NO941060L - Fremgangsmåte og anordning for å bestemme tykkelsen på halvledersjikt - Google Patents

Fremgangsmåte og anordning for å bestemme tykkelsen på halvledersjikt

Info

Publication number
NO941060L
NO941060L NO941060A NO941060A NO941060L NO 941060 L NO941060 L NO 941060L NO 941060 A NO941060 A NO 941060A NO 941060 A NO941060 A NO 941060A NO 941060 L NO941060 L NO 941060L
Authority
NO
Norway
Prior art keywords
thickness
layer
determining
length
semiconductor layer
Prior art date
Application number
NO941060A
Other languages
English (en)
Norwegian (no)
Other versions
NO941060D0 (no
Inventor
Anthony M Ledger
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO941060D0 publication Critical patent/NO941060D0/no
Publication of NO941060L publication Critical patent/NO941060L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
NO941060A 1993-03-25 1994-03-23 Fremgangsmåte og anordning for å bestemme tykkelsen på halvledersjikt NO941060L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/037,069 US5386119A (en) 1993-03-25 1993-03-25 Apparatus and method for thick wafer measurement

Publications (2)

Publication Number Publication Date
NO941060D0 NO941060D0 (no) 1994-03-23
NO941060L true NO941060L (no) 1994-09-26

Family

ID=21892268

Family Applications (1)

Application Number Title Priority Date Filing Date
NO941060A NO941060L (no) 1993-03-25 1994-03-23 Fremgangsmåte og anordning for å bestemme tykkelsen på halvledersjikt

Country Status (5)

Country Link
US (1) US5386119A (ja)
EP (1) EP0617255A1 (ja)
JP (1) JPH0771925A (ja)
IL (1) IL109030A0 (ja)
NO (1) NO941060L (ja)

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US6195168B1 (en) * 1999-07-22 2001-02-27 Zygo Corporation Infrared scanning interferometry apparatus and method
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US7510664B2 (en) 2001-01-30 2009-03-31 Rapt Industries, Inc. Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
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US7619746B2 (en) * 2007-07-19 2009-11-17 Zygo Corporation Generating model signals for interferometry
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JP5290322B2 (ja) * 2007-12-14 2013-09-18 ザイゴ コーポレーション 走査干渉法を使用した表面構造の解析
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
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US8912495B2 (en) * 2012-11-21 2014-12-16 Kla-Tencor Corp. Multi-spectral defect inspection for 3D wafers
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Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071780B2 (ja) * 1988-11-25 1995-01-11 信越半導体株式会社 エピタキシャルウエーハの遷移領域の評価方法
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates

Also Published As

Publication number Publication date
IL109030A0 (en) 1994-06-24
US5386119A (en) 1995-01-31
EP0617255A1 (en) 1994-09-28
NO941060D0 (no) 1994-03-23
JPH0771925A (ja) 1995-03-17

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