PL2972295T3 - Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału - Google Patents

Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału

Info

Publication number
PL2972295T3
PL2972295T3 PL14764974T PL14764974T PL2972295T3 PL 2972295 T3 PL2972295 T3 PL 2972295T3 PL 14764974 T PL14764974 T PL 14764974T PL 14764974 T PL14764974 T PL 14764974T PL 2972295 T3 PL2972295 T3 PL 2972295T3
Authority
PL
Poland
Prior art keywords
thin film
bulk acoustic
acoustic resonator
film bulk
signal enhancement
Prior art date
Application number
PL14764974T
Other languages
English (en)
Inventor
Michael Salvati
Ian HARMON
Original Assignee
Qorvo Us, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo Us, Inc. filed Critical Qorvo Us, Inc.
Publication of PL2972295T3 publication Critical patent/PL2972295T3/pl

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366Apparatus specially adapted for solid-phase testing
    • G01N33/54373Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2437Piezoelectric probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0255(Bio)chemical reactions, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0426Bulk waves, e.g. quartz crystal microbalance, torsional waves

Landscapes

  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Urology & Nephrology (AREA)
  • Molecular Biology (AREA)
  • Hematology (AREA)
  • Biomedical Technology (AREA)
  • Acoustics & Sound (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Biotechnology (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
PL14764974T 2013-03-15 2014-03-14 Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału PL2972295T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361790076P 2013-03-15 2013-03-15
PCT/US2014/027743 WO2014143680A1 (en) 2013-03-15 2014-03-14 Thin film bulk acoustic resonator with signal enhancement
EP14764974.3A EP2972295B1 (en) 2013-03-15 2014-03-14 Thin film bulk acoustic resonator with signal enhancement

Publications (1)

Publication Number Publication Date
PL2972295T3 true PL2972295T3 (pl) 2019-07-31

Family

ID=51537513

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14764974T PL2972295T3 (pl) 2013-03-15 2014-03-14 Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału

Country Status (6)

Country Link
EP (1) EP2972295B1 (pl)
CN (1) CN105431734B (pl)
DK (1) DK2972295T3 (pl)
ES (1) ES2712747T3 (pl)
PL (1) PL2972295T3 (pl)
WO (1) WO2014143680A1 (pl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10234425B2 (en) 2013-03-15 2019-03-19 Qorvo Us, Inc. Thin film bulk acoustic resonator with signal enhancement
PL3000133T3 (pl) 2013-05-23 2021-09-20 Qorvo Us, Inc. Czujnik piezoelektryczny
CN110694700A (zh) 2013-05-23 2020-01-17 Qorvo美国公司 两部分总成
PL3194961T3 (pl) 2014-09-15 2021-08-02 Qorvo Us, Inc. Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału
WO2017189512A1 (en) * 2016-04-26 2017-11-02 Qorvo Us, Inc. Resonator for detecting single molecule binding
US12360125B2 (en) 2016-07-25 2025-07-15 Zomedica Biotechnologies Llc Biosensor for coagulation testing
CN107238661B (zh) * 2017-05-31 2018-04-17 湖南农业大学 一种细胞牵引力与粘弹性的同时定量测定方法
CA3069148A1 (en) * 2017-07-11 2019-01-17 Aviana Molecular Technologies, Llc Signal amplification in biosensor device
US20200386751A1 (en) 2017-11-28 2020-12-10 Inanobio, Inc. Field effect transistor sensor detection assays and systems and methods of making and using same
JP2021528664A (ja) 2018-07-06 2021-10-21 コーボ ユーエス,インコーポレイティド ダイナミックレンジが拡大されたバルク音響波共振器
GB2629413A (en) * 2023-04-27 2024-10-30 The Univ Of Durham Method and apparatus for detecting a target in a complex fluid

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999284A (en) * 1988-04-06 1991-03-12 E. I. Du Pont De Nemours And Company Enzymatically amplified piezoelectric specific binding assay
DE69010506T2 (de) * 1989-10-04 1994-12-22 Du Pont Bestimmungsverfahren für biologische zielkomplexe auf der oberfläche eines biosensors.
US5932953A (en) * 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
US7989851B2 (en) * 2002-06-06 2011-08-02 Rutgers, The State University Of New Jersey Multifunctional biosensor based on ZnO nanostructures
US20050148065A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
JP5276655B2 (ja) * 2007-06-01 2013-08-28 アトノミックス アクティーゼルスカブ 標的検体の検出用のナノ粒子を用いた生体表面弾性波(saw)共振器増幅
KR20090070886A (ko) * 2007-12-27 2009-07-01 삼성전자주식회사 압전 센서를 이용한 바이오 센서에서 신호의 주파수변화량을 증폭하는 방법
US20090325171A1 (en) * 2008-05-13 2009-12-31 Thomas Hirt Vesicles for use in biosensors
US9255912B2 (en) * 2009-04-29 2016-02-09 The Trustees Of Columbia University In The City Of New York Monolithic FBAR-CMOS structure such as for mass sensing
WO2011102065A1 (ja) * 2010-02-17 2011-08-25 株式会社 村田製作所 質量検出センサーを用いた検出方法
EP2630479B1 (en) * 2010-10-20 2020-04-08 Qorvo US, Inc. Apparatus and method for measuring binding kinetics and concentration with a resonating sensor

Also Published As

Publication number Publication date
WO2014143680A1 (en) 2014-09-18
CN105431734A (zh) 2016-03-23
CN105431734B (zh) 2018-10-02
EP2972295B1 (en) 2018-11-28
ES2712747T3 (es) 2019-05-14
DK2972295T3 (en) 2019-03-25
EP2972295A4 (en) 2016-11-09
EP2972295A1 (en) 2016-01-20

Similar Documents

Publication Publication Date Title
PL2972295T3 (pl) Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału
SG2013084629A (en) Piezoelectric thin film resonator
SG2014001010A (en) Piezoelectric thin film resonator, filter, and duplexer
EP3216231A4 (en) Package waveguide for acoustic sensor with electronic delay compensation
GB2521416B (en) Biasing circuitry for MEMS transducers
EP3035699A4 (en) Headphone-type acoustic device
EP2972518A4 (en) Signal inhomogeneity correction and performance evaluation apparatus
EP3042311A4 (en) Bulk field device operations
EP2969264A4 (en) ACOUSTIC TRANSDUCERS HAVING A BEND LIMITATION ELEMENT
SG11201605179XA (en) Micro-electromechanical sound transducer with sound energy-reflecting interlayer
GB2515518B (en) Acoustic Transducer
GB2512155B (en) Acoustic echo cancellation
EP3134215A4 (en) High frequency ultrasound transducers
EP3086471A4 (en) Piezoelectric oscillation device
GB2509533B (en) Group delay correction in acoustic transducer systems
GB201320594D0 (en) Ultrasound transducer
GB2513986B (en) An acoustic device
PL3000133T3 (pl) Czujnik piezoelektryczny
EP3015746A4 (en) Rubber-metal laminated gasket material
GB2512413B (en) Acoustic echo cancellation
EP3021099A4 (en) Piezoelectric sensor
EP3020130A4 (en) RESONATOR APPLICATIONS FOR LONGASITE AND ITSOMORPH
EP3011285A4 (en) Vibration sensor
PL3194961T3 (pl) Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału
EP3058757A4 (en) Electroacoustic transducer