PL2266129T3 - Sposób wytwarzania gazowego powielacza elektronowego - Google Patents
Sposób wytwarzania gazowego powielacza elektronowegoInfo
- Publication number
- PL2266129T3 PL2266129T3 PL08735223T PL08735223T PL2266129T3 PL 2266129 T3 PL2266129 T3 PL 2266129T3 PL 08735223 T PL08735223 T PL 08735223T PL 08735223 T PL08735223 T PL 08735223T PL 2266129 T3 PL2266129 T3 PL 2266129T3
- Authority
- PL
- Poland
- Prior art keywords
- manufacturing
- electron multiplier
- gas electron
- gas
- multiplier
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
- H01J47/02—Ionisation chambers
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08735223.3A EP2266129B1 (en) | 2008-04-14 | 2008-04-14 | A method of manufacturing a gas electron multiplier |
| PCT/EP2008/002944 WO2009127220A1 (en) | 2008-04-14 | 2008-04-14 | A method of manufacturing a gas electron multiplier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL2266129T3 true PL2266129T3 (pl) | 2018-06-29 |
Family
ID=40044179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL08735223T PL2266129T3 (pl) | 2008-04-14 | 2008-04-14 | Sposób wytwarzania gazowego powielacza elektronowego |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8597490B2 (pl) |
| EP (1) | EP2266129B1 (pl) |
| JP (1) | JP5335893B2 (pl) |
| KR (1) | KR101368554B1 (pl) |
| CN (1) | CN102007566B (pl) |
| PL (1) | PL2266129T3 (pl) |
| WO (1) | WO2009127220A1 (pl) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2317538B1 (en) | 2009-10-28 | 2017-03-22 | CERN - European Organization For Nuclear Research | Method for fabricating an amplification gap of an avalanche particle detector |
| JP5855577B2 (ja) * | 2010-12-01 | 2016-02-09 | Hoya株式会社 | 電子増幅器用基板の製造方法、電子増幅器の製造方法及び放射線検出器の製造方法 |
| WO2012073758A1 (ja) * | 2010-12-01 | 2012-06-07 | Hoya株式会社 | 電子増幅器用基板の製造方法、電子増幅器の製造方法及び放射線検出器の製造方法 |
| DE102011051472A1 (de) | 2011-06-30 | 2013-01-03 | Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh | Elektronenvervielfältigende Detektorfolie |
| US8798234B2 (en) | 2012-03-30 | 2014-08-05 | Elekta Ab (Publ) | Imaging during radiotherapy |
| CN102764920B (zh) * | 2012-07-06 | 2014-04-02 | 河南理工大学 | 一种双面外扩形金属微小孔阵列加工方法 |
| KR101395102B1 (ko) | 2013-02-14 | 2014-05-16 | 한국과학기술원 | Pcb 기판을 이용한 실리콘 광전자증배관의 패키징 방법 |
| JP5973513B2 (ja) * | 2014-09-17 | 2016-08-23 | 株式会社フジクラ | イオンフィルターの製造方法 |
| JP6027583B2 (ja) | 2014-09-17 | 2016-11-16 | 株式会社フジクラ | イオンフィルター及びその製造方法 |
| US9880291B2 (en) | 2015-03-02 | 2018-01-30 | Beamocular Ab | Ionizing radiation detecting device |
| JP6504982B2 (ja) * | 2015-09-25 | 2019-04-24 | 株式会社フジクラ | イオンフィルター及びその製造方法 |
| US10453661B2 (en) | 2015-12-02 | 2019-10-22 | Fujikura Ltd. | Ion filter and method of manufacturing ion filter |
| DE102018105026A1 (de) | 2018-03-05 | 2019-09-05 | Proxivision Gmbh | Detektor sowie Verfahren zum Nachweis von Neutronen |
| CN109166784B (zh) * | 2018-07-25 | 2020-01-31 | 中国科学技术大学 | 用于gem探测器放大单元的阻性基材、制备方法及支架 |
| CN109148253B (zh) * | 2018-08-21 | 2020-01-03 | 中国科学技术大学 | 制备阻性气体电子倍增器薄膜的方法和阻性气体电子倍增器薄膜 |
| CN109273343B (zh) * | 2018-08-31 | 2019-10-25 | 中国科学技术大学 | 阻性厚型气体电子倍增器、探测器及制备方法 |
| CN110349761B (zh) * | 2019-07-05 | 2021-04-06 | 中国科学院微电子研究所 | 一种具有通孔阵列的平板电容结构制造方法及电子设备 |
| CN110299252A (zh) * | 2019-07-05 | 2019-10-01 | 中国科学院微电子研究所 | 一种具有通孔的平板电容结构、制造方法及电子设备 |
| CN111916331B (zh) * | 2020-09-04 | 2023-04-07 | 北京航天新立科技有限公司 | 一种小尺寸gem膜板的工业化制作方法 |
| CN112410867B (zh) * | 2020-11-05 | 2023-10-20 | 中国航发北京航空材料研究院 | 一种高温合金密排孔柱阵列结构的加工方法 |
| CN116536745B (zh) * | 2022-05-20 | 2025-02-07 | 武汉铢寸科技有限公司 | 在膜中制造纳米孔的方法、装置及叠加电场的生成装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1401969A (en) | 1971-11-17 | 1975-08-06 | Mullard Ltd | Electron multipliers |
| US5455459A (en) * | 1992-03-27 | 1995-10-03 | Martin Marietta Corporation | Reconstructable interconnect structure for electronic circuits |
| US6197209B1 (en) * | 1995-10-27 | 2001-03-06 | Lg. Philips Lcd Co., Ltd. | Method of fabricating a substrate |
| WO1999021211A1 (en) * | 1997-10-22 | 1999-04-29 | European Organization For Nuclear Research | Radiation detector of very high performance and planispherical parallax-free x-ray imager comprising such a radiation detector |
| EP0936660A1 (en) * | 1998-02-10 | 1999-08-18 | Interuniversitair Microelektronica Centrum Vzw | An imager or particle or radiation detector and method of manufacturing the same |
| JP3785501B2 (ja) * | 2001-11-15 | 2006-06-14 | 財団法人新産業創造研究機構 | ガス増幅型x線イメージング検出器及びガス増幅型x線イメージング検出方法 |
| US7022216B2 (en) | 2002-06-12 | 2006-04-04 | Faraday Technology Marketing Group, Llc | Electrolytic etching of metal layers |
| EP1531656A3 (en) * | 2003-11-11 | 2007-10-03 | Furukawa Circuit Foil Co., Ltd. | Ultra-thin copper foil with carrier and printed wiring board using ultra-thin copper foil with carrier |
| US7626829B2 (en) * | 2004-10-27 | 2009-12-01 | Ibiden Co., Ltd. | Multilayer printed wiring board and manufacturing method of the multilayer printed wiring board |
| JP2006302844A (ja) * | 2005-04-25 | 2006-11-02 | Univ Of Tokyo | ガス電子増幅器、その製造方法及びガス電子増幅器を使用した放射線検出器 |
| JP5022611B2 (ja) * | 2006-03-02 | 2012-09-12 | 独立行政法人理化学研究所 | ガス電子増幅フォイルの製造方法 |
| JP4280833B2 (ja) * | 2006-08-09 | 2009-06-17 | 大学共同利用機関法人 高エネルギー加速器研究機構 | ガス電子増幅器および放射線測定装置 |
-
2008
- 2008-04-14 JP JP2011504318A patent/JP5335893B2/ja not_active Expired - Fee Related
- 2008-04-14 PL PL08735223T patent/PL2266129T3/pl unknown
- 2008-04-14 EP EP08735223.3A patent/EP2266129B1/en active Active
- 2008-04-14 WO PCT/EP2008/002944 patent/WO2009127220A1/en not_active Ceased
- 2008-04-14 KR KR1020107025503A patent/KR101368554B1/ko not_active Expired - Fee Related
- 2008-04-14 CN CN200880128609.XA patent/CN102007566B/zh not_active Expired - Fee Related
- 2008-04-14 US US12/937,755 patent/US8597490B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011517050A (ja) | 2011-05-26 |
| KR101368554B1 (ko) | 2014-02-27 |
| US8597490B2 (en) | 2013-12-03 |
| EP2266129A1 (en) | 2010-12-29 |
| KR20110007191A (ko) | 2011-01-21 |
| JP5335893B2 (ja) | 2013-11-06 |
| WO2009127220A1 (en) | 2009-10-22 |
| CN102007566A (zh) | 2011-04-06 |
| EP2266129B1 (en) | 2017-12-27 |
| CN102007566B (zh) | 2015-05-20 |
| US20110089042A1 (en) | 2011-04-21 |
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