NL6807586A - - Google Patents

Info

Publication number
NL6807586A
NL6807586A NL6807586A NL6807586A NL6807586A NL 6807586 A NL6807586 A NL 6807586A NL 6807586 A NL6807586 A NL 6807586A NL 6807586 A NL6807586 A NL 6807586A NL 6807586 A NL6807586 A NL 6807586A
Authority
NL
Netherlands
Application number
NL6807586A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6807586A publication Critical patent/NL6807586A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14Substrate holders or susceptors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L9/00Supporting devices; Holding devices
    • B01L9/52Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0803Disc shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
NL6807586A 1967-05-29 1968-05-29 NL6807586A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR108216A FR1532497A (fr) 1967-05-29 1967-05-29 Support pour objets en forme de disques, tels que notamment pastilles semi-conductrices et son procédé de fabrication

Publications (1)

Publication Number Publication Date
NL6807586A true NL6807586A (fr) 1968-12-02

Family

ID=8631819

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6807586A NL6807586A (fr) 1967-05-29 1968-05-29

Country Status (4)

Country Link
CH (1) CH472117A (fr)
DE (1) DE1758411A1 (fr)
FR (1) FR1532497A (fr)
NL (1) NL6807586A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2133876A1 (de) * 1971-07-07 1973-01-18 Siemens Ag Anordnung zum eindiffundieren von dotierstoffen
DE2133843A1 (de) * 1971-07-07 1973-01-18 Siemens Ag Anordnung zum eindiffundieren von dotierstoffen in halbleiterscheiben

Also Published As

Publication number Publication date
FR1532497A (fr) 1968-07-12
CH472117A (fr) 1969-04-30
DE1758411A1 (de) 1971-01-28

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