PL251395A2 - Apparatus for meteringly admitting gaseous substances into a vacuum chamber - Google Patents

Apparatus for meteringly admitting gaseous substances into a vacuum chamber

Info

Publication number
PL251395A2
PL251395A2 PL25139584A PL25139584A PL251395A2 PL 251395 A2 PL251395 A2 PL 251395A2 PL 25139584 A PL25139584 A PL 25139584A PL 25139584 A PL25139584 A PL 25139584A PL 251395 A2 PL251395 A2 PL 251395A2
Authority
PL
Poland
Prior art keywords
meteringly
vacuum chamber
gaseous substances
admitting gaseous
admitting
Prior art date
Application number
PL25139584A
Other versions
PL139313B2 (en
Inventor
Kazimierz Pomorski
Original Assignee
Politechnika Szczecinska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Szczecinska filed Critical Politechnika Szczecinska
Priority to PL25139584A priority Critical patent/PL139313B2/en
Publication of PL251395A2 publication Critical patent/PL251395A2/en
Publication of PL139313B2 publication Critical patent/PL139313B2/en

Links

PL25139584A 1984-12-27 1984-12-27 Apparatus for meteringly admitting gaseous substances into a vacuum chamber PL139313B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL25139584A PL139313B2 (en) 1984-12-27 1984-12-27 Apparatus for meteringly admitting gaseous substances into a vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL25139584A PL139313B2 (en) 1984-12-27 1984-12-27 Apparatus for meteringly admitting gaseous substances into a vacuum chamber

Publications (2)

Publication Number Publication Date
PL251395A2 true PL251395A2 (en) 1985-11-05
PL139313B2 PL139313B2 (en) 1987-01-31

Family

ID=20024929

Family Applications (1)

Application Number Title Priority Date Filing Date
PL25139584A PL139313B2 (en) 1984-12-27 1984-12-27 Apparatus for meteringly admitting gaseous substances into a vacuum chamber

Country Status (1)

Country Link
PL (1) PL139313B2 (en)

Also Published As

Publication number Publication date
PL139313B2 (en) 1987-01-31

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