NO20061945L - Fremgangsmate for i kompensere et coriolisgyroskop og coriolisgyroskop derav - Google Patents

Fremgangsmate for i kompensere et coriolisgyroskop og coriolisgyroskop derav

Info

Publication number
NO20061945L
NO20061945L NO20061945A NO20061945A NO20061945L NO 20061945 L NO20061945 L NO 20061945L NO 20061945 A NO20061945 A NO 20061945A NO 20061945 A NO20061945 A NO 20061945A NO 20061945 L NO20061945 L NO 20061945L
Authority
NO
Norway
Prior art keywords
coriolis gyroscope
compensating
quadrature
bias
coriolis
Prior art date
Application number
NO20061945A
Other languages
English (en)
Other versions
NO338403B1 (no
Inventor
Eberhard Handrich
Wolfram Geiger
Original Assignee
Litef Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litef Gmbh filed Critical Litef Gmbh
Publication of NO20061945L publication Critical patent/NO20061945L/no
Publication of NO338403B1 publication Critical patent/NO338403B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
  • Measuring Volume Flow (AREA)

Abstract

Det beskrives en fremgangsmåte for kvadraturbiaskompensering i et coriolisgyroskop, hvilken resonator (1) er i form av et koblet system omfattende en første og en andre lineær oscillator (3, 4), og kvadraturbiasen for coriolisgyroskopet blir bestemt. Et elektrostatisk felt blir produsert ved å variere den innbyrdes justeringen av de to oscillatorene (3, 4) med hensyn til hverandre, hvor justeringen (styrken) på det elektrostatiske feltet blir regulert slik at den bestemte kvadraturbiasen er så liten som mulig.
NO20061945A 2003-12-23 2006-05-02 Fremgangsmåte for å kompensere et coriolisgyroskop og coriolisgyroskop derav NO338403B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10360962A DE10360962B4 (de) 2003-12-23 2003-12-23 Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel
PCT/EP2004/013447 WO2005066585A1 (de) 2003-12-23 2004-11-26 Verfahren zur quadraturbias-kompensation in einem corioliskreisel sowie dafür geeigneter corioliskreisel

Publications (2)

Publication Number Publication Date
NO20061945L true NO20061945L (no) 2006-07-24
NO338403B1 NO338403B1 (no) 2016-08-15

Family

ID=34706530

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20061945A NO338403B1 (no) 2003-12-23 2006-05-02 Fremgangsmåte for å kompensere et coriolisgyroskop og coriolisgyroskop derav

Country Status (14)

Country Link
US (1) US7481110B2 (no)
EP (1) EP1706707B1 (no)
JP (1) JP4370331B2 (no)
KR (1) KR100850587B1 (no)
CN (1) CN100533062C (no)
AT (1) ATE361459T1 (no)
AU (1) AU2004312572B2 (no)
CA (1) CA2548728C (no)
DE (2) DE10360962B4 (no)
NO (1) NO338403B1 (no)
PL (1) PL1706707T3 (no)
RU (1) RU2327109C2 (no)
WO (1) WO2005066585A1 (no)
ZA (1) ZA200605929B (no)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1962054B1 (en) * 2007-02-13 2011-07-20 STMicroelectronics Srl Microelectromechanical gyroscope with open loop reading device and control method of a microelectromechanical gyroscope
DE102007030119A1 (de) * 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
DE102007030120B4 (de) 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
DE602007009090D1 (de) * 2007-07-05 2010-10-21 St Microelectronics Srl Mikroelektromechanisches Gyroskop mit Lesevorrichtung für eine offene Schleife und Steuerverfahren dafür
EP2098823B1 (en) 2008-03-05 2016-10-19 Colibrys S.A. Accelerometer with offset compensation
US7980115B2 (en) 2008-05-30 2011-07-19 Northrop Grumman Guidance and Electronic Co, Inc. Self-calibrating laser semiconductor accelerometer
EP2177875A3 (en) 2008-10-14 2013-04-24 Watson Industries, Inc. A Vibrating Structural Gyroscope with Quadrature Control
IT1394898B1 (it) * 2009-06-03 2012-07-20 St Microelectronics Rousset Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico
JP4968298B2 (ja) * 2009-09-04 2012-07-04 株式会社デンソー 振動型角速度センサ
DE102010006584B4 (de) * 2010-02-02 2012-09-27 Northrop Grumman Litef Gmbh Corioliskreisel mit Korrektureinheiten und Verfahren zur Reduktion des Quadraturbias
DE102011005744A1 (de) * 2010-03-17 2011-09-22 Continental Teves Ag & Co. Ohg Verfahren zur entkoppelten Regelung der Quadratur und der Resonanzfrequenz eines mikromechanischen Gyroskops
EP2547985B1 (de) * 2010-03-17 2016-03-16 Continental Teves AG & Co. oHG Verfahren zur entkoppelten regelung der quadratur und der resonanzfrequenz eines mikromechanischen drehratensensors mittels sigma-delta-modulation
WO2012005062A1 (ja) * 2010-07-06 2012-01-12 日立オートモーティブシステムズ株式会社 慣性センサ
CN103221331B (zh) 2010-09-18 2016-02-03 快捷半导体公司 用于微机电系统的密封封装
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
WO2012040211A2 (en) 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
US9010184B2 (en) * 2011-05-23 2015-04-21 Senodia Technologies (Shanghai) Co., Ltd. MEMS devices sensing both rotation and acceleration
EP2527788A1 (en) 2011-05-26 2012-11-28 Maxim Integrated Products, Inc. Quadrature error compensation
US8689631B1 (en) 2011-06-23 2014-04-08 The United States Of America As Represented By Secretary Of The Navy High sensitivity mechanical gyro with reduced quadrature error
FR2983574B1 (fr) * 2011-12-06 2014-01-10 Sagem Defense Securite Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur
US9759563B2 (en) * 2012-01-31 2017-09-12 Nxp Usa, Inc. Vibration robust x-axis ring gyro transducer
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9625272B2 (en) * 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
JP6143430B2 (ja) * 2012-05-08 2017-06-07 三菱プレシジョン株式会社 バイアス補正機能を備えた振動型ジャイロ
US9310202B2 (en) 2012-07-09 2016-04-12 Freescale Semiconductor, Inc. Angular rate sensor with quadrature error compensation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9335170B2 (en) * 2012-11-28 2016-05-10 Freescale Semiconductor, Inc. Inertial sensor and method of levitation effect compensation
FR3000194B1 (fr) 2012-12-24 2015-03-13 Commissariat Energie Atomique Gyroscope a calibration simplifiee et procede de calibration simplifie d'un gyroscope
US9644963B2 (en) 2013-03-15 2017-05-09 Fairchild Semiconductor Corporation Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation
KR101469357B1 (ko) * 2013-03-25 2014-12-08 김은주 인파 및 장애물이 많은 시가지에서의 gis 및 도로대장 조사측량 장치
US9476711B2 (en) 2013-06-24 2016-10-25 Freescale Semiconductor, Inc. Angular rate sensor with quadrature error compensation
US9410806B2 (en) * 2013-08-26 2016-08-09 Robert Bosch Gmbh System and method for gyroscope zero-rate-offset drift reduction through demodulation phase error correction
JP2015203604A (ja) * 2014-04-11 2015-11-16 三菱プレシジョン株式会社 高性能化が図られた振動型ジャイロ
CN106461394A (zh) 2014-06-26 2017-02-22 路梅戴尼科技公司 用于从非线性周期信号确定旋转的系统和方法
US9810535B2 (en) * 2015-02-10 2017-11-07 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
TWI650558B (zh) 2015-05-20 2019-02-11 美商路梅戴尼科技公司 用於決定慣性參數之方法及系統
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
JP6571064B2 (ja) 2016-11-21 2019-09-04 株式会社東芝 検出装置およびセンサ装置
CN108761134B (zh) * 2017-06-22 2020-02-14 西北工业大学 一种弱耦合谐振式传感器的线性化输出检测方法
US11073393B2 (en) * 2019-01-16 2021-07-27 Northrop Grumman Systems Corporation Coriolis vibratory gyroscope control system
US11073391B2 (en) 2019-09-26 2021-07-27 Northrop Grumman Systems Corporation Coriolis vibratory accelerometer system

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2085849C1 (ru) * 1995-12-27 1997-07-27 ТОО-Научно-производственная компания "Вектор" Микромеханический вибрационный гироскоп (его варианты)
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
RU2110768C1 (ru) * 1996-07-10 1998-05-10 Товарищество с ограниченной ответственностью научно-производственная компания "Вектор" Микромеханический вибрационный гироскоп
JP3285140B2 (ja) * 1997-09-04 2002-05-27 株式会社村田製作所 振動ジャイロの調整方法
JP3418904B2 (ja) * 1997-10-29 2003-06-23 株式会社豊田中央研究所 振動式角速度検出器
JP4126826B2 (ja) * 1999-11-05 2008-07-30 株式会社デンソー 角速度センサ
WO2001071364A1 (en) * 2000-03-17 2001-09-27 Microsensors, Inc. Method of canceling quadrature error in an angular rate sensor
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10108198A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
EP1253399B1 (en) * 2001-04-27 2006-06-21 STMicroelectronics S.r.l. Integrated gyroscope of semiconductor material
US6619121B1 (en) * 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
AU2002326068A1 (en) * 2001-08-23 2003-03-10 Koninklijke Philips Electronics N.V. Method and drive means for color correction in an organic electroluminescent device
US6651500B2 (en) * 2001-10-03 2003-11-25 Litton Systems, Inc. Micromachined silicon tuned counterbalanced accelerometer-gyro with quadrature nulling
WO2003058167A1 (de) * 2002-01-12 2003-07-17 Robert Bosch Gmbh Drehratensensor
US6701786B2 (en) * 2002-04-29 2004-03-09 L-3 Communications Corporation Closed loop analog gyro rate sensor

Also Published As

Publication number Publication date
US7481110B2 (en) 2009-01-27
KR20060090284A (ko) 2006-08-10
AU2004312572B2 (en) 2008-02-07
RU2327109C2 (ru) 2008-06-20
KR100850587B1 (ko) 2008-08-05
WO2005066585A1 (de) 2005-07-21
NO338403B1 (no) 2016-08-15
ATE361459T1 (de) 2007-05-15
ZA200605929B (en) 2008-01-08
CA2548728A1 (en) 2005-07-21
JP4370331B2 (ja) 2009-11-25
JP2007513344A (ja) 2007-05-24
CN100533062C (zh) 2009-08-26
DE10360962A1 (de) 2005-07-28
CN1898528A (zh) 2007-01-17
US20070144255A1 (en) 2007-06-28
PL1706707T3 (pl) 2007-09-28
CA2548728C (en) 2009-10-06
EP1706707A1 (de) 2006-10-04
DE502004003734D1 (de) 2007-06-14
EP1706707B1 (de) 2007-05-02
RU2006113686A (ru) 2008-01-27
DE10360962B4 (de) 2007-05-31
AU2004312572A1 (en) 2005-07-21

Similar Documents

Publication Publication Date Title
NO20061945L (no) Fremgangsmate for i kompensere et coriolisgyroskop og coriolisgyroskop derav
NO20061943L (no) Fremgangsmate og anordning ved coriolisgyroskop
US8816790B2 (en) Self-biased amplitude-controlled oscillator with constant harmonic content
NO20053904L (no) Fremgangsmate for a kompensere en nullpunktsfeil i et vibrerende gyroskop.
Deppe et al. MEMS and FOG technologies for tactical and navigation grade inertial sensors—Recent improvements and comparison
US8991247B2 (en) High range digital angular rate sensor based on frequency modulation
ATE542291T1 (de) Verfahren, system und vorrichtung für präzise und stabile referenzoszillatoren auf lc-basis
DE60331232D1 (de) Integrierter, digitalgeregelter kristalloszillator
ATE336023T1 (de) Beschleunigungsunempfindliche optoelektronische oszillatoren
NO20055235D0 (no) Fremgangsmate for drift av Coriolis gyroskop og tilhorende evalueringselektronikk
Cho High-performance micromachined vibratory rate-and rate-integrating gyroscopes
NO20053722L (no) Fremgangsmate for a bestemme nullpunktfeil i et vibrasjonsgyroskope
Tang et al. A rate hemispherical resonator gyroscope with bias stability of 0.0056°/h with compensation of phase delay
Wu et al. Analysis of parasitic feed-through capacitance effect in closed-loop drive circuit design for capacitive micro-gyroscope
Arifin et al. Effects of electrostatic nonlinearity on the rate measuring performance of ring based Coriolis Vibrating Gyroscopes (CVGs)
Yin et al. A phase self-correction method for bias temperature drift suppression of MEMS gyroscopes
CN102650523A (zh) 一种基于光隔离器的闭环差分双干涉式光纤陀螺仪
DE50302625D1 (de) Verfahren zur elektronischen abstimmung der ausleseschwingungsfrequenz eines corioliskreisels
ATE472714T1 (de) Verfahren zur elektronischen abstimmung der ausleseschwingungsfrequenz eines corioliskreisels
DE50304082D1 (de) Verfahren zur elektronischen abstimmung der ausleseschwingungsfrequenz eines corioliskreisels
Liu et al. System nonlinear analysis for frequency-modulated gyroscope
Lin et al. Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes
Defoort et al. Synchronization in micromechanical gyroscopes
Hu A note on the frequency of nonlinear conservative oscillators
Gallacher et al. The application of parametric excitation in resonant MEMS gyroscopes