PL2984674T3 - Tarcza do rozpylania jonowego o podwyższonej zgodności mocy - Google Patents

Tarcza do rozpylania jonowego o podwyższonej zgodności mocy

Info

Publication number: PL2984674T3
Authority: PL; Poland
Prior art keywords: sputtering target; increased power; power compatibility; compatibility; increased
Prior art date: 2013-04-08

Application number

PL14718509T

Other languages

English (en)

Inventor

Siegfried Krassnitzer

Juerg Hagmann

Joerg Kerschbaumer

Original Assignee

Oerlikon Surface Solutions Ag, Pfäffikon

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-04-08

Filing date

2014-04-07

Publication date

2018-10-31

2014-04-07 Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon

2018-10-31 Publication of PL2984674T3 publication Critical patent/PL2984674T3/pl

Links

238000005477 sputtering target Methods 0.000 title 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3423—Shape
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/3467—Pulsed operation, e.g. HIPIMS
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
- H01J37/3497—Temperature of target

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Metallurgy (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Telescopes (AREA)
Magnetic Resonance Imaging Apparatus (AREA)
Coating By Spraying Or Casting (AREA)
Nozzles (AREA)
Manufacturing Of Magnetic Record Carriers (AREA)
Packaging For Recording Disks (AREA)

PL14718509T 2013-04-08 2014-04-07 Tarcza do rozpylania jonowego o podwyższonej zgodności mocy PL2984674T3 (pl)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US201361809524P	2013-04-08	2013-04-08
PCT/EP2014/000927 WO2014166620A1 (de)	2013-04-08	2014-04-07	Sputtertarget mit erhöhter leistungsverträglichkeit
EP14718509.4A EP2984674B1 (de)	2013-04-08	2014-04-07	Sputtertarget mit erhöhter leistungsverträglichkeit

Publications (1)

Publication Number	Publication Date
PL2984674T3 true PL2984674T3 (pl)	2018-10-31

Family

ID=50486885

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
PL14718509T PL2984674T3 (pl)	2013-04-08	2014-04-07	Tarcza do rozpylania jonowego o podwyższonej zgodności mocy

Country Status (21)

Country	Link
US (2)	US9536714B2 (pl)
EP (2)	EP2984674B1 (pl)
JP (2)	JP6655531B2 (pl)
KR (2)	KR102190319B1 (pl)
CN (2)	CN105324830B (pl)
AR (2)	AR099253A1 (pl)
BR (2)	BR112015025747A2 (pl)
CA (2)	CA2908897C (pl)
ES (1)	ES2675332T3 (pl)
HK (1)	HK1214403A1 (pl)
HU (1)	HUE038784T2 (pl)
IL (2)	IL241980B (pl)
MX (2)	MX350171B (pl)
MY (2)	MY178843A (pl)
PH (2)	PH12015502328B1 (pl)
PL (1)	PL2984674T3 (pl)
RU (2)	RU2665059C2 (pl)
SG (3)	SG11201508324VA (pl)
TR (1)	TR201809526T4 (pl)
TW (2)	TW201443258A (pl)
WO (2)	WO2014166620A1 (pl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US10435784B2 (en)	2016-08-10	2019-10-08	Applied Materials, Inc.	Thermally optimized rings
WO2018220067A1 (en)	2017-06-01	2018-12-06	Oerlikon Surface Solutions Ag, Pfäffikon	Target assembly for safe and economic evaporation of brittle materials
CN108130516A (zh) *	2018-01-03	2018-06-08	梧州三和新材料科技有限公司	一种使用泡沫金属增强冷却的真空镀阴极靶
CN110838458B (zh)	2018-08-17	2022-08-09	台湾积体电路制造股份有限公司	半导体制程系统以及方法
US11600517B2 (en) *	2018-08-17	2023-03-07	Taiwan Semiconductor Manufacturing Co., Ltd.	Screwless semiconductor processing chambers
SG11202106614UA (en) *	2018-12-20	2021-07-29	Oerlikon Surface Solutions Ag Pfaeffikon	Cathodic arc ignition device
CN110066980A (zh) *	2019-05-31	2019-07-30	德淮半导体有限公司	环状靶材部件、半导体工艺设备及其工作方法
EP4073830A1 (en) *	2019-12-13	2022-10-19	Evatec AG	Gas ring for a pvd source

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5724890Y2 (pl) *	1979-10-31	1982-05-29
EP0393344A1 (de)	1989-04-20	1990-10-24	Balzers Aktiengesellschaft	Haltevorrichtung für Targets von Zerstäubungsquellen und Verfahren zum Festhalten eines Targets in einer Halterung
DE4015388C2 (de) *	1990-05-14	1997-07-17	Leybold Ag	Kathodenzerstäubungsvorrichtung
KR100231397B1 (ko) *	1991-01-28	1999-11-15	튜그룰 야사르	음극 스퍼터링용 타겟
DE9102052U1 (de) *	1991-02-21	1991-06-13	Hauzer Holding B.V., Venlo	Indirekt gekühlter Verdampfer mit Schnellwechselsystem
JP3030921B2 (ja) *	1991-05-01	2000-04-10	日新電機株式会社	イオン源の引出し電極装置
US5269894A (en) *	1991-05-08	1993-12-14	Balzers Aktiengesellschaft	Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber
DE4133564C2 (de) *	1991-10-10	1999-11-18	Leybold Ag	Vorrichtung zur lösbaren Befestigung eines Targets oder Targetgrundkörpers auf der Kathodenhalterung
RU2037559C1 (ru) *	1992-08-10	1995-06-19	Волин Эрнст Михайлович	Способ нанесения покрытий на изделия методом ионного распыления и устройство для его осуществления
WO1997003221A1 (en) *	1995-07-10	1997-01-30	Cvc Products, Inc.	Magnetron cathode apparatus and method for sputtering
DE19535894A1 (de)	1995-09-27	1997-04-03	Leybold Materials Gmbh	Target für die Sputterkathode einer Vakuumbeschichtungsanlage und Verfahren zu seiner Herstellung
US6217832B1 (en) *	1998-04-30	2001-04-17	Catalytica, Inc.	Support structures for a catalyst
JP4251713B2 (ja) *	1999-05-21	2009-04-08	株式会社アルバック	スパッタ装置
US6589352B1 (en) *	1999-12-10	2003-07-08	Applied Materials, Inc.	Self aligning non contact shadow ring process kit
JP4101524B2 (ja) *	2002-02-05	2008-06-18	芝浦メカトロニクス株式会社	成膜装置
JP2010116605A (ja) *	2008-11-13	2010-05-27	Fujikura Ltd	ターゲット保持装置、ならびにこれを用いた成膜装置および成膜方法
JP2011165964A (ja) *	2010-02-10	2011-08-25	Hitachi Kokusai Electric Inc	半導体装置の製造方法
DE102012006717A1 (de)	2012-04-04	2013-10-10	Oerlikon Trading Ag, Trübbach	An eine indirekte Kühlvorrichtung angepasstes Target

2014
- 2014-04-07 RU RU2015147496A patent/RU2665059C2/ru not_active IP Right Cessation
- 2014-04-07 JP JP2016506806A patent/JP6655531B2/ja active Active
- 2014-04-07 WO PCT/EP2014/000927 patent/WO2014166620A1/de not_active Ceased
- 2014-04-07 US US14/783,168 patent/US9536714B2/en active Active - Reinstated
- 2014-04-07 SG SG11201508324VA patent/SG11201508324VA/en unknown
- 2014-04-07 ES ES14718509.4T patent/ES2675332T3/es active Active
- 2014-04-07 US US14/783,383 patent/US9564300B2/en active Active
- 2014-04-07 KR KR1020157031127A patent/KR102190319B1/ko active Active
- 2014-04-07 CN CN201480031545.7A patent/CN105324830B/zh not_active Expired - Fee Related
- 2014-04-07 EP EP14718509.4A patent/EP2984674B1/de active Active
- 2014-04-07 BR BR112015025747A patent/BR112015025747A2/pt not_active IP Right Cessation
- 2014-04-07 HU HUE14718509A patent/HUE038784T2/hu unknown
- 2014-04-07 AR ARP140101499A patent/AR099253A1/es unknown
- 2014-04-07 EP EP14717412.2A patent/EP2984673B1/de active Active
- 2014-04-07 KR KR1020157031126A patent/KR102234454B1/ko active Active
- 2014-04-07 MY MYPI2015703578A patent/MY178843A/en unknown
- 2014-04-07 CN CN201480026375.3A patent/CN105210169B/zh active Active
- 2014-04-07 JP JP2016506805A patent/JP6360884B2/ja active Active
- 2014-04-07 RU RU2015147497A patent/RU2665058C2/ru not_active IP Right Cessation
- 2014-04-07 BR BR112015025749A patent/BR112015025749A2/pt not_active IP Right Cessation
- 2014-04-07 CA CA2908897A patent/CA2908897C/en active Active
- 2014-04-07 WO PCT/EP2014/000928 patent/WO2014166621A1/de not_active Ceased
- 2014-04-07 CA CA2908892A patent/CA2908892C/en active Active
- 2014-04-07 HK HK16102413.7A patent/HK1214403A1/zh unknown
- 2014-04-07 MX MX2015014210A patent/MX350171B/es active IP Right Grant
- 2014-04-07 AR ARP140101500A patent/AR096021A1/es unknown
- 2014-04-07 SG SG10201708186QA patent/SG10201708186QA/en unknown
- 2014-04-07 PL PL14718509T patent/PL2984674T3/pl unknown
- 2014-04-07 MX MX2015014209A patent/MX350172B/es active IP Right Grant
- 2014-04-07 SG SG11201508311VA patent/SG11201508311VA/en unknown
- 2014-04-07 TR TR2018/09526T patent/TR201809526T4/tr unknown
- 2014-04-07 MY MYPI2015703579A patent/MY185549A/en unknown
- 2014-04-08 TW TW103112844A patent/TW201443258A/zh unknown
- 2014-04-08 TW TW103112846A patent/TW201443263A/zh unknown
2015
- 2015-10-07 PH PH12015502328A patent/PH12015502328B1/en unknown
- 2015-10-08 PH PH12015502338A patent/PH12015502338B1/en unknown
- 2015-10-08 IL IL241980A patent/IL241980B/en active IP Right Grant
- 2015-10-08 IL IL241979A patent/IL241979B/en active IP Right Grant

Also Published As

Publication number	Publication date
PH12015502328A1 (en)	2016-02-22
JP6360884B2 (ja)	2018-07-18
PH12015502338A1 (en)	2016-02-22
MY178843A (en)	2020-10-20
CN105210169B (zh)	2017-04-19
JP6655531B2 (ja)	2020-02-26
AR099253A1 (es)	2016-07-13
BR112015025749A2 (pt)	2017-07-18
EP2984674A1 (de)	2016-02-17
SG11201508311VA (en)	2015-11-27
JP2016519719A (ja)	2016-07-07
RU2015147497A (ru)	2017-05-16
US20160064201A1 (en)	2016-03-03
CA2908897A1 (en)	2014-10-16
SG11201508324VA (en)	2015-11-27
TW201443258A (zh)	2014-11-16
IL241979B (en)	2020-07-30
RU2015147496A (ru)	2017-05-16
US9564300B2 (en)	2017-02-07
ES2675332T3 (es)	2018-07-10
CA2908892C (en)	2021-08-24
HUE038784T2 (hu)	2018-11-28
EP2984673B1 (de)	2020-03-11
KR20150139555A (ko)	2015-12-11
MX350171B (es)	2017-08-28
MX350172B (es)	2017-08-28
KR20150139556A (ko)	2015-12-11
TW201443263A (zh)	2014-11-16
MY185549A (en)	2021-05-19
EP2984673A1 (de)	2016-02-17
MX2015014210A (es)	2016-05-05
EP2984674B1 (de)	2018-06-06
RU2665058C2 (ru)	2018-08-28
TR201809526T4 (tr)	2018-07-23
HK1219562A1 (zh)	2017-04-07
CN105324830B (zh)	2017-08-01
CN105210169A (zh)	2015-12-30
CA2908892A1 (en)	2014-10-16
US20160071706A1 (en)	2016-03-10
MX2015014209A (es)	2016-05-10
SG10201708186QA (en)	2017-11-29
KR102190319B1 (ko)	2020-12-14
RU2665059C2 (ru)	2018-08-28
PH12015502328B1 (en)	2018-09-26
CN105324830A (zh)	2016-02-10
AR096021A1 (es)	2015-12-02
US9536714B2 (en)	2017-01-03
HK1214403A1 (zh)	2016-07-22
JP2016514771A (ja)	2016-05-23
CA2908897C (en)	2023-03-14
IL241980B (en)	2020-08-31
PH12015502338B1 (en)	2016-02-22
BR112015025747A2 (pt)	2017-07-18
KR102234454B1 (ko)	2021-04-01
WO2014166621A1 (de)	2014-10-16
WO2014166620A1 (de)	2014-10-16

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