NO20061945L - Fremgangsmate for i kompensere et coriolisgyroskop og coriolisgyroskop derav - Google Patents
Fremgangsmate for i kompensere et coriolisgyroskop og coriolisgyroskop deravInfo
- Publication number
- NO20061945L NO20061945L NO20061945A NO20061945A NO20061945L NO 20061945 L NO20061945 L NO 20061945L NO 20061945 A NO20061945 A NO 20061945A NO 20061945 A NO20061945 A NO 20061945A NO 20061945 L NO20061945 L NO 20061945L
- Authority
- NO
- Norway
- Prior art keywords
- coriolis gyroscope
- compensating
- quadrature
- bias
- coriolis
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
- Measuring Volume Flow (AREA)
Abstract
Det beskrives en fremgangsmåte for kvadraturbiaskompensering i et coriolisgyroskop, hvilken resonator (1) er i form av et koblet system omfattende en første og en andre lineær oscillator (3, 4), og kvadraturbiasen for coriolisgyroskopet blir bestemt. Et elektrostatisk felt blir produsert ved å variere den innbyrdes justeringen av de to oscillatorene (3, 4) med hensyn til hverandre, hvor justeringen (styrken) på det elektrostatiske feltet blir regulert slik at den bestemte kvadraturbiasen er så liten som mulig.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10360962A DE10360962B4 (de) | 2003-12-23 | 2003-12-23 | Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel |
| PCT/EP2004/013447 WO2005066585A1 (de) | 2003-12-23 | 2004-11-26 | Verfahren zur quadraturbias-kompensation in einem corioliskreisel sowie dafür geeigneter corioliskreisel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO20061945L true NO20061945L (no) | 2006-07-24 |
| NO338403B1 NO338403B1 (no) | 2016-08-15 |
Family
ID=34706530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20061945A NO338403B1 (no) | 2003-12-23 | 2006-05-02 | Fremgangsmåte for å kompensere et coriolisgyroskop og coriolisgyroskop derav |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US7481110B2 (no) |
| EP (1) | EP1706707B1 (no) |
| JP (1) | JP4370331B2 (no) |
| KR (1) | KR100850587B1 (no) |
| CN (1) | CN100533062C (no) |
| AT (1) | ATE361459T1 (no) |
| AU (1) | AU2004312572B2 (no) |
| CA (1) | CA2548728C (no) |
| DE (2) | DE10360962B4 (no) |
| NO (1) | NO338403B1 (no) |
| PL (1) | PL1706707T3 (no) |
| RU (1) | RU2327109C2 (no) |
| WO (1) | WO2005066585A1 (no) |
| ZA (1) | ZA200605929B (no) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1962054B1 (en) * | 2007-02-13 | 2011-07-20 | STMicroelectronics Srl | Microelectromechanical gyroscope with open loop reading device and control method of a microelectromechanical gyroscope |
| DE102007030119A1 (de) * | 2007-06-29 | 2009-01-02 | Litef Gmbh | Corioliskreisel |
| DE102007030120B4 (de) * | 2007-06-29 | 2010-04-08 | Litef Gmbh | Drehratensensor |
| EP2023082B1 (en) * | 2007-07-05 | 2010-09-08 | STMicroelectronics Srl | Micro-electro-mechanical gyroscope with open-loop reading device and control method thereof |
| EP2098823B1 (en) * | 2008-03-05 | 2016-10-19 | Colibrys S.A. | Accelerometer with offset compensation |
| US7980115B2 (en) | 2008-05-30 | 2011-07-19 | Northrop Grumman Guidance and Electronic Co, Inc. | Self-calibrating laser semiconductor accelerometer |
| US8661898B2 (en) | 2008-10-14 | 2014-03-04 | Watson Industries, Inc. | Vibrating structural gyroscope with quadrature control |
| IT1394898B1 (it) * | 2009-06-03 | 2012-07-20 | St Microelectronics Rousset | Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico |
| JP4968298B2 (ja) * | 2009-09-04 | 2012-07-04 | 株式会社デンソー | 振動型角速度センサ |
| DE102010006584B4 (de) * | 2010-02-02 | 2012-09-27 | Northrop Grumman Litef Gmbh | Corioliskreisel mit Korrektureinheiten und Verfahren zur Reduktion des Quadraturbias |
| EP2547984B1 (de) * | 2010-03-17 | 2014-05-07 | Continental Teves AG & Co. oHG | Verfahren zur entkoppelten regelung der quadratur und der resonanzfrequenz eines mikromechanischen gyroskops |
| WO2011113917A1 (de) * | 2010-03-17 | 2011-09-22 | Continental Teves Ag & Co. Ohg | Verfahren zur entkoppelten regelung der quadratur und der resonanzfrequenz eines mikromechanischen drehratensensors mittels sigma-delta-modulation |
| EP2592382A4 (en) * | 2010-07-06 | 2016-04-06 | Hitachi Automotive Systems Ltd | INERTIA SENSOR |
| KR101904178B1 (ko) | 2010-09-18 | 2018-10-04 | 페어차일드 세미컨덕터 코포레이션 | 단일 구동 모드를 가진 미세기계화 모노리식 3축 자이로스코프 |
| KR20130052652A (ko) | 2010-09-18 | 2013-05-22 | 페어차일드 세미컨덕터 코포레이션 | 미세 전자 기계 시스템을 위한 시일된 패키징 |
| EP2619536B1 (en) | 2010-09-20 | 2016-11-02 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| US9010184B2 (en) * | 2011-05-23 | 2015-04-21 | Senodia Technologies (Shanghai) Co., Ltd. | MEMS devices sensing both rotation and acceleration |
| EP2527788A1 (en) * | 2011-05-26 | 2012-11-28 | Maxim Integrated Products, Inc. | Quadrature error compensation |
| US8689631B1 (en) | 2011-06-23 | 2014-04-08 | The United States Of America As Represented By Secretary Of The Navy | High sensitivity mechanical gyro with reduced quadrature error |
| FR2983574B1 (fr) * | 2011-12-06 | 2014-01-10 | Sagem Defense Securite | Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur |
| US9759563B2 (en) * | 2012-01-31 | 2017-09-12 | Nxp Usa, Inc. | Vibration robust x-axis ring gyro transducer |
| EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
| EP2647952B1 (en) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
| US9625272B2 (en) * | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| JP6143430B2 (ja) | 2012-05-08 | 2017-06-07 | 三菱プレシジョン株式会社 | バイアス補正機能を備えた振動型ジャイロ |
| US9310202B2 (en) | 2012-07-09 | 2016-04-12 | Freescale Semiconductor, Inc. | Angular rate sensor with quadrature error compensation |
| DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
| US9335170B2 (en) * | 2012-11-28 | 2016-05-10 | Freescale Semiconductor, Inc. | Inertial sensor and method of levitation effect compensation |
| FR3000194B1 (fr) * | 2012-12-24 | 2015-03-13 | Commissariat Energie Atomique | Gyroscope a calibration simplifiee et procede de calibration simplifie d'un gyroscope |
| US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
| KR101469357B1 (ko) * | 2013-03-25 | 2014-12-08 | 김은주 | 인파 및 장애물이 많은 시가지에서의 gis 및 도로대장 조사측량 장치 |
| US9476711B2 (en) | 2013-06-24 | 2016-10-25 | Freescale Semiconductor, Inc. | Angular rate sensor with quadrature error compensation |
| US9410806B2 (en) * | 2013-08-26 | 2016-08-09 | Robert Bosch Gmbh | System and method for gyroscope zero-rate-offset drift reduction through demodulation phase error correction |
| JP2015203604A (ja) * | 2014-04-11 | 2015-11-16 | 三菱プレシジョン株式会社 | 高性能化が図られた振動型ジャイロ |
| WO2015200850A2 (en) * | 2014-06-26 | 2015-12-30 | Lumedyne Technologies Incorporated | System and methods for determining rotation from nonlinear periodic signals |
| US9810535B2 (en) | 2015-02-10 | 2017-11-07 | Northrop Grumman Systems Corporation | Vibrating-mass gyroscope systems and method |
| CN107636473B (zh) | 2015-05-20 | 2020-09-01 | 卢米达因科技公司 | 从非线性的周期性信号中提取惯性信息 |
| US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
| US10371521B2 (en) | 2016-05-26 | 2019-08-06 | Honeywell International Inc. | Systems and methods for a four-mass vibrating MEMS structure |
| US10234477B2 (en) | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
| JP6571064B2 (ja) | 2016-11-21 | 2019-09-04 | 株式会社東芝 | 検出装置およびセンサ装置 |
| CN108761134B (zh) * | 2017-06-22 | 2020-02-14 | 西北工业大学 | 一种弱耦合谐振式传感器的线性化输出检测方法 |
| US11073393B2 (en) | 2019-01-16 | 2021-07-27 | Northrop Grumman Systems Corporation | Coriolis vibratory gyroscope control system |
| US11073391B2 (en) | 2019-09-26 | 2021-07-27 | Northrop Grumman Systems Corporation | Coriolis vibratory accelerometer system |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2085849C1 (ru) * | 1995-12-27 | 1997-07-27 | ТОО-Научно-производственная компания "Вектор" | Микромеханический вибрационный гироскоп (его варианты) |
| US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
| RU2110768C1 (ru) * | 1996-07-10 | 1998-05-10 | Товарищество с ограниченной ответственностью научно-производственная компания "Вектор" | Микромеханический вибрационный гироскоп |
| JP3285140B2 (ja) * | 1997-09-04 | 2002-05-27 | 株式会社村田製作所 | 振動ジャイロの調整方法 |
| JP3418904B2 (ja) * | 1997-10-29 | 2003-06-23 | 株式会社豊田中央研究所 | 振動式角速度検出器 |
| JP4126826B2 (ja) * | 1999-11-05 | 2008-07-30 | 株式会社デンソー | 角速度センサ |
| WO2001071364A1 (en) * | 2000-03-17 | 2001-09-27 | Microsensors, Inc. | Method of canceling quadrature error in an angular rate sensor |
| DE10108196A1 (de) * | 2001-02-21 | 2002-10-24 | Bosch Gmbh Robert | Drehratensensor |
| DE10108198A1 (de) * | 2001-02-21 | 2002-09-12 | Bosch Gmbh Robert | Drehratensensor |
| DE60120921T2 (de) * | 2001-04-27 | 2007-02-01 | Stmicroelectronics S.R.L., Agrate Brianza | Aus Halbleitermaterial hergestellter integrierter Kreisel |
| US6619121B1 (en) * | 2001-07-25 | 2003-09-16 | Northrop Grumman Corporation | Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors |
| US20030033850A1 (en) * | 2001-08-09 | 2003-02-20 | Challoner A. Dorian | Cloverleaf microgyroscope with electrostatic alignment and tuning |
| ATE355585T1 (de) * | 2001-08-23 | 2006-03-15 | Koninkl Philips Electronics Nv | Verfahren und ansteuermittel zur farbkorrektur in einem organischen elektrolumineszenzbauelement |
| US6651500B2 (en) * | 2001-10-03 | 2003-11-25 | Litton Systems, Inc. | Micromachined silicon tuned counterbalanced accelerometer-gyro with quadrature nulling |
| JP4555571B2 (ja) * | 2002-01-12 | 2010-10-06 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 回転速度センサ |
| US6701786B2 (en) * | 2002-04-29 | 2004-03-09 | L-3 Communications Corporation | Closed loop analog gyro rate sensor |
-
2003
- 2003-12-23 DE DE10360962A patent/DE10360962B4/de not_active Expired - Lifetime
-
2004
- 2004-11-26 RU RU2006113686/28A patent/RU2327109C2/ru not_active IP Right Cessation
- 2004-11-26 US US10/584,483 patent/US7481110B2/en not_active Expired - Lifetime
- 2004-11-26 KR KR1020067009956A patent/KR100850587B1/ko not_active Expired - Fee Related
- 2004-11-26 DE DE502004003734T patent/DE502004003734D1/de not_active Expired - Lifetime
- 2004-11-26 WO PCT/EP2004/013447 patent/WO2005066585A1/de not_active Ceased
- 2004-11-26 CN CNB2004800382335A patent/CN100533062C/zh not_active Expired - Lifetime
- 2004-11-26 PL PL04798097T patent/PL1706707T3/pl unknown
- 2004-11-26 JP JP2006541853A patent/JP4370331B2/ja not_active Expired - Fee Related
- 2004-11-26 AU AU2004312572A patent/AU2004312572B2/en not_active Ceased
- 2004-11-26 CA CA002548728A patent/CA2548728C/en not_active Expired - Lifetime
- 2004-11-26 EP EP04798097A patent/EP1706707B1/de not_active Expired - Lifetime
- 2004-11-26 AT AT04798097T patent/ATE361459T1/de not_active IP Right Cessation
-
2006
- 2006-05-02 NO NO20061945A patent/NO338403B1/no unknown
- 2006-07-18 ZA ZA2006/05929A patent/ZA200605929B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CA2548728A1 (en) | 2005-07-21 |
| KR100850587B1 (ko) | 2008-08-05 |
| WO2005066585A1 (de) | 2005-07-21 |
| NO338403B1 (no) | 2016-08-15 |
| CN1898528A (zh) | 2007-01-17 |
| AU2004312572B2 (en) | 2008-02-07 |
| DE10360962B4 (de) | 2007-05-31 |
| ATE361459T1 (de) | 2007-05-15 |
| JP4370331B2 (ja) | 2009-11-25 |
| CA2548728C (en) | 2009-10-06 |
| EP1706707B1 (de) | 2007-05-02 |
| US7481110B2 (en) | 2009-01-27 |
| ZA200605929B (en) | 2008-01-08 |
| RU2327109C2 (ru) | 2008-06-20 |
| PL1706707T3 (pl) | 2007-09-28 |
| DE10360962A1 (de) | 2005-07-28 |
| KR20060090284A (ko) | 2006-08-10 |
| JP2007513344A (ja) | 2007-05-24 |
| AU2004312572A1 (en) | 2005-07-21 |
| DE502004003734D1 (de) | 2007-06-14 |
| US20070144255A1 (en) | 2007-06-28 |
| RU2006113686A (ru) | 2008-01-27 |
| EP1706707A1 (de) | 2006-10-04 |
| CN100533062C (zh) | 2009-08-26 |
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