PL3012858T3 - Zespół komory procesowej oraz sposób napromieniania podłoża w komorze procesowej - Google Patents
Zespół komory procesowej oraz sposób napromieniania podłoża w komorze procesowejInfo
- Publication number
- PL3012858T3 PL3012858T3 PL14003620T PL14003620T PL3012858T3 PL 3012858 T3 PL3012858 T3 PL 3012858T3 PL 14003620 T PL14003620 T PL 14003620T PL 14003620 T PL14003620 T PL 14003620T PL 3012858 T3 PL3012858 T3 PL 3012858T3
- Authority
- PL
- Poland
- Prior art keywords
- process chamber
- irradiating
- substrate
- assembly
- chamber assembly
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0431—Apparatus for thermal treatment
- H10P72/0436—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
- H10P72/3314—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14003620.3A EP3012858B8 (de) | 2014-10-24 | 2014-10-24 | Prozesskammeranordnung und Verfahren zum Bestrahlen eines Substrats in einer Prozesskammer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL3012858T3 true PL3012858T3 (pl) | 2018-01-31 |
Family
ID=51868731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL14003620T PL3012858T3 (pl) | 2014-10-24 | 2014-10-24 | Zespół komory procesowej oraz sposób napromieniania podłoża w komorze procesowej |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP3012858B8 (pl) |
| PL (1) | PL3012858T3 (pl) |
| WO (1) | WO2016062420A1 (pl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016114282A1 (de) * | 2016-08-02 | 2018-02-08 | Von Ardenne Gmbh | Prozessieranordnung und Verfahren |
| DE102019219511B4 (de) * | 2019-12-12 | 2021-06-24 | Heraeus Noblelight Gmbh | Belichtungsvorrichtung mit einer vielzahl optischer elemente und einer modularen elektromagnetischen strahlungsquelle, die ein strahlungsquellenmodul mit einem halbwertswinkel beinhaltet |
| CN115446093A (zh) * | 2022-09-02 | 2022-12-09 | 重庆远达烟气治理特许经营有限公司科技分公司 | 层压件辐照处理装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005026354A (ja) * | 2003-06-30 | 2005-01-27 | Toshiba Corp | 熱処理装置，熱処理方法，半導体装置の製造方法 |
| US8945686B2 (en) * | 2007-05-24 | 2015-02-03 | Ncc | Method for reducing thin films on low temperature substrates |
| DE102013104577B3 (de) * | 2013-05-03 | 2014-07-24 | Heraeus Noblelight Gmbh | Vorrichtung zum Trocknen und Sintern metallhaltiger Tinte auf einem Substrat |
-
2014
- 2014-10-24 EP EP14003620.3A patent/EP3012858B8/de active Active
- 2014-10-24 PL PL14003620T patent/PL3012858T3/pl unknown
-
2015
- 2015-07-29 WO PCT/EP2015/067405 patent/WO2016062420A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP3012858B8 (de) | 2017-09-27 |
| EP3012858A1 (de) | 2016-04-27 |
| EP3012858B1 (de) | 2017-08-09 |
| WO2016062420A1 (de) | 2016-04-28 |
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