PH18364A - Low temerature process for depositing oxide layers by photochemical vapor deposition - Google Patents

Low temerature process for depositing oxide layers by photochemical vapor deposition

Info

Publication number
PH18364A
PH18364A PH25763A PH25763A PH18364A PH 18364 A PH18364 A PH 18364A PH 25763 A PH25763 A PH 25763A PH 25763 A PH25763 A PH 25763A PH 18364 A PH18364 A PH 18364A
Authority
PH
Philippines
Prior art keywords
vapor deposition
oxide layers
photochemical vapor
depositing oxide
temerature
Prior art date
Application number
PH25763A
Inventor
John W Peters
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Priority to PH25763A priority Critical patent/PH18364A/en
Publication of PH18364A publication Critical patent/PH18364A/en

Links

PH25763A 1981-07-13 1981-07-13 Low temerature process for depositing oxide layers by photochemical vapor deposition PH18364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PH25763A PH18364A (en) 1981-07-13 1981-07-13 Low temerature process for depositing oxide layers by photochemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PH25763A PH18364A (en) 1981-07-13 1981-07-13 Low temerature process for depositing oxide layers by photochemical vapor deposition

Publications (1)

Publication Number Publication Date
PH18364A true PH18364A (en) 1985-06-13

Family

ID=19934766

Family Applications (1)

Application Number Title Priority Date Filing Date
PH25763A PH18364A (en) 1981-07-13 1981-07-13 Low temerature process for depositing oxide layers by photochemical vapor deposition

Country Status (1)

Country Link
PH (1) PH18364A (en)

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