NL7801202A - Piezoelectrische crystallijne film. - Google Patents

Piezoelectrische crystallijne film.

Info

Publication number
NL7801202A
NL7801202A NL7801202A NL7801202A NL7801202A NL 7801202 A NL7801202 A NL 7801202A NL 7801202 A NL7801202 A NL 7801202A NL 7801202 A NL7801202 A NL 7801202A NL 7801202 A NL7801202 A NL 7801202A
Authority
NL
Netherlands
Prior art keywords
piezelectric
crystalline film
crystalline
film
piezelectric crystalline
Prior art date
Application number
NL7801202A
Other languages
English (en)
Other versions
NL183614B (nl
NL183614C (nl
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of NL7801202A publication Critical patent/NL7801202A/nl
Publication of NL183614B publication Critical patent/NL183614B/nl
Application granted granted Critical
Publication of NL183614C publication Critical patent/NL183614C/nl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
NLAANVRAGE7801202,A 1977-02-02 1978-02-02 Piezoelectrische kristallijne film. NL183614C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1106077A JPS5396495A (en) 1977-02-02 1977-02-02 Piezooelectric crystal film of zinc oxide

Publications (3)

Publication Number Publication Date
NL7801202A true NL7801202A (nl) 1978-08-04
NL183614B NL183614B (nl) 1988-07-01
NL183614C NL183614C (nl) 1988-12-01

Family

ID=11767458

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7801202,A NL183614C (nl) 1977-02-02 1978-02-02 Piezoelectrische kristallijne film.

Country Status (7)

Country Link
US (1) US4156050A (nl)
JP (1) JPS5396495A (nl)
CH (1) CH628465A5 (nl)
DE (1) DE2804000C3 (nl)
FR (1) FR2379496A1 (nl)
GB (1) GB1549966A (nl)
NL (1) NL183614C (nl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4174421A (en) * 1977-09-13 1979-11-13 Murata Manufacturing Co., Ltd. Piezoelectric crystalline film of zinc oxide and method for making same
JPS5831743B2 (ja) * 1977-09-17 1983-07-08 株式会社村田製作所 酸化亜鉛の圧電結晶膜
JPS5516554A (en) * 1978-07-21 1980-02-05 Toko Inc Manufacture of thin film of zinc oxide
GB2571529B (en) * 2018-02-28 2021-04-14 Novosound Ltd Formation of piezoelectric devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3766041A (en) * 1970-09-29 1973-10-16 Matsushita Electric Industrial Co Ltd Method of producing piezoelectric thin films by cathodic sputtering
US3846649A (en) * 1973-06-18 1974-11-05 Rca Corp Piezoelectric transducer comprising oriented zinc oxide film and method of manufacture
US3988232A (en) * 1974-06-25 1976-10-26 Matsushita Electric Industrial Co., Ltd. Method of making crystal films

Also Published As

Publication number Publication date
NL183614B (nl) 1988-07-01
DE2804000A1 (de) 1978-08-03
JPS579711B2 (nl) 1982-02-23
GB1549966A (en) 1979-08-08
FR2379496A1 (fr) 1978-09-01
NL183614C (nl) 1988-12-01
DE2804000B2 (de) 1980-04-10
CH628465A5 (de) 1982-02-26
FR2379496B1 (nl) 1983-01-07
JPS5396495A (en) 1978-08-23
DE2804000C3 (de) 1980-11-27
US4156050A (en) 1979-05-22

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
A85 Still pending on 85-01-01
BC A request for examination has been filed
V4 Discontinued because of reaching the maximum lifetime of a patent

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