NO119692B - - Google Patents
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- Publication number
- NO119692B NO119692B NO159198A NO15919865A NO119692B NO 119692 B NO119692 B NO 119692B NO 159198 A NO159198 A NO 159198A NO 15919865 A NO15919865 A NO 15919865A NO 119692 B NO119692 B NO 119692B
- Authority
- NO
- Norway
- Prior art keywords
- mask
- zones
- semiconductor
- oxide
- zone
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38992564A | 1964-08-17 | 1964-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO119692B true NO119692B (fr) | 1970-06-22 |
Family
ID=23540334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO159198A NO119692B (fr) | 1964-08-17 | 1965-08-03 |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH447386A (fr) |
| DE (1) | DE1297760B (fr) |
| GB (1) | GB1087569A (fr) |
| NL (1) | NL6510064A (fr) |
| NO (1) | NO119692B (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0748502B2 (ja) * | 1988-05-13 | 1995-05-24 | 三菱電機株式会社 | 半導体装置の製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB867559A (en) * | 1959-12-24 | 1961-05-10 | Standard Telephones Cables Ltd | Improvements in or relating to the production of two or more stencils in mutual register |
| AT262377B (de) * | 1961-12-22 | 1968-06-10 | Ibm | Anordnung zum Herstellen von Bearbeitungsmasken für die Fertigung von Halbleiterbauelementen |
-
1965
- 1965-07-02 GB GB28203/65A patent/GB1087569A/en not_active Expired
- 1965-08-03 NO NO159198A patent/NO119692B/no unknown
- 1965-08-03 NL NL6510064A patent/NL6510064A/xx unknown
- 1965-08-11 DE DEM66285A patent/DE1297760B/de active Pending
- 1965-08-16 CH CH1148765A patent/CH447386A/fr unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL6510064A (fr) | 1966-02-18 |
| GB1087569A (en) | 1967-10-18 |
| DE1297760B (de) | 1969-06-19 |
| CH447386A (fr) | 1967-11-30 |
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