PL2362175T3 - Obudowa grzejna i sposób jej zastosowania, przyrząd grzejny i sposób jego zastosowania oraz sposób działania urządzenia grzejnego - Google Patents

Obudowa grzejna i sposób jej zastosowania, przyrząd grzejny i sposób jego zastosowania oraz sposób działania urządzenia grzejnego

Info

Publication number
PL2362175T3
PL2362175T3 PL11250203T PL11250203T PL2362175T3 PL 2362175 T3 PL2362175 T3 PL 2362175T3 PL 11250203 T PL11250203 T PL 11250203T PL 11250203 T PL11250203 T PL 11250203T PL 2362175 T3 PL2362175 T3 PL 2362175T3
Authority
PL
Poland
Prior art keywords
heating
same
use method
housing
jig
Prior art date
Application number
PL11250203T
Other languages
English (en)
Inventor
Shigeru Hanzawa
Tsutomu Yamamoto
Hiroyoshi Suzumura
Original Assignee
Ngk Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2010037876A external-priority patent/JP5554085B2/ja
Priority claimed from JP2010063412A external-priority patent/JP5419763B2/ja
Application filed by Ngk Insulators Ltd filed Critical Ngk Insulators Ltd
Publication of PL2362175T3 publication Critical patent/PL2362175T3/pl

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens or the like for the charge within the furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B13/00—Furnaces with both stationary charge and progression of heating, e.g. of ring type or of the type in which a segmental kiln moves over a stationary charge
    • F27B13/06—Details, accessories or equipment specially adapted for furnaces of this type
    • F27B13/08—Casings
    • F27B13/10—Arrangements of linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Chamber type furnaces specially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
    • F27B9/32—Casings
    • F27B9/34—Arrangements of linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/12—Arrangement of elements for electric heating in or on furnaces with electromagnetic fields acting directly on the material being heated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Tunnel Furnaces (AREA)
PL11250203T 2010-02-23 2011-02-22 Obudowa grzejna i sposób jej zastosowania, przyrząd grzejny i sposób jego zastosowania oraz sposób działania urządzenia grzejnego PL2362175T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010037876A JP5554085B2 (ja) 2010-02-23 2010-02-23 加熱装置の運転方法
JP2010063412A JP5419763B2 (ja) 2010-03-19 2010-03-19 加熱用収納体およびその使用方法、ならびに加熱用治具およびその使用方法
EP11250203.4A EP2362175B1 (en) 2010-02-23 2011-02-22 Housing for heating and use method of the same, heating jig and use method of the same, and operation method of heating device

Publications (1)

Publication Number Publication Date
PL2362175T3 true PL2362175T3 (pl) 2015-11-30

Family

ID=44072597

Family Applications (1)

Application Number Title Priority Date Filing Date
PL11250203T PL2362175T3 (pl) 2010-02-23 2011-02-22 Obudowa grzejna i sposób jej zastosowania, przyrząd grzejny i sposób jego zastosowania oraz sposób działania urządzenia grzejnego

Country Status (3)

Country Link
US (2) US9097463B2 (pl)
EP (1) EP2362175B1 (pl)
PL (1) PL2362175T3 (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU176014U1 (ru) * 2016-12-20 2017-12-26 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Электропечь сопротивления
DE102020123546A1 (de) 2020-09-09 2022-03-10 Aixtron Se CVD-Reaktor mit einer Kühlfläche mit bereichsweise vergrößerter Emissivität
US12496256B2 (en) 2023-12-13 2025-12-16 Express Scripts Strategic Development, Inc. Prescription drug bottle measuring device and method of use

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1890978A (en) * 1929-11-19 1932-12-13 New Castle Refractories Compan Kiln car superstructure
DE3534750A1 (de) * 1985-09-28 1987-04-16 Krupp Gmbh Boden eines elektrisch beheizten schmelzofens, insbesondere eines gleichstromofens
JPS63303870A (ja) 1987-06-04 1988-12-12 Idemitsu Kosan Co Ltd コ−ティング材
DE9301293U1 (de) * 1993-01-30 1993-03-11 Ipsen Industries International Gmbh, 4190 Kleve Halterung zur partiellen Wärmebehandlung von Werkzeugen
US5565228A (en) * 1995-05-02 1996-10-15 Gics & Vermee, L.P. Ovenable food product tray and an ovenable food product package
JP3904665B2 (ja) 1997-05-13 2007-04-11 日本碍子株式会社 窯炉用棚組構造体
EP1226395A4 (en) 1999-08-12 2008-02-20 Asml Us Inc HOT WALL THERMAL TREATMENT DEVICE
US6864466B2 (en) * 2001-03-08 2005-03-08 Aviza Technology, Inc. System and method to control radial delta temperature
JP2003212672A (ja) 2002-01-21 2003-07-30 Ngk Insulators Ltd 多孔質セラミックス構造体の製造方法
US7429351B2 (en) * 2002-01-21 2008-09-30 Ngk Insulators, Ltd. Method for manufacturing a porous ceramic structure
JP4311609B2 (ja) 2002-07-26 2009-08-12 日本碍子株式会社 多孔質セラミックス体の製造方法
KR100475737B1 (ko) * 2002-09-11 2005-03-10 삼성전자주식회사 반도체 제조를 위한 베이크 장치
GB0221099D0 (en) * 2002-09-12 2002-10-23 Qinetiq Ltd Microwavable packaging material
US6768084B2 (en) * 2002-09-30 2004-07-27 Axcelis Technologies, Inc. Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile
JP2004225027A (ja) 2003-01-23 2004-08-12 Kayoko Sora 工業用加熱炉の熱放射性塗料とその製造法
US7562694B2 (en) * 2004-10-01 2009-07-21 Magneco/Metrel, Inc. Refractory casting method
US7104789B1 (en) * 2005-03-17 2006-09-12 Harbison-Walker Refractories Company Wall structure for carbon baking furnace
US8459476B2 (en) * 2006-01-11 2013-06-11 Mohammad Ghassem Malekmadani Audio / video isolation rack
JP2007270294A (ja) 2006-03-31 2007-10-18 Jfe Steel Kk バッチ式加熱炉による鋼材の加熱方法
DE102008009254A1 (de) * 2008-02-15 2009-08-27 Hte Ag The High Throughput Experimentation Company Mehrzonenofen

Also Published As

Publication number Publication date
US20140134557A1 (en) 2014-05-15
US20110207068A1 (en) 2011-08-25
EP2362175B1 (en) 2015-05-27
US9097463B2 (en) 2015-08-04
EP2362175A1 (en) 2011-08-31

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