xx

1997-11-04 Application granted granted Critical

1997-11-04 Publication of NL192649C publication Critical patent/NL192649C/nl

Links

150000002500 ions Chemical class 0.000 title claims description 21
239000002245 particle Substances 0.000 claims description 37
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
239000001257 hydrogen Substances 0.000 claims description 10
229910052739 hydrogen Inorganic materials 0.000 claims description 10
229910052751 metal Inorganic materials 0.000 claims description 8
239000002184 metal Substances 0.000 claims description 8
238000010586 diagram Methods 0.000 claims description 7
238000000605 extraction Methods 0.000 claims description 7
238000010891 electric arc Methods 0.000 claims description 6
239000007789 gas Substances 0.000 claims description 6
229910052786 argon Inorganic materials 0.000 claims description 5
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
239000010405 anode material Substances 0.000 claims description 4
229910052719 titanium Inorganic materials 0.000 claims description 4
239000010936 titanium Substances 0.000 claims description 4
239000010406 cathode material Substances 0.000 claims description 2
230000000977 initiatory effect Effects 0.000 claims description 2
230000005540 biological transmission Effects 0.000 claims 3
239000003990 capacitor Substances 0.000 claims 1
230000007423 decrease Effects 0.000 claims 1
229910052792 caesium Inorganic materials 0.000 description 15
229910052802 copper Inorganic materials 0.000 description 15
239000010949 copper Substances 0.000 description 15
TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 14
-1 hydrogen cations Chemical class 0.000 description 13
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
150000001768 cations Chemical class 0.000 description 5
239000004065 semiconductor Substances 0.000 description 5
150000001450 anions Chemical class 0.000 description 4
230000000694 effects Effects 0.000 description 2
125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
239000000463 material Substances 0.000 description 2
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
229910052753 mercury Inorganic materials 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
241001547866 Anoda Species 0.000 description 1
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011651 chromium Substances 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
230000002349 favourable effect Effects 0.000 description 1
229910052732 germanium Inorganic materials 0.000 description 1
GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
239000011133 lead Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
230000035515 penetration Effects 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
229910052715 tantalum Inorganic materials 0.000 description 1
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
229910052845 zircon Inorganic materials 0.000 description 1
GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/028—Negative ion sources

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Combustion & Propulsion (AREA)
Electron Sources, Ion Sources (AREA)
Manufacture Of Metal Powder And Suspensions Thereof (AREA)

NL8803157A 1987-12-25 1988-12-23 Inrichting voor het genereren van negatief geladen ionen. NL192649C (nl)

Applications Claiming Priority (6)

Application Number	Priority Date	Filing Date	Title
JP32685087		1987-12-25
JP62326850A JPH0731995B2 (ja)	1987-12-25	1987-12-25	負電荷発生装置
JP11146788		1988-05-10
JP63111467A JP2656067B2 (ja)	1988-05-10	1988-05-10	負電荷発生装置
JP18464388		1988-07-26
JP63184643A JP2618006B2 (ja)	1988-07-26	1988-07-26	負電荷発生装置

Publications (3)

Publication Number	Publication Date
NL8803157A NL8803157A (nl)	1989-07-17
NL192649B NL192649B (nl)	1997-07-01
NL192649C true NL192649C (nl)	1997-11-04

Family

ID=27311968

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL8803157A NL192649C (nl)	1987-12-25	1988-12-23	Inrichting voor het genereren van negatief geladen ionen.

Country Status (4)

Country	Link
US (1)	US4924102A (da)
DE (1)	DE3843334C2 (da)
DK (1)	DK720388A (da)
NL (1)	NL192649C (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2700280B2 (ja) *	1991-03-28	1998-01-19	理化学研究所	イオンビーム発生装置および成膜装置および成膜方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR1452393A (fr) *	1964-10-26	1966-02-25	Atomic Energy Authority Uk	Source ionique pour la production d'ions négatifs
US3356897A (en) *	1965-01-18	1967-12-05	Jr Thomas A Barr	Arc plasma generator with starter
US3323002A (en) *	1965-12-28	1967-05-30	Gen Electric	Triggered vacuum gap device having field emitting trigger assembly
US3465192A (en) *	1966-09-21	1969-09-02	Gen Electric	Triggerable arc discharge devices and trigger assemblies therefor
CA1140198A (en) *	1980-05-23	1983-01-25	National Research Council Of Canada	Laser triggered high voltage rail gap switch
US4458180A (en) *	1982-02-18	1984-07-03	Elscint Ltd.	Plasma electron source for cold-cathode discharge device or the like
US4587430A (en) *	1983-02-10	1986-05-06	Mission Research Corporation	Ion implantation source and device
US4714860A (en) *	1985-01-30	1987-12-22	Brown Ian G	Ion beam generating apparatus
US4721889A (en) *	1986-04-11	1988-01-26	The United States Of America As Represented By The United States Department Of Energy	Uniform insulation applied-B ion diode

1988
- 1988-12-05 US US07/279,801 patent/US4924102A/en not_active Expired - Fee Related
- 1988-12-22 DE DE3843334A patent/DE3843334C2/de not_active Expired - Fee Related
- 1988-12-23 DK DK720388A patent/DK720388A/da not_active Application Discontinuation
- 1988-12-23 NL NL8803157A patent/NL192649C/nl not_active IP Right Cessation

Also Published As

Publication number	Publication date
DE3843334C2 (de)	1996-05-02
NL8803157A (nl)	1989-07-17
DK720388A (da)	1989-06-26
DE3843334A1 (de)	1989-07-13
NL192649B (nl)	1997-07-01
US4924102A (en)	1990-05-08
DK720388D0 (da)	1988-12-23

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Legal Events

Date	Code	Title	Description
1989-07-16	A1A	A request for search or an international-type search has been filed
1992-04-01	BB	A search report has been drawn up
1992-11-02	BC	A request for examination has been filed
2001-09-03	V1	Lapsed because of non-payment of the annual fee	Effective date: 20010701