NO20035577L - Millimeter bolge bryter for mikro elektro mekaniskt system - Google Patents

Millimeter bolge bryter for mikro elektro mekaniskt system

Info

Publication number
NO20035577L
NO20035577L NO20035577A NO20035577A NO20035577L NO 20035577 L NO20035577 L NO 20035577L NO 20035577 A NO20035577 A NO 20035577A NO 20035577 A NO20035577 A NO 20035577A NO 20035577 L NO20035577 L NO 20035577L
Authority
NO
Norway
Prior art keywords
switch
ground
mechanical system
electro mechanical
micro electro
Prior art date
Application number
NO20035577A
Other languages
English (en)
Norwegian (no)
Other versions
NO20035577D0 (no
Inventor
Robert B Stokes
Alvin M Kong
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of NO20035577D0 publication Critical patent/NO20035577D0/no
Publication of NO20035577L publication Critical patent/NO20035577L/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches

Landscapes

  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Micromachines (AREA)
  • Burglar Alarm Systems (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Transceivers (AREA)
  • Push-Button Switches (AREA)
  • Lasers (AREA)
NO20035577A 2002-12-16 2003-12-15 Millimeter bolge bryter for mikro elektro mekaniskt system NO20035577L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/320,926 US6873223B2 (en) 2002-12-16 2002-12-16 MEMS millimeter wave switches

Publications (2)

Publication Number Publication Date
NO20035577D0 NO20035577D0 (no) 2003-12-15
NO20035577L true NO20035577L (no) 2004-06-17

Family

ID=31887999

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20035577A NO20035577L (no) 2002-12-16 2003-12-15 Millimeter bolge bryter for mikro elektro mekaniskt system

Country Status (6)

Country Link
US (3) US6873223B2 (ja)
EP (2) EP1863055B1 (ja)
JP (1) JP2004201318A (ja)
AT (1) ATE462193T1 (ja)
DE (2) DE60333604D1 (ja)
NO (1) NO20035577L (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6873223B2 (en) 2002-12-16 2005-03-29 Northrop Grumman Corporation MEMS millimeter wave switches
DE112004002746T5 (de) * 2004-07-29 2008-03-06 Hitachi Media Electronics Co., Ltd., Oshu Kapazitives MEMS-Bauteil, Verfahren zu seiner Herstellung, und Hochfrequenzbauteil
CN1322527C (zh) * 2004-09-21 2007-06-20 清华大学 一种利用螺线圈电感结构调节谐振频率的微机械开关
CN100403476C (zh) * 2004-09-27 2008-07-16 东南大学 射频微电子机械单刀双掷膜开关及其制造方法
KR20090044781A (ko) * 2007-11-01 2009-05-07 삼성전기주식회사 Ｍｅｍｓ 스위치
KR101030549B1 (ko) 2008-12-30 2011-04-21 서울대학교산학협력단 마이크로전자기계시스템을 이용한 알에프 스위치
US8054589B2 (en) * 2009-12-16 2011-11-08 General Electric Company Switch structure and associated circuit
FR3006808B1 (fr) * 2013-06-06 2015-05-29 St Microelectronics Rousset Dispositif de commutation integre electriquement activable
CN110137634A (zh) * 2019-05-09 2019-08-16 中北大学 一种k型单刀四掷射频mems开关
CN114142190B (zh) * 2021-11-29 2023-04-07 中北大学 一种王字型上电极式单刀双掷开关
WO2026003557A1 (en) * 2024-06-27 2026-01-02 Bayerische Akademie Der Wissenschaftn Method for manufacturing a bridge structure, electronic circuit and superconducting qubit including a bridge structure

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
EP0887879A1 (en) 1997-06-23 1998-12-30 Nec Corporation Phased-array antenna apparatus
US6069540A (en) 1999-04-23 2000-05-30 Trw Inc. Micro-electro system (MEMS) switch
US6143997A (en) * 1999-06-04 2000-11-07 The Board Of Trustees Of The University Of Illinois Low actuation voltage microelectromechanical device and method of manufacture
DE10031569A1 (de) 1999-07-01 2001-02-01 Advantest Corp Integrierter Mikroschalter und Verfahren zu seiner Herstellung
US6218911B1 (en) 1999-07-13 2001-04-17 Trw Inc. Planar airbridge RF terminal MEMS switch
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
US6307169B1 (en) 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
US6570750B1 (en) * 2000-04-19 2003-05-27 The United States Of America As Represented By The Secretary Of The Air Force Shunted multiple throw MEMS RF switch
KR100335046B1 (ko) * 2000-05-24 2002-05-03 윤덕용 푸시-풀 형태의 미소 기전 초고주파 스위치
US6621387B1 (en) * 2001-02-23 2003-09-16 Analatom Incorporated Micro-electro-mechanical systems switch
US6873223B2 (en) 2002-12-16 2005-03-29 Northrop Grumman Corporation MEMS millimeter wave switches

Also Published As

Publication number Publication date
DE60333604D1 (de) 2010-09-09
JP2004201318A (ja) 2004-07-15
EP1432000B1 (en) 2010-03-24
NO20035577D0 (no) 2003-12-15
USRE45733E1 (en) 2015-10-06
EP1432000A1 (en) 2004-06-23
ATE462193T1 (de) 2010-04-15
US20040113715A1 (en) 2004-06-17
USRE45704E1 (en) 2015-09-29
DE60331811D1 (de) 2010-05-06
EP1863055B1 (en) 2010-07-28
EP1863055A3 (en) 2007-12-19
EP1863055A2 (en) 2007-12-05
US6873223B2 (en) 2005-03-29

Similar Documents

Publication Publication Date Title
NO20035577L (no) Millimeter bolge bryter for mikro elektro mekaniskt system
DE502005002233D1 (de) Abstandsmessvorrichtung mit einer Mikrowellen-Antennenanordnung
SE9704296L (sv) Mikrostripanordning
WO2003026057A1 (en) High-frequency switch
US20170012335A1 (en) Substrate Integrated Waveguide Switch
EP1703435A3 (en) Antenna switching equipment
ATE385348T1 (de) Mobilfunkantenne mit strahlformungselement
EP1152485A4 (en) RADIO TRANSMISSION DEVICE
DE69929534D1 (de) Hochfrequenzfunkschaltung
EP1261130A3 (en) High-frequency switching device incorporating an inverter circuit
DE60129406D1 (de) Schnelle elektrische Bedienungsvorrichtung für Übertragungsschalter, und Übertragungsschalter mit einer solchen Bedienungsvorrichtung versehen
KR860001644A (ko) 위상제어 스위칭 장치
NO20006123L (no) Flerpolt signalkontakt for redusert krysskopling ved höyfrekvens
WO2006110207A3 (en) Integrated circuit transformer devices for on-chip millimeter-wave applications
SE0004354L (sv) Mikrovågsantenn med patchmonteringsanordning
BR0210399A8 (pt) "vidraça de antena com um componente elétrico de alta frequência"
SE9902296L (sv) Elektrisk transmissionsanordning med korsande striplineledningar
DE59911061D1 (de) Hochspannungsleistungsschalter mit einer Isolierstoffdüse
KR960009268A (ko) 집적회로
ATE336798T1 (de) Elektromagnetisches relais
ATE326041T1 (de) Breitband hochimpedanz-transponder für elektronisches identifizierungssystem
SE9902301D0 (sv) Övergång mellan asymmetrisk stripline och mikrostrip i kavitet
ATE423401T1 (de) Netzumsetzer, hochfrequenzmodul und kommunikationsgerät
RU93045793A (ru) Способ контроля состояния изоляции
JP2002280809A5 (ja)

Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application