NL8902094A - Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent. - Google Patents

Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent. Download PDF

Info

Publication number: NL8902094A
Authority: NL; Netherlands
Prior art keywords: positioning device; transducer; electro; glass fiber; conductor segments
Prior art date: 1989-08-18

Application number

NL8902094A

Other languages

English (en)

Dutch (nl)

Original Assignee

Philips Nv

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-08-18

Filing date

1989-08-18

Publication date

1991-03-18

1989-08-18 Application filed by Philips Nv filed Critical Philips Nv

1989-08-18 Priority to NL8902094A priority Critical patent/NL8902094A/nl

1990-08-15 Priority to EP90202202A priority patent/EP0413397B1/fr

1990-08-15 Priority to JP2214451A priority patent/JPH0389874A/ja

1990-08-15 Priority to DE69010424T priority patent/DE69010424T2/de

1991-03-18 Publication of NL8902094A publication Critical patent/NL8902094A/nl

Links

239000004020 conductor Substances 0.000 claims description 57
238000006073 displacement reaction Methods 0.000 claims description 23
239000003365 glass fiber Substances 0.000 claims description 22
230000008878 coupling Effects 0.000 claims description 4
238000010168 coupling process Methods 0.000 claims description 4
238000005859 coupling reaction Methods 0.000 claims description 4
230000005641 tunneling Effects 0.000 claims description 4
239000011159 matrix material Substances 0.000 claims description 3
230000003287 optical effect Effects 0.000 claims description 2
239000000463 material Substances 0.000 description 6
JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
229910002113 barium titanate Inorganic materials 0.000 description 1
239000013078 crystal Substances 0.000 description 1
230000005684 electric field Effects 0.000 description 1
238000001493 electron microscopy Methods 0.000 description 1
238000005530 etching Methods 0.000 description 1
239000000835 fiber Substances 0.000 description 1
LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
239000010453 quartz Substances 0.000 description 1
238000004574 scanning tunneling microscopy Methods 0.000 description 1
230000035945 sensitivity Effects 0.000 description 1
238000004904 shortening Methods 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
235000011006 sodium potassium tartrate Nutrition 0.000 description 1
238000012876 topography Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
- G02B6/3504—Rotating, tilting or pivoting the waveguides, or with the waveguides describing a curved path
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3558—1xN switch, i.e. one input and a selectable single output of N possible outputs

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
General Health & Medical Sciences (AREA)
Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
Radiology & Medical Imaging (AREA)
Optics & Photonics (AREA)
Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Control Of Position Or Direction (AREA)
General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

NL8902094A 1989-08-18 1989-08-18 Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent. NL8902094A (nl)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
NL8902094A NL8902094A (nl)	1989-08-18	1989-08-18	Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent.
EP90202202A EP0413397B1 (fr)	1989-08-18	1990-08-15	Transducteur électromécanique et dispositif de positionnement electromécanique
JP2214451A JPH0389874A (ja)	1989-08-18	1990-08-15	電気機械変換器とそのような変換器を具える位置決めデバイス
DE69010424T DE69010424T2 (de)	1989-08-18	1990-08-15	Elektromechanischer Wandler und Positionierungseinrichtung mit einem derartigen elektromechanischen Wandler.

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
NL8902094		1989-08-18
NL8902094A NL8902094A (nl)	1989-08-18	1989-08-18	Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent.

Publications (1)

Publication Number	Publication Date
NL8902094A true NL8902094A (nl)	1991-03-18

Family

ID=19855182

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL8902094A NL8902094A (nl)	1989-08-18	1989-08-18	Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent.

Country Status (4)

Country	Link
EP (1)	EP0413397B1 (fr)
JP (1)	JPH0389874A (fr)
DE (1)	DE69010424T2 (fr)
NL (1)	NL8902094A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5081391A (en) *	1989-09-13	1992-01-14	Southwest Research Institute	Piezoelectric cylindrical transducer for producing or detecting asymmetrical vibrations
US5198715A (en) *	1990-05-23	1993-03-30	Digital Instruments, Inc.	Scanner for scanning probe microscopes having reduced Z-axis non-linearity
US5214342A (en) *	1991-10-21	1993-05-25	Yang Kei Wean C	Two-dimensional walker assembly for a scanning tunneling microscope
AU4958493A (en) *	1992-09-07	1994-03-29	Stephan Kleindiek	Electromechanical positioning device
US6194813B1 (en) *	1999-09-29	2001-02-27	Jacob Israelachvili	Extended-range xyz linear piezo-mechanical scanner for scanning-probe and surface force applications
US6787972B2 (en) *	1999-10-27	2004-09-07	The United States Of America As Represented By The Secretary Of The Navy	Piezoelectric rotary pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4087715A (en) *	1976-11-18	1978-05-02	Hughes Aircraft Company	Piezoelectric electromechanical micropositioner
DE3610540A1 (de) *	1986-03-27	1987-10-01	Kernforschungsanlage Juelich	Bewegungseinrichtung zur mikrobewegung von objekten

1989
- 1989-08-18 NL NL8902094A patent/NL8902094A/nl not_active Application Discontinuation
1990
- 1990-08-15 JP JP2214451A patent/JPH0389874A/ja active Pending
- 1990-08-15 DE DE69010424T patent/DE69010424T2/de not_active Expired - Fee Related
- 1990-08-15 EP EP90202202A patent/EP0413397B1/fr not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0413397B1 (fr)	1994-07-06
EP0413397A1 (fr)	1991-02-20
DE69010424D1 (de)	1994-08-11
DE69010424T2 (de)	1995-02-02
JPH0389874A (ja)	1991-04-15

Legal Events

Date	Code	Title	Description
1991-03-18	A1B	A search report has been drawn up
1992-04-01	BV	The patent application has lapsed

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AU601405B2 (en)	1990-09-13	Kinematic arrangement for the micro-movements of objects
EP0471511B1 (fr)	1997-07-16	Capteur de type cantilever et appareil de traitement d'informations équipé de ce capteur
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EP0071666B1 (fr)	1985-02-06	Support mobile électrique
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US9018823B2 (en)	2015-04-28	Apparatus and method for electromechanical positioning
WO2002073125A1 (fr)	2002-09-19	Appareil et procede destines a isoler et a mesurer un deplacement dans un appareil de metrologie
DE69218866T2 (de)	1997-10-09	Mechanismus zum parallelen Halten einer Fläche und Apparat zur Verwendung eines solchen Mechanismus
US5214342A (en)	1993-05-25	Two-dimensional walker assembly for a scanning tunneling microscope
NL8902094A (nl)	1991-03-18	Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent.
KR20060016118A (ko)	2006-02-21	주사 프로브 현미경 및 샘플면 주사 방법
RU2224978C2 (ru)	2004-02-27	Измерения с использованием туннельного тока между удлиненными проводниками
US6021665A (en)	2000-02-08	Cantilever tracking type scanning probe microscope
US5103094A (en)	1992-04-07	Compact temperature-compensated tube-type scanning probe with large scan range
EP0803710A2 (fr)	1997-10-29	Dispositif opto-électrique de mesure de position
US6437343B1 (en)	2002-08-20	Scanner system and piezoelectric micro-inching mechansim used in scanning probe microscope
US7256590B2 (en)	2007-08-14	Capacitance sensor type measuring apparatus
US7057746B2 (en)	2006-06-06	Scanner for precise movement and low power consumption
US5831264A (en)	1998-11-03	Electrostrictive actuator for scanned-probe microscope
US20030209060A1 (en)	2003-11-13	Apparatus and method for isolating and measuring movement in metrology apparatus
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US6618147B1 (en)	2003-09-09	Aligning device for assembling microsystems
JPH03112374A (ja)	1991-05-13	圧電アクチュエータ