PL1890887T3 - Sposób i urządzenie do nanoszenia wzoru z pieczęci na podłoże - Google Patents
Sposób i urządzenie do nanoszenia wzoru z pieczęci na podłożeInfo
- Publication number
- PL1890887T3 PL1890887T3 PL06728092T PL06728092T PL1890887T3 PL 1890887 T3 PL1890887 T3 PL 1890887T3 PL 06728092 T PL06728092 T PL 06728092T PL 06728092 T PL06728092 T PL 06728092T PL 1890887 T3 PL1890887 T3 PL 1890887T3
- Authority
- PL
- Poland
- Prior art keywords
- seal
- pattern
- applying
- substrate
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
- B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
- B41K3/02—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located above article-supporting surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
- B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
- B41K3/02—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located above article-supporting surface
- B41K3/12—Apparatus for stamping articles having integral means for supporting the articles to be stamped with stamping surface located above article-supporting surface with curved stamping surface for stamping by rolling contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41K—STAMPS; STAMPING OR NUMBERING APPARATUS OR DEVICES
- B41K3/00—Apparatus for stamping articles having integral means for supporting the articles to be stamped
- B41K3/36—Apparatus for stamping articles having integral means for supporting the articles to be stamped with means for deforming or punching the copy matter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Printing Methods (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05103706 | 2005-05-03 | ||
| EP06728092.5A EP1890887B1 (en) | 2005-05-03 | 2006-05-01 | Method and device for transferring a pattern from a stamp to a substrate |
| PCT/IB2006/051352 WO2006117745A2 (en) | 2005-05-03 | 2006-05-01 | Method and device for transferring a pattern from a stamp to a substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL1890887T3 true PL1890887T3 (pl) | 2016-04-29 |
Family
ID=37308378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL06728092T PL1890887T3 (pl) | 2005-05-03 | 2006-05-01 | Sposób i urządzenie do nanoszenia wzoru z pieczęci na podłoże |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8166876B2 (pl) |
| EP (1) | EP1890887B1 (pl) |
| JP (1) | JP5180820B2 (pl) |
| KR (1) | KR101256383B1 (pl) |
| CN (1) | CN100559271C (pl) |
| PL (1) | PL1890887T3 (pl) |
| TW (1) | TWI377132B (pl) |
| WO (1) | WO2006117745A2 (pl) |
Families Citing this family (60)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4853129B2 (ja) * | 2006-06-23 | 2012-01-11 | 大日本印刷株式会社 | ナノインプリント用転写装置 |
| WO2008068701A2 (en) | 2006-12-04 | 2008-06-12 | Koninklijke Philips Electronics N.V. | Method and apparatus for applying a sheet to a substrate |
| CN101583436B (zh) | 2007-01-16 | 2014-05-07 | 皇家飞利浦电子股份有限公司 | 用于挠性板件和基板接触的方法和系统 |
| US7678423B2 (en) | 2007-02-27 | 2010-03-16 | The Regents Of The University Of Michigan | System and method for depositing thin layers on non-planar substrates by stamping |
| JP5041214B2 (ja) | 2007-06-15 | 2012-10-03 | ソニー株式会社 | 金属薄膜の形成方法および電子デバイスの製造方法 |
| WO2008154907A2 (de) * | 2007-06-21 | 2008-12-24 | GeSIM Gesellschaft für Silizium-Mikrosysteme mbH | Verfahren und vorrichtung zur übertragung von mikro- oder nanostrukturen durch kontaktstempeln |
| US20090025595A1 (en) * | 2007-07-25 | 2009-01-29 | Nano Terra Inc. | Contact Printing Method Using an Elastomeric Stamp Having a Variable Surface Area and Variable Shape |
| US9267109B2 (en) | 2007-12-10 | 2016-02-23 | Koninklijke Philips N.V. | Patterned cell sheets and a method for production of the same |
| KR101026040B1 (ko) * | 2008-11-13 | 2011-03-30 | 삼성전기주식회사 | 박막소자 제조방법 |
| KR101046064B1 (ko) * | 2008-12-11 | 2011-07-01 | 삼성전기주식회사 | 박막소자 제조방법 |
| GB2468120B (en) * | 2009-02-20 | 2013-02-20 | Api Group Plc | Machine head for production of a surface relief |
| KR101042607B1 (ko) * | 2009-03-20 | 2011-06-21 | 박종칠 | 상부 몰드의 연속 공급구조를 갖는 스탬핑 장치 |
| JP5411557B2 (ja) * | 2009-04-03 | 2014-02-12 | 株式会社日立ハイテクノロジーズ | 微細構造転写装置 |
| JP5843784B2 (ja) * | 2009-12-22 | 2016-01-13 | スリーエム イノベイティブ プロパティズ カンパニー | 加圧ローラーを使用するマイクロコンタクトプリンティングのための装置及び方法 |
| US9161448B2 (en) | 2010-03-29 | 2015-10-13 | Semprius, Inc. | Laser assisted transfer welding process |
| US20110272838A1 (en) * | 2010-05-06 | 2011-11-10 | Matt Malloy | Apparatus, System, and Method for Nanoimprint Template with a Backside Recess Having Tapered Sidewalls |
| KR101323235B1 (ko) | 2010-06-07 | 2013-10-30 | 엘지디스플레이 주식회사 | 임프린팅 장치 및 이를 이용한 임프린팅 방법 |
| CN102336076B (zh) * | 2010-07-20 | 2013-05-22 | 深圳市沃尔核材股份有限公司 | 一种模印装置及模印管 |
| JP5240287B2 (ja) * | 2010-12-16 | 2013-07-17 | 大日本印刷株式会社 | ナノインプリント用モールド搬送装置および転写方法 |
| CN102096315B (zh) * | 2010-12-22 | 2012-04-04 | 青岛理工大学 | 整片晶圆纳米压印的装置和方法 |
| JP2012143915A (ja) * | 2011-01-10 | 2012-08-02 | Scivax Kk | インプリント用型 |
| TWI520852B (zh) * | 2011-04-01 | 2016-02-11 | Lg化學股份有限公司 | 印刷設備及印刷方法 |
| BR112013033481A2 (pt) * | 2011-06-30 | 2019-09-24 | 3M Innovative Properties Co | aparelho e método para impressão por microcontato em mantas de comprimento indefinido |
| JP6004738B2 (ja) * | 2011-09-07 | 2016-10-12 | キヤノン株式会社 | インプリント装置、それを用いた物品の製造方法 |
| JP5893303B2 (ja) | 2011-09-07 | 2016-03-23 | キヤノン株式会社 | インプリント装置、それを用いた物品の製造方法 |
| US9412727B2 (en) | 2011-09-20 | 2016-08-09 | Semprius, Inc. | Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion |
| DE102011054789A1 (de) * | 2011-10-25 | 2013-04-25 | Universität Kassel | Nano-Formgebungsstruktur |
| US9149958B2 (en) | 2011-11-14 | 2015-10-06 | Massachusetts Institute Of Technology | Stamp for microcontact printing |
| JP5759348B2 (ja) * | 2011-11-30 | 2015-08-05 | 株式会社Screenホールディングス | パターン形成装置およびパターン形成方法 |
| TW201334948A (zh) * | 2012-02-21 | 2013-09-01 | Coretronic Corp | 壓印設備及壓印方法 |
| CN102616031B (zh) * | 2012-03-29 | 2014-01-29 | 浙江大学 | 一种磁力控制的墨水渗透式微接触印刷装置 |
| CN103373094A (zh) * | 2012-04-11 | 2013-10-30 | 得利环球有限公司 | 微接触印刷设备及方法 |
| US9315015B2 (en) | 2012-07-10 | 2016-04-19 | Lg Chem, Ltd. | Printed material fixing piece, printing device, and printing method |
| CN110874012A (zh) * | 2012-09-06 | 2020-03-10 | Ev 集团 E·索尔纳有限责任公司 | 用于压印的结构印模、装置以及方法 |
| JP6207997B2 (ja) * | 2013-01-30 | 2017-10-04 | 株式会社Screenホールディングス | パターン形成装置およびパターン形成方法 |
| WO2014145826A2 (en) * | 2013-03-15 | 2014-09-18 | Nanonex Corporation | System and methods of mold/substrate separation for imprint lithography |
| WO2015037601A1 (ja) * | 2013-09-12 | 2015-03-19 | 旭硝子株式会社 | モールドの凹凸パターンを転写した物品、物品の製造方法、および光学パネルの製造方法 |
| JP6363838B2 (ja) * | 2014-01-08 | 2018-07-25 | キヤノン株式会社 | インプリント装置、インプリント方法及び物品の製造方法 |
| CN112445066A (zh) | 2014-04-22 | 2021-03-05 | Ev 集团 E·索尔纳有限责任公司 | 用于压印纳米结构的方法和装置 |
| TWI659475B (zh) * | 2014-07-20 | 2019-05-11 | 愛爾蘭商艾克斯瑟樂普林特有限公司 | 用於微轉貼印刷之裝置及方法 |
| RU2701780C2 (ru) * | 2014-09-22 | 2019-10-01 | Конинклейке Филипс Н.В. | Способ переноса, а также устройство и компьютерный программный продукт для его осуществления |
| US9704821B2 (en) | 2015-08-11 | 2017-07-11 | X-Celeprint Limited | Stamp with structured posts |
| US10468363B2 (en) | 2015-08-10 | 2019-11-05 | X-Celeprint Limited | Chiplets with connection posts |
| CN105159029A (zh) * | 2015-10-10 | 2015-12-16 | 兰红波 | 大面积微纳图形化的装置和方法 |
| US10103069B2 (en) | 2016-04-01 | 2018-10-16 | X-Celeprint Limited | Pressure-activated electrical interconnection by micro-transfer printing |
| JP6220918B2 (ja) * | 2016-04-22 | 2017-10-25 | 株式会社写真化学 | 電子デバイス用の転写装置および電子デバイス用の転写方法 |
| US10222698B2 (en) | 2016-07-28 | 2019-03-05 | X-Celeprint Limited | Chiplets with wicking posts |
| US11064609B2 (en) | 2016-08-04 | 2021-07-13 | X Display Company Technology Limited | Printable 3D electronic structure |
| CN107776222A (zh) * | 2016-08-25 | 2018-03-09 | 苏州光越微纳科技有限公司 | 大面积平板吸附压印模具及压印方法 |
| KR102100669B1 (ko) * | 2016-09-27 | 2020-05-27 | (주)엘지하우시스 | 차량용 내장재의 제조방법 및 차량용 내장재 |
| JP2017130678A (ja) * | 2017-03-09 | 2017-07-27 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 型押し加工のための構造体スタンプ、装置および方法 |
| CN107215111B (zh) * | 2017-06-14 | 2023-03-28 | 浙江大学 | 一种磁控转印印章及磁控转移印刷方法 |
| CN109696799B (zh) * | 2017-10-20 | 2023-11-28 | 长春工业大学 | 一种辊型紫外纳米压印装置 |
| WO2020099265A1 (en) | 2018-11-14 | 2020-05-22 | Koninklijke Philips N.V. | Pneumatic system, imprint apparatus and use thereof |
| US10748793B1 (en) | 2019-02-13 | 2020-08-18 | X Display Company Technology Limited | Printing component arrays with different orientations |
| KR102156263B1 (ko) * | 2019-02-27 | 2020-09-16 | 서울대학교산학협력단 | 전사장치 |
| CN110466267B (zh) * | 2019-09-18 | 2024-05-03 | 成都凌云汽车零部件有限公司 | 一种玻璃滑槽的标识辊压系统 |
| US11062936B1 (en) | 2019-12-19 | 2021-07-13 | X Display Company Technology Limited | Transfer stamps with multiple separate pedestals |
| CN114261196B (zh) * | 2021-11-25 | 2023-06-16 | 重庆康佳光电技术研究院有限公司 | 印刷治具和连线印刷方法 |
| CN116461238B (zh) * | 2023-02-28 | 2024-12-13 | 中铁建设集团有限公司 | 室内装修用铝板雕花转印控制系统及其方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5900160A (en) * | 1993-10-04 | 1999-05-04 | President And Fellows Of Harvard College | Methods of etching articles via microcontact printing |
| JPH08294966A (ja) * | 1995-04-26 | 1996-11-12 | Nippon Shokubai Co Ltd | 樹脂成形品の連続成形方法 |
| WO1997006013A1 (en) * | 1995-08-04 | 1997-02-20 | International Business Machines Corporation | Lithographic surface or thin layer modification |
| US5725788A (en) | 1996-03-04 | 1998-03-10 | Motorola | Apparatus and method for patterning a surface |
| US5669303A (en) * | 1996-03-04 | 1997-09-23 | Motorola | Apparatus and method for stamping a surface |
| US5947027A (en) | 1998-09-08 | 1999-09-07 | Motorola, Inc. | Printing apparatus with inflatable means for advancing a substrate towards the stamping surface |
| US7338613B2 (en) | 2001-09-10 | 2008-03-04 | Surface Logix, Inc. | System and process for automated microcontact printing |
| US6840167B2 (en) * | 2002-01-24 | 2005-01-11 | Lloyd Douglas Clark | Multi-color pad printing apparatus and method |
| WO2003099463A2 (en) | 2002-05-27 | 2003-12-04 | Koninklijke Philips Electronics N.V. | Method and device for transferring a pattern from a stamp to a substrate |
| US7019819B2 (en) * | 2002-11-13 | 2006-03-28 | Molecular Imprints, Inc. | Chucking system for modulating shapes of substrates |
| US20040197712A1 (en) | 2002-12-02 | 2004-10-07 | Jacobson Joseph M. | System for contact printing |
| JP4155511B2 (ja) * | 2003-05-09 | 2008-09-24 | Tdk株式会社 | インプリント装置およびインプリント方法 |
| JP4478424B2 (ja) * | 2003-09-29 | 2010-06-09 | キヤノン株式会社 | 微細加工装置およびデバイスの製造方法 |
| US7037458B2 (en) * | 2003-10-23 | 2006-05-02 | Intel Corporation | Progressive stamping apparatus and method |
| US6981445B2 (en) * | 2003-12-24 | 2006-01-03 | Axela Biosensors Inc. | Method and apparatus for micro-contact printing |
| US7382449B2 (en) * | 2004-12-21 | 2008-06-03 | Alces Technology | Alignment tool for precise pattern transfer |
| JP4596981B2 (ja) * | 2005-05-24 | 2010-12-15 | 株式会社日立ハイテクノロジーズ | インプリント装置、及び微細構造転写方法 |
-
2006
- 2006-05-01 JP JP2008509561A patent/JP5180820B2/ja not_active Expired - Lifetime
- 2006-05-01 US US11/913,320 patent/US8166876B2/en active Active
- 2006-05-01 KR KR1020077025230A patent/KR101256383B1/ko not_active Expired - Lifetime
- 2006-05-01 PL PL06728092T patent/PL1890887T3/pl unknown
- 2006-05-01 EP EP06728092.5A patent/EP1890887B1/en not_active Expired - Lifetime
- 2006-05-01 CN CNB2006800151749A patent/CN100559271C/zh not_active Expired - Lifetime
- 2006-05-01 WO PCT/IB2006/051352 patent/WO2006117745A2/en not_active Ceased
- 2006-05-02 TW TW095115579A patent/TWI377132B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006117745A3 (en) | 2007-10-11 |
| US8166876B2 (en) | 2012-05-01 |
| TW200709937A (en) | 2007-03-16 |
| KR101256383B1 (ko) | 2013-04-25 |
| WO2006117745A2 (en) | 2006-11-09 |
| JP2008540164A (ja) | 2008-11-20 |
| JP5180820B2 (ja) | 2013-04-10 |
| CN100559271C (zh) | 2009-11-11 |
| TWI377132B (en) | 2012-11-21 |
| KR20080005391A (ko) | 2008-01-11 |
| EP1890887B1 (en) | 2015-10-28 |
| EP1890887A2 (en) | 2008-02-27 |
| US20080202365A1 (en) | 2008-08-28 |
| CN101171142A (zh) | 2008-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| PL1890887T3 (pl) | Sposób i urządzenie do nanoszenia wzoru z pieczęci na podłoże | |
| EP1874484A4 (en) | DEVICE FOR APPLYING FLUIDS ON THE CONTOUR OF A SUBSTRATE | |
| DE602007014309D1 (de) | Reinigungsroboter mit Vorrichtung zum Reinigen von Ecken | |
| EP1895055A4 (en) | MODULAR TOOTHING EXPANSION JOINT FOR BRIDGES RESISTANT TO SIGNIFICANT DISLOCATION | |
| DE502006005293D1 (de) | Vorrichtung zum Bemustern von Werkstücken | |
| DE502007005719D1 (de) | Vorrichtung zum Ablegen von Bandmaterial | |
| DE602006007816D1 (de) | Vorrichtung zum depalletieren | |
| ATE428818T1 (de) | Verfahren zum bleichen von substraten | |
| EG25336A (en) | Method for applying an electronic assembly to a substrate and a device for applying said assembly. | |
| DE602006016008D1 (de) | Prozess zum herstellen eines photovoltaischen dünnfilmbauelements | |
| DE602006016975D1 (de) | Vorrichtung zum ausstossen von flüssigem material | |
| ATE471997T1 (de) | Vorrichtung und verfahren zum beschichten eines substrats | |
| DK1789945T3 (da) | A method for testing electronic devices | |
| DE502005005634D1 (de) | Beschichtungsanlage und Verfahren zum Betrieb einer Beschichtungsanlage | |
| PL1801269T3 (pl) | Sposób wytwarzania wolno stojącej warstwy III-N i wolno stojące podłoże III-N | |
| FI20050160A0 (fi) | Menetelmä kuparipitoisten materiaalien käsittelemiseksi | |
| DE502006007121D1 (de) | Vorrichtung zum Positionieren von Röhrenknochen | |
| DE602005013307D1 (de) | Vorrichtung zum Umdrehen von sich bewegenden Flaschen | |
| FI20055666L (fi) | Prosessi hiilivetykomponentin valmistamiseksi | |
| DE202004014885U1 (de) | Vorrichtung zum Auftragen von Fluiden auf ein Substrat | |
| EP1887364A4 (en) | BIOCHIPSUBSTRATE AND BIOCHIP | |
| FI20065170L (fi) | Menetelmä ja sovitelma sillan siirtämiseksi | |
| DE112006002428A5 (de) | Flip-Chip-Modul und Verfahren zum Erzeugen eines Flip-Chip-Moduls | |
| DE502006006316D1 (de) | Fügevorrichtung zum umformtechnischen Fügen | |
| FI20070953A7 (fi) | Menetelmä ja laite pinnan strukturoimiseksi |