PL2702839T3 - Sposób przetwarzania gazu i urządzenie do realizacji tego sposobu - Google Patents
Sposób przetwarzania gazu i urządzenie do realizacji tego sposobuInfo
- Publication number
- PL2702839T3 PL2702839T3 PL12723249T PL12723249T PL2702839T3 PL 2702839 T3 PL2702839 T3 PL 2702839T3 PL 12723249 T PL12723249 T PL 12723249T PL 12723249 T PL12723249 T PL 12723249T PL 2702839 T3 PL2702839 T3 PL 2702839T3
- Authority
- PL
- Poland
- Prior art keywords
- gas
- processing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32201—Generating means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3478—Geometrical details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
- H05H1/4622—Microwave discharges using waveguides
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Geometry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1107130.5A GB2490355B (en) | 2011-04-28 | 2011-04-28 | Method for processing a gas and a device for performing the method |
| PCT/IB2012/052115 WO2012147054A1 (en) | 2011-04-28 | 2012-04-27 | Method for processing a gas and a device for performing the method |
| EP12723249.4A EP2702839B1 (en) | 2011-04-28 | 2012-04-27 | Method for processing a gas and a device for performing the method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL2702839T3 true PL2702839T3 (pl) | 2015-08-31 |
Family
ID=44168690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL12723249T PL2702839T3 (pl) | 2011-04-28 | 2012-04-27 | Sposób przetwarzania gazu i urządzenie do realizacji tego sposobu |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US9293302B2 (pl) |
| EP (1) | EP2702839B1 (pl) |
| JP (1) | JP5944487B2 (pl) |
| CA (1) | CA2833965C (pl) |
| DK (1) | DK2702839T3 (pl) |
| ES (1) | ES2540576T3 (pl) |
| GB (1) | GB2490355B (pl) |
| MY (1) | MY166645A (pl) |
| PL (1) | PL2702839T3 (pl) |
| PT (1) | PT2702839E (pl) |
| WO (1) | WO2012147054A1 (pl) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201410639D0 (en) | 2014-06-13 | 2014-07-30 | Fgv Cambridge Nanosystems Ltd | Apparatus and method for plasma synthesis of graphitic products including graphene |
| EP3201125B1 (en) * | 2014-09-30 | 2021-11-24 | OMNI Conversion Technologies Inc. | A non-equilibrium plasma system for refining syngas |
| US20160135277A1 (en) * | 2014-11-11 | 2016-05-12 | Agilent Technologies, Inc. | Reduction of ambient gas entrainment and ion current noise in plasma based spectrometry |
| KR101930241B1 (ko) * | 2015-03-13 | 2018-12-18 | 어드밴스드 에너지 인더스트리즈 인코포레이티드 | 플라즈마 소스 디바이스 및 방법들 |
| GB2545643B (en) * | 2015-12-15 | 2022-06-15 | Levidian Nanosystems Ltd | Apparatus and method for plasma synthesis of carbon nanotubes |
| US10987735B2 (en) | 2015-12-16 | 2021-04-27 | 6K Inc. | Spheroidal titanium metallic powders with custom microstructures |
| CA3009630C (en) | 2015-12-16 | 2023-08-01 | Amastan Technologies Llc | Spheroidal dehydrogenated metals and metal alloy particles |
| US12281013B2 (en) | 2016-10-06 | 2025-04-22 | Lyten, Inc. | Microwave reactor system enclosing a self-igniting plasma |
| EP3523013A4 (en) | 2016-10-06 | 2020-05-27 | Lyten, Inc. | MICROWAVE REACTOR SYSTEM WITH GAS-SOLID SEPARATION |
| US9812295B1 (en) * | 2016-11-15 | 2017-11-07 | Lyten, Inc. | Microwave chemical processing |
| CN117756101A (zh) * | 2016-12-21 | 2024-03-26 | 雷莫工业公司 | 用于生产石墨烯纳米片的等离子体方法 |
| US9997334B1 (en) | 2017-02-09 | 2018-06-12 | Lyten, Inc. | Seedless particles with carbon allotropes |
| US9767992B1 (en) | 2017-02-09 | 2017-09-19 | Lyten, Inc. | Microwave chemical processing reactor |
| CA3202286A1 (en) * | 2017-02-10 | 2018-08-16 | Raymor Industries Inc. | Graphenic carbon nanoparticles having a low polyaromatic hydrocarbon concentration and processes of making same |
| WO2018169889A1 (en) | 2017-03-16 | 2018-09-20 | Lyten, Inc. | Carbon and elastomer integration |
| US10920035B2 (en) | 2017-03-16 | 2021-02-16 | Lyten, Inc. | Tuning deformation hysteresis in tires using graphene |
| US9862606B1 (en) | 2017-03-27 | 2018-01-09 | Lyten, Inc. | Carbon allotropes |
| CA3076487A1 (en) * | 2017-04-07 | 2018-10-11 | Nuionic Technologies Lp | Microwave enhancement of chemical reactions |
| US9987611B1 (en) | 2017-08-08 | 2018-06-05 | H Quest Vanguard, Inc. | Non-thermal plasma conversion of hydrocarbons |
| US10434490B2 (en) | 2017-08-08 | 2019-10-08 | H Quest Vanguard, Inc. | Microwave-induced non-thermal plasma conversion of hydrocarbons |
| US11358113B2 (en) | 2017-08-08 | 2022-06-14 | H Quest Vanguard, Inc. | Non-thermal micro-plasma conversion of hydrocarbons |
| US11358869B2 (en) | 2017-08-08 | 2022-06-14 | H Quest Vanguard, Inc. | Methods and systems for microwave assisted production of graphitic materials |
| US10465128B2 (en) | 2017-09-20 | 2019-11-05 | Lyten, Inc. | Cracking of a process gas |
| CN107695085A (zh) * | 2017-11-06 | 2018-02-16 | 清华大学 | 一种微波等离子体处理塑料垃圾装置 |
| US10756334B2 (en) | 2017-12-22 | 2020-08-25 | Lyten, Inc. | Structured composite materials |
| KR102861875B1 (ko) | 2018-01-04 | 2025-09-19 | 라이텐, 인코포레이티드 | 공진 가스 센서 |
| WO2019143559A1 (en) | 2018-01-16 | 2019-07-25 | Lyten, Inc. | Microwave transparent pressure barrier |
| US10847337B2 (en) * | 2018-01-24 | 2020-11-24 | Applied Materials, Inc. | Side inject designs for improved radical concentrations |
| US11201035B2 (en) * | 2018-05-04 | 2021-12-14 | Tokyo Electron Limited | Radical source with contained plasma |
| CN112654444A (zh) | 2018-06-19 | 2021-04-13 | 6K有限公司 | 由原材料制造球化粉末的方法 |
| US11633710B2 (en) * | 2018-08-23 | 2023-04-25 | Transform Materials Llc | Systems and methods for processing gases |
| EP3841079A4 (en) | 2018-08-23 | 2022-05-25 | Transform Materials LLC | SYSTEM AND PROCESS FOR PROCESSING GASES |
| IT201800020206A1 (it) * | 2018-12-19 | 2020-06-19 | Directa Plus Spa | Apparecchiatura per il trattamento di materiali con plasma. |
| US12159768B2 (en) * | 2019-03-25 | 2024-12-03 | Recarbon, Inc. | Controlling exhaust gas pressure of a plasma reactor for plasma stability |
| US10832893B2 (en) * | 2019-03-25 | 2020-11-10 | Recarbon, Inc. | Plasma reactor for processing gas |
| CN114641462A (zh) | 2019-11-18 | 2022-06-17 | 6K有限公司 | 用于球形粉末的独特原料及制造方法 |
| KR102929829B1 (ko) | 2020-03-23 | 2026-02-23 | 에스에스티 인크. | 고주파 반응 프로세싱 장치 및 고주파 반응 프로세싱 시스템 |
| US11690162B2 (en) | 2020-04-13 | 2023-06-27 | Kla Corporation | Laser-sustained plasma light source with gas vortex flow |
| CA3180426A1 (en) | 2020-06-25 | 2021-12-30 | Richard K. Holman | Microcomposite alloy structure |
| US11999649B2 (en) | 2020-08-04 | 2024-06-04 | Lyten, Inc. | Methods for manufacturing or reinforcing carbon-containing glass materials |
| US20230298858A1 (en) * | 2020-08-14 | 2023-09-21 | The Regents Of The University Of Michigan | Plasma device for gas-based surface treatment and water activation |
| WO2022046297A1 (en) * | 2020-08-31 | 2022-03-03 | Lyten, Inc. | Microwave reactor system enclosing a self-igniting plasma |
| AU2021349358A1 (en) | 2020-09-24 | 2023-02-09 | 6K Inc. | Systems, devices, and methods for starting plasma |
| CA3196653A1 (en) | 2020-10-30 | 2022-05-05 | Sunil Bhalchandra BADWE | Systems and methods for synthesis of spheroidized metal powders |
| AU2022206483A1 (en) | 2021-01-11 | 2023-08-31 | 6K Inc. | Methods and systems for reclamation of li-ion cathode materials using microwave plasma processing |
| WO2022212291A1 (en) | 2021-03-31 | 2022-10-06 | 6K Inc. | Systems and methods for additive manufacturing of metal nitride ceramics |
| US11776804B2 (en) | 2021-04-23 | 2023-10-03 | Kla Corporation | Laser-sustained plasma light source with reverse vortex flow |
| WO2022246409A2 (en) | 2021-05-17 | 2022-11-24 | H Quest Vanguard, Inc. | Microwave assisted fluidized bed reactor |
| US11978620B2 (en) * | 2021-08-12 | 2024-05-07 | Kla Corporation | Swirler for laser-sustained plasma light source with reverse vortex flow |
| WO2023229928A1 (en) | 2022-05-23 | 2023-11-30 | 6K Inc. | Microwave plasma apparatus and methods for processing materials using an interior liner |
| US12040162B2 (en) | 2022-06-09 | 2024-07-16 | 6K Inc. | Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows |
| US20250381548A1 (en) | 2022-06-24 | 2025-12-18 | Fld Technologies Gmbh | Device for carrying out a chemical reaction in a plasma and method using the device |
| GB2620597A (en) | 2022-07-12 | 2024-01-17 | Levidian Nanosystems Ltd | Apparatus and method for producing graphene and hydrogen |
| WO2024044498A1 (en) | 2022-08-25 | 2024-02-29 | 6K Inc. | Plasma apparatus and methods for processing feed material utilizing a powder ingress preventor (pip) |
| US12195338B2 (en) | 2022-12-15 | 2025-01-14 | 6K Inc. | Systems, methods, and device for pyrolysis of methane in a microwave plasma for hydrogen and structured carbon powder production |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6700212A (pl) * | 1967-01-06 | 1968-07-08 | ||
| FR2533397A2 (fr) * | 1982-09-16 | 1984-03-23 | Anvar | Perfectionnements aux torches a plasma |
| AU549376B2 (en) | 1983-02-25 | 1986-01-23 | Toyota Jidosha Kabushiki Kaisha | Plasma treatment |
| US5349154A (en) * | 1991-10-16 | 1994-09-20 | Rockwell International Corporation | Diamond growth by microwave generated plasma flame |
| US5206471A (en) | 1991-12-26 | 1993-04-27 | Applied Science And Technology, Inc. | Microwave activated gas generator |
| US5793013A (en) * | 1995-06-07 | 1998-08-11 | Physical Sciences, Inc. | Microwave-driven plasma spraying apparatus and method for spraying |
| DE10112494C2 (de) * | 2001-03-15 | 2003-12-11 | Mtu Aero Engines Gmbh | Verfahren zum Plasmaschweißen |
| GB2442990A (en) * | 2004-10-04 | 2008-04-23 | C Tech Innovation Ltd | Microwave plasma apparatus |
| JP2006294422A (ja) * | 2005-04-11 | 2006-10-26 | Tokyo Electron Ltd | プラズマ処理装置およびスロットアンテナおよびプラズマ処理方法 |
| GB0516695D0 (en) * | 2005-08-15 | 2005-09-21 | Boc Group Plc | Microwave plasma reactor |
| CN101361409B (zh) | 2006-01-30 | 2011-09-14 | 赛安株式会社 | 工件处理系统和等离子体产生装置 |
| EP1936656A1 (en) | 2006-12-21 | 2008-06-25 | Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO | Plasma generator and method for cleaning an object |
| WO2009065444A1 (en) * | 2007-11-23 | 2009-05-28 | Mar De Acedos, S.L. | A method of producing polycrystalline and single crystal silicon |
| GB0902784D0 (en) | 2009-02-19 | 2009-04-08 | Gasplas As | Plasma reactor |
-
2011
- 2011-04-28 GB GB1107130.5A patent/GB2490355B/en active Active
-
2012
- 2012-04-27 MY MYPI2013702043A patent/MY166645A/en unknown
- 2012-04-27 WO PCT/IB2012/052115 patent/WO2012147054A1/en not_active Ceased
- 2012-04-27 EP EP12723249.4A patent/EP2702839B1/en active Active
- 2012-04-27 ES ES12723249.4T patent/ES2540576T3/es active Active
- 2012-04-27 CA CA2833965A patent/CA2833965C/en active Active
- 2012-04-27 JP JP2014506980A patent/JP5944487B2/ja active Active
- 2012-04-27 PT PT127232494T patent/PT2702839E/pt unknown
- 2012-04-27 PL PL12723249T patent/PL2702839T3/pl unknown
- 2012-04-27 DK DK12723249.4T patent/DK2702839T3/en active
-
2014
- 2014-02-14 US US14/180,981 patent/US9293302B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| ES2540576T3 (es) | 2015-07-10 |
| CA2833965A1 (en) | 2012-11-01 |
| JP2014512950A (ja) | 2014-05-29 |
| WO2012147054A1 (en) | 2012-11-01 |
| GB2490355A (en) | 2012-10-31 |
| EP2702839B1 (en) | 2015-03-25 |
| MY166645A (en) | 2018-07-17 |
| PT2702839E (pt) | 2015-06-23 |
| EP2702839A1 (en) | 2014-03-05 |
| US9293302B2 (en) | 2016-03-22 |
| GB201107130D0 (en) | 2011-06-08 |
| CA2833965C (en) | 2019-07-09 |
| DK2702839T3 (en) | 2015-07-06 |
| JP5944487B2 (ja) | 2016-07-05 |
| GB2490355B (en) | 2015-10-14 |
| US20140159572A1 (en) | 2014-06-12 |
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