NO20074444L - Method and device for inspection of objects - Google Patents

Method and device for inspection of objects

Info

Publication number
NO20074444L
NO20074444L NO20074444A NO20074444A NO20074444L NO 20074444 L NO20074444 L NO 20074444L NO 20074444 A NO20074444 A NO 20074444A NO 20074444 A NO20074444 A NO 20074444A NO 20074444 L NO20074444 L NO 20074444L
Authority
NO
Norway
Prior art keywords
inspection
objects
Prior art date
Application number
NO20074444A
Other languages
Norwegian (no)
Other versions
NO328737B1 (en
Inventor
Arne Sommerfelt
Bernt Ribbum
Thor Vollset
Torleif Ringsaker
Original Assignee
Tordivel Solar As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tordivel Solar As filed Critical Tordivel Solar As
Priority to NO20074444A priority Critical patent/NO328737B1/en
Priority to KR1020107006556A priority patent/KR20100052546A/en
Priority to PCT/NO2008/000307 priority patent/WO2009028956A1/en
Priority to EP08828608A priority patent/EP2191230A1/en
Priority to CN200880111202A priority patent/CN101821581A/en
Publication of NO20074444L publication Critical patent/NO20074444L/en
Publication of NO328737B1 publication Critical patent/NO328737B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
NO20074444A 2007-08-31 2007-08-31 Method and apparatus for inspecting objects NO328737B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NO20074444A NO328737B1 (en) 2007-08-31 2007-08-31 Method and apparatus for inspecting objects
KR1020107006556A KR20100052546A (en) 2007-08-31 2008-09-01 Method and device for inspection of object surfaces
PCT/NO2008/000307 WO2009028956A1 (en) 2007-08-31 2008-09-01 Method and device for inspection of object surfaces
EP08828608A EP2191230A1 (en) 2007-08-31 2008-09-01 Method and device for inspection of object surfaces
CN200880111202A CN101821581A (en) 2007-08-31 2008-09-01 Method and device for inspection of object surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20074444A NO328737B1 (en) 2007-08-31 2007-08-31 Method and apparatus for inspecting objects

Publications (2)

Publication Number Publication Date
NO20074444L true NO20074444L (en) 2009-03-02
NO328737B1 NO328737B1 (en) 2010-05-03

Family

ID=40219505

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20074444A NO328737B1 (en) 2007-08-31 2007-08-31 Method and apparatus for inspecting objects

Country Status (5)

Country Link
EP (1) EP2191230A1 (en)
KR (1) KR20100052546A (en)
CN (1) CN101821581A (en)
NO (1) NO328737B1 (en)
WO (1) WO2009028956A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI467128B (en) 2009-07-03 2015-01-01 Koh Young Tech Inc Method for inspecting measurement object
KR101311255B1 (en) * 2012-08-20 2013-09-25 주식회사 고영테크놀러지 Inspection method of measuring object
CN103673934A (en) * 2013-12-31 2014-03-26 中国矿业大学 Method for detecting planeness of PCB based on network projection
US10636140B2 (en) * 2017-05-18 2020-04-28 Applied Materials Israel Ltd. Technique for inspecting semiconductor wafers
DE102017208485A1 (en) * 2017-05-19 2018-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Arrangement and method for non-contact distance determination in the manner of the light-section method
JP7265531B2 (en) * 2017-09-28 2023-04-26 ユニヴァーサル インストゥルメンツ コーポレイション Cross-reference of improved lead tip illumination devices, systems, and methods related art
CN108107051B (en) * 2017-12-19 2020-03-31 无锡先导智能装备股份有限公司 Lithium battery defect detection system and method based on machine vision
FI128443B (en) * 2018-12-21 2020-05-15 Valmet Automation Oy Contactless thickness measurement

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4980763A (en) 1989-06-12 1990-12-25 Welch Allyn, Inc. System for measuring objects viewed through a borescope
US6219063B1 (en) 1997-05-30 2001-04-17 California Institute Of Technology 3D rendering
US6246788B1 (en) * 1997-05-30 2001-06-12 Isoa, Inc. System and method of optically inspecting manufactured devices
JP2005221288A (en) 2004-02-04 2005-08-18 Chiaki Tanaka Measuring method of processed face property by projection method and its device
JP2006292617A (en) 2005-04-13 2006-10-26 Nec Electronics Corp Defect inspection device and method of inspecting surface of substrate

Also Published As

Publication number Publication date
EP2191230A1 (en) 2010-06-02
NO328737B1 (en) 2010-05-03
CN101821581A (en) 2010-09-01
KR20100052546A (en) 2010-05-19
WO2009028956A1 (en) 2009-03-05

Similar Documents

Publication Publication Date Title
IL259567A (en) Substrate Testing System and Method
FI20080182A0 (en) Measurement method and apparatus
EP2132523A4 (en) Method and device for exact measurement of objects
PT2352981E (en) Device for pipe inspection and method of using same
DE602007002032D1 (en) Measuring device and measuring method
BRPI0912934A2 (en) apparatus and method
BRPI0807225A2 (en) ENDIO-SURGICAL DEVICE AND METHOD
BRPI0818011A2 (en) Method and device for associating objects
BRPI0910713A2 (en) method and apparatus
BR112012011910A2 (en) device and method
DE112009005424T8 (en) Object detection device and object detection method
FI20096035A7 (en) MEASURING DEVICE AND METHOD FOR MEASURING OBJECT AND OBJECT SURFACE PROPERTIES
BRPI0816907A2 (en) Method and device
DE602008000065D1 (en) Substrate testing device and corresponding method
BRPI0921173A2 (en) method and device for distance measurement
EP2330587A4 (en) IMAGE PROCESSING DEVICE AND IMAGE PROCESSING METHOD
BRPI0912788A2 (en) device navigation and method
IT1396911B1 (en) METHOD AND DEVICE FOR VIBRATION ELIMINATION
BR112012015031A2 (en) apparatus and method
EP2390649A4 (en) SEALING TEST METHOD AND SEALING TEST DEVICE
EP4148353C0 (en) CRYOGEN-FREE COOLING DEVICE AND METHOD
BRPI0912722A2 (en) magnetic test method and magnetic test apparatus
BRPI0812226A2 (en) device and method for non-destructive testing of objects
BRPI1006174A2 (en) test method and test device
BRPI1006486A2 (en) device and method of locating partial discharges

Legal Events

Date Code Title Description
MM1K Lapsed by not paying the annual fees