NO981323L - FremgangsmÕte for oppredning av rensevann anvendt ved halvlederfremstilling - Google Patents

FremgangsmÕte for oppredning av rensevann anvendt ved halvlederfremstilling

Info

Publication number
NO981323L
NO981323L NO981323A NO981323A NO981323L NO 981323 L NO981323 L NO 981323L NO 981323 A NO981323 A NO 981323A NO 981323 A NO981323 A NO 981323A NO 981323 L NO981323 L NO 981323L
Authority
NO
Norway
Prior art keywords
pct
sec
purification
purified water
semiconductor manufacturing
Prior art date
Application number
NO981323A
Other languages
English (en)
Other versions
NO314993B1 (no
NO981323D0 (no
Inventor
Philippe Rychen
Thomas Kleiber
Dominique Gensbittel
Original Assignee
Christ Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Christ Ag filed Critical Christ Ag
Publication of NO981323D0 publication Critical patent/NO981323D0/no
Publication of NO981323L publication Critical patent/NO981323L/no
Publication of NO314993B1 publication Critical patent/NO314993B1/no

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/28Treatment of water, waste water, or sewage by sorption
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/28Treatment of water, waste water, or sewage by sorption
    • C02F1/285Treatment of water, waste water, or sewage by sorption using synthetic organic sorbents

Landscapes

  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Water Treatment By Sorption (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Physical Water Treatments (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
NO19981323A 1996-01-04 1998-03-24 Fremgangsmåte for rensing av spylevann anvendt ved halvlederfremstilling NO314993B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1096 1996-01-04
PCT/CH1996/000442 WO1997025278A1 (de) 1996-01-04 1996-12-17 Verfahren zur aufbereitung von spülwasser aus der halbleiterfertigung

Publications (3)

Publication Number Publication Date
NO981323D0 NO981323D0 (no) 1998-03-24
NO981323L true NO981323L (no) 1998-03-24
NO314993B1 NO314993B1 (no) 2003-06-23

Family

ID=4177366

Family Applications (1)

Application Number Title Priority Date Filing Date
NO19981323A NO314993B1 (no) 1996-01-04 1998-03-24 Fremgangsmåte for rensing av spylevann anvendt ved halvlederfremstilling

Country Status (12)

Country Link
US (1) US6123851A (no)
EP (1) EP0876298B1 (no)
JP (1) JPH11506700A (no)
KR (1) KR100421519B1 (no)
CN (1) CN1120130C (no)
AT (1) ATE202327T1 (no)
CA (1) CA2231198C (no)
DE (1) DE59607144D1 (no)
MY (1) MY116594A (no)
NO (1) NO314993B1 (no)
TW (1) TW371295B (no)
WO (1) WO1997025278A1 (no)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5329013B2 (ja) * 2001-04-12 2013-10-30 旭硝子株式会社 強度の高いテトラフルオロエチレン重合体の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2366007A (en) * 1942-08-11 1944-12-26 Gen Electric Production of synthetic polymeric compositions comprising sulphonated polymerizates of poly-vinyl aryl compounds and treatment of liquid media therewith
US2500149A (en) * 1947-02-21 1950-03-14 Dow Chemical Co Sulfonation of copolymers of monovinyl-and polyvinyl-aromatic compounds
US4224415A (en) * 1958-07-18 1980-09-23 Rohm And Haas Company Polymerization processes and products therefrom
US4064043A (en) * 1975-02-18 1977-12-20 Rohm And Haas Company Liquid phase adsorption using partially pyrolyzed polymer particles
US4040990A (en) * 1975-02-18 1977-08-09 Rohm And Haas Company Partially pyrolyzed macroporous polymer particles having multimodal pore distribution with macropores ranging from 50-100,000 angstroms
JPS62197308A (ja) * 1986-01-31 1987-09-01 Japan Organo Co Ltd 合成樹脂の炭化方法
US4883596A (en) * 1987-03-31 1989-11-28 Tokyo Organic Chemical Industries, Ltd. Carbonaceous adsorbent for removal of pyrogen and method of producing pure water using same
US4839331A (en) * 1988-01-29 1989-06-13 Rohm And Haas Company Carbonaceous adsorbents from pyrolyzed polysulfonated polymers
US5460792A (en) * 1992-12-23 1995-10-24 Rohm And Haas Company Removal and destruction of halogenated organic and hydrocarbon compounds with porous carbonaceous materials
AU6054694A (en) * 1993-05-03 1994-11-10 Rohm And Haas Company Sequestration of hydrophobic organic materials in sediment

Also Published As

Publication number Publication date
JPH11506700A (ja) 1999-06-15
NO314993B1 (no) 2003-06-23
DE59607144D1 (de) 2001-07-26
KR100421519B1 (ko) 2004-04-17
CN1200712A (zh) 1998-12-02
CA2231198A1 (en) 1997-07-17
EP0876298B1 (de) 2001-06-20
MY116594A (en) 2004-02-28
NO981323D0 (no) 1998-03-24
US6123851A (en) 2000-09-26
CA2231198C (en) 2002-11-12
CN1120130C (zh) 2003-09-03
ATE202327T1 (de) 2001-07-15
EP0876298A1 (de) 1998-11-11
WO1997025278A1 (de) 1997-07-17
TW371295B (en) 1999-10-01
KR19990063887A (ko) 1999-07-26

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