PL1935599T3 - Device and method for the separation and the transport of substrates - Google Patents

Device and method for the separation and the transport of substrates

Info

Publication number
PL1935599T3
PL1935599T3 PL06026054T PL06026054T PL1935599T3 PL 1935599 T3 PL1935599 T3 PL 1935599T3 PL 06026054 T PL06026054 T PL 06026054T PL 06026054 T PL06026054 T PL 06026054T PL 1935599 T3 PL1935599 T3 PL 1935599T3
Authority
PL
Poland
Prior art keywords
substrate
substrates
support device
separating
fluid
Prior art date
Application number
PL06026054T
Other languages
Polish (pl)
Inventor
Richard Herter
Konrad Kaltenbach
Original Assignee
Rena Sondermaschinen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena Sondermaschinen Gmbh filed Critical Rena Sondermaschinen Gmbh
Publication of PL1935599T3 publication Critical patent/PL1935599T3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)

Abstract

The device has a support device (104) arranged within a fluid, where an individual substrate (102) is arranged in transverse direction (105) sequentially staying behind one another in form of a stack of the substrate. A removing device (107) is for separating and transporting of the substrate. The removing device has a gripper (108) with units, where the substrate is held and is drive away from the support device. A flow device (117) for fan out of a part of a stack substrate (103), and a contact pressure element (122) that counteracts the fan out substrates. An independent claim is also included for a method for fanning out, separating and transporting disk-shaped formed substrates, which involves arranging a support device within a fluid.
PL06026054T 2006-12-15 2006-12-15 Device and method for the separation and the transport of substrates PL1935599T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06026054A EP1935599B1 (en) 2006-12-15 2006-12-15 Device and method for the separation and the transport of substrates

Publications (1)

Publication Number Publication Date
PL1935599T3 true PL1935599T3 (en) 2009-01-30

Family

ID=37946339

Family Applications (1)

Application Number Title Priority Date Filing Date
PL06026054T PL1935599T3 (en) 2006-12-15 2006-12-15 Device and method for the separation and the transport of substrates

Country Status (6)

Country Link
EP (1) EP1935599B1 (en)
AT (1) ATE404341T1 (en)
DE (1) DE502006001352D1 (en)
ES (1) ES2313535T3 (en)
PL (1) PL1935599T3 (en)
TW (1) TW200842014A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080146003A1 (en) * 2006-12-19 2008-06-19 Rec Scanwafer As Method and device for separating silicon wafers
WO2011063988A1 (en) * 2009-11-30 2011-06-03 Amb Apparate + Maschinenbau Gmbh Separation device
DE102012221452A1 (en) 2012-07-20 2014-01-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for separating wafers
CN115626488B (en) * 2022-09-08 2024-11-29 安徽兰迪节能玻璃有限公司 A vacuum glass production line taking device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
DE19900671C2 (en) * 1999-01-11 2002-04-25 Fraunhofer Ges Forschung Method and device for separating disk-shaped substrates, in particular for wafer production
DE19904834A1 (en) * 1999-02-07 2000-08-10 Acr Automation In Cleanroom Mechanism for detaching, separating, and storing thin, fragile disc-shaped substrates for solar cells etc. manufacture
DE19950068B4 (en) * 1999-10-16 2006-03-02 Schmid Technology Systems Gmbh Method and device for separating and detaching substrate disks
DE102005045583A1 (en) * 2005-05-20 2006-11-23 Brain, Bernhard Method for separating stacked, disk-shaped elements and separating device

Also Published As

Publication number Publication date
EP1935599B1 (en) 2008-08-13
ES2313535T3 (en) 2009-03-01
EP1935599A1 (en) 2008-06-25
ATE404341T1 (en) 2008-08-15
TW200842014A (en) 2008-11-01
DE502006001352D1 (en) 2008-09-25

Similar Documents

Publication Publication Date Title
MY142778A (en) Device and method for the separation and the transport of substrates
US20080008565A1 (en) Handling device and handling method for wafers
CN101971320B (en) Conveyor belt system and method with at least one conveyor belt for conveying flat conveying goods
IL192071A0 (en) Device and method for the surface treatment of substrates
ATE468185T1 (en) SEPARATION DEVICE
JP6665021B2 (en) Film peeling device
TW200608455A (en) Semiconductor film manufacturing method and substrate manufacturing method
US9653337B2 (en) Transport arm, transport apparatus and transport method
TW200802554A (en) A method of manufacturing a semiconductor device and device of processing substrate
MY138343A (en) Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
EP2020392A3 (en) Apparatus for manufacturing thin-film laminated member
FR2823012B1 (en) METHOD FOR SELECTIVELY TRANSFERRING AT LEAST ONE ELEMENT OF AN INITIAL MEDIUM ON A FINAL MEDIUM
CN105252881B (en) Peeling device and peeling method of laminated body, and manufacturing method of electronic device
CN108472932B (en) Method and apparatus for bonding a highly flexible substrate to a carrier or debonding it from a carrier substrate
KR20170001962U (en) Suction roller coating adhesive device
PL1935599T3 (en) Device and method for the separation and the transport of substrates
JP2011071331A5 (en) Method of manufacturing laminated substrate and substrate bonding apparatus
WO2007019487A3 (en) Method and system for fabricating thin devices
CN113998372A (en) Conveying device
JP2007131942A5 (en) Substrate unloading apparatus and substrate unloading method
WO2009078121A1 (en) Semiconductor substrate supporting jig and method for manufacturing the same
JP2008226976A (en) Device and method for treating substrate or the like
JP2013206503A (en) Laminating method for substrate and substrate laminating tool
JP5405267B2 (en) Electronic component conveyor
WO2008102616A1 (en) Cleaning sheet, conveying member having cleaning function, and method for cleaning of substrate-processing apparatus