PL202926A1 - Sposob prowadzenia procesu epitaksji krzemu - Google Patents

Sposob prowadzenia procesu epitaksji krzemu

Info

Publication number
PL202926A1
PL202926A1 PL20292677A PL20292677A PL202926A1 PL 202926 A1 PL202926 A1 PL 202926A1 PL 20292677 A PL20292677 A PL 20292677A PL 20292677 A PL20292677 A PL 20292677A PL 202926 A1 PL202926 A1 PL 202926A1
Authority
PL
Poland
Prior art keywords
epitaxation
silicon
manner
silicon epitaxation
epitaxation process
Prior art date
Application number
PL20292677A
Other languages
English (en)
Other versions
PL120490B3 (en
Inventor
Jerzy Borkowicz
Jacek Korec
Elzbieta Nossarzewska-Orlowska
Original Assignee
Osrodek Naukowo Prod Materialo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osrodek Naukowo Prod Materialo filed Critical Osrodek Naukowo Prod Materialo
Priority to PL20292677A priority Critical patent/PL120490B3/pl
Publication of PL202926A1 publication Critical patent/PL202926A1/pl
Publication of PL120490B3 publication Critical patent/PL120490B3/pl

Links

PL20292677A 1977-12-14 1977-12-14 Method of operation of the process of epitaxy of silicon from gaseous phase,especially on silicon substrate gazy,osobenno na kremnievojj podlozhke PL120490B3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL20292677A PL120490B3 (en) 1977-12-14 1977-12-14 Method of operation of the process of epitaxy of silicon from gaseous phase,especially on silicon substrate gazy,osobenno na kremnievojj podlozhke

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL20292677A PL120490B3 (en) 1977-12-14 1977-12-14 Method of operation of the process of epitaxy of silicon from gaseous phase,especially on silicon substrate gazy,osobenno na kremnievojj podlozhke

Publications (2)

Publication Number Publication Date
PL202926A1 true PL202926A1 (pl) 1979-07-16
PL120490B3 PL120490B3 (en) 1982-03-31

Family

ID=19986172

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20292677A PL120490B3 (en) 1977-12-14 1977-12-14 Method of operation of the process of epitaxy of silicon from gaseous phase,especially on silicon substrate gazy,osobenno na kremnievojj podlozhke

Country Status (1)

Country Link
PL (1) PL120490B3 (pl)

Also Published As

Publication number Publication date
PL120490B3 (en) 1982-03-31

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