PL284962A2 - Thin film depositing apparatus - Google Patents

Thin film depositing apparatus

Info

Publication number
PL284962A2
PL284962A2 PL28496290A PL28496290A PL284962A2 PL 284962 A2 PL284962 A2 PL 284962A2 PL 28496290 A PL28496290 A PL 28496290A PL 28496290 A PL28496290 A PL 28496290A PL 284962 A2 PL284962 A2 PL 284962A2
Authority
PL
Poland
Prior art keywords
thin film
depositing apparatus
film depositing
thin
film
Prior art date
Application number
PL28496290A
Other versions
PL161595B2 (en
Inventor
Krzysztof Miernik
Wladimir Barczenko
Siergiej Zagraniczny
Igor Balikojew
Original Assignee
Miedzyresortowe Ct Naukowe Eks
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miedzyresortowe Ct Naukowe Eks filed Critical Miedzyresortowe Ct Naukowe Eks
Priority to PL28496290A priority Critical patent/PL161595B2/en
Publication of PL284962A2 publication Critical patent/PL284962A2/en
Publication of PL161595B2 publication Critical patent/PL161595B2/en

Links

PL28496290A 1990-04-26 1990-04-26 Thin film depositing apparatus PL161595B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL28496290A PL161595B2 (en) 1990-04-26 1990-04-26 Thin film depositing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL28496290A PL161595B2 (en) 1990-04-26 1990-04-26 Thin film depositing apparatus

Publications (2)

Publication Number Publication Date
PL284962A2 true PL284962A2 (en) 1991-01-28
PL161595B2 PL161595B2 (en) 1993-07-30

Family

ID=20051079

Family Applications (1)

Application Number Title Priority Date Filing Date
PL28496290A PL161595B2 (en) 1990-04-26 1990-04-26 Thin film depositing apparatus

Country Status (1)

Country Link
PL (1) PL161595B2 (en)

Also Published As

Publication number Publication date
PL161595B2 (en) 1993-07-30

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