PL3068197T3 - Urządzenie do detekcji stanu braku zapłonu plazmy i sposób wykrywania stanu braku zapłonu plazmy - Google Patents
Urządzenie do detekcji stanu braku zapłonu plazmy i sposób wykrywania stanu braku zapłonu plazmyInfo
- Publication number
- PL3068197T3 PL3068197T3 PL13898096T PL13898096T PL3068197T3 PL 3068197 T3 PL3068197 T3 PL 3068197T3 PL 13898096 T PL13898096 T PL 13898096T PL 13898096 T PL13898096 T PL 13898096T PL 3068197 T3 PL3068197 T3 PL 3068197T3
- Authority
- PL
- Poland
- Prior art keywords
- state detection
- plasma state
- unignited plasma
- unignited
- detection device
- Prior art date
Links
- 238000001514 detection method Methods 0.000 title 2
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/3299—Feedback systems
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/26—Matching networks
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013247660A JP5850581B2 (ja) | 2013-11-29 | 2013-11-29 | プラズマ未着火状態判別装置およびプラズマ未着火判別方法 |
| EP13898096.6A EP3068197B1 (en) | 2013-11-29 | 2013-12-26 | Unignited plasma state detection device and unignited plasma state detection method |
| PCT/JP2013/084820 WO2015079595A1 (ja) | 2013-11-29 | 2013-12-26 | プラズマ未着火状態検出装置およびプラズマ未着火状態検出方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL3068197T3 true PL3068197T3 (pl) | 2018-10-31 |
Family
ID=53198578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL13898096T PL3068197T3 (pl) | 2013-11-29 | 2013-12-26 | Urządzenie do detekcji stanu braku zapłonu plazmy i sposób wykrywania stanu braku zapłonu plazmy |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9699878B2 (pl) |
| EP (1) | EP3068197B1 (pl) |
| JP (1) | JP5850581B2 (pl) |
| KR (1) | KR101689509B1 (pl) |
| CN (1) | CN105723813B (pl) |
| PL (1) | PL3068197T3 (pl) |
| TW (1) | TWI549569B (pl) |
| WO (1) | WO2015079595A1 (pl) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109563799B (zh) * | 2016-08-17 | 2021-06-08 | 三菱电机株式会社 | 阻挡放电型点火装置 |
| US10283320B2 (en) * | 2016-11-11 | 2019-05-07 | Applied Materials, Inc. | Processing chamber hardware fault detection using spectral radio frequency analysis |
| JP6814693B2 (ja) * | 2017-05-10 | 2021-01-20 | 東京エレクトロン株式会社 | マイクロ波出力装置及びプラズマ処理装置 |
| US10505348B2 (en) * | 2017-09-15 | 2019-12-10 | Mks Instruments, Inc. | Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system |
| CN107681984B (zh) * | 2017-10-24 | 2024-04-05 | 合肥雷科电子科技有限公司 | 一种毫米波快脉冲反射过大实时保护电路及其保护方法 |
| CN113796163B (zh) * | 2019-05-09 | 2024-11-29 | Spp科技股份有限公司 | 等离子体点火方法和等离子体生成装置 |
| CN114556796B (zh) * | 2019-10-18 | 2024-07-16 | 诺基亚技术有限公司 | 大规模mimo天线阵列 |
| KR102223876B1 (ko) * | 2019-10-28 | 2021-03-05 | 주식회사 뉴파워 프라즈마 | 불안정 매칭 현상을 해소하기 위한 다중 전압 제어 방법 및 다중 전압 제어 방식의 고주파 전원 장치 |
| EP4177928B1 (en) * | 2021-11-09 | 2024-01-03 | Impedans Ltd | Two stage ion current measuring method in a device for analysis of plasma processes |
| DE102022108642A1 (de) * | 2022-04-08 | 2023-10-12 | TRUMPF Hüttinger GmbH + Co. KG | Plasmazünderkennungsvorrichtung zum Anschluss an eine Impedanzanpassungsschaltung für ein Plasmaerzeugungssystem |
| CN120637190A (zh) * | 2024-03-11 | 2025-09-12 | 北京北方华创微电子装备有限公司 | 应用于半导体工艺设备的起辉控制方法及半导体工艺设备 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5556549A (en) * | 1994-05-02 | 1996-09-17 | Lsi Logic Corporation | Power control and delivery in plasma processing equipment |
| JPH09260096A (ja) * | 1996-03-15 | 1997-10-03 | Hitachi Ltd | インピーダンス整合方法および装置ならびに半導体製造装置 |
| CN100573827C (zh) | 2001-09-27 | 2009-12-23 | 东京毅力科创株式会社 | 电磁场供给装置及等离子体处理装置 |
| JP4332322B2 (ja) | 2002-06-05 | 2009-09-16 | パール工業株式会社 | 排ガス分解処理用プラズマ発生装置 |
| JP4127488B2 (ja) | 2002-07-03 | 2008-07-30 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| KR100980598B1 (ko) | 2003-11-27 | 2010-09-07 | 가부시키가이샤 다이헨 | 고주파 전력 공급 시스템 |
| EP1971188B1 (en) * | 2005-12-26 | 2015-08-05 | Panasonic Corporation | State detector for detecting operating state of radio-frequency heating apparatus |
| PL2259662T3 (pl) | 2008-03-26 | 2019-10-31 | Kyosan Electric Mfg | Urządzenie wygaszające nietypowe wyładowanie do przyrządu próżniowego |
| WO2010070985A1 (ja) * | 2008-12-15 | 2010-06-24 | 日本電気株式会社 | 電力検出回路、送信装置および電力検出方法 |
| US8440061B2 (en) * | 2009-07-20 | 2013-05-14 | Lam Research Corporation | System and method for plasma arc detection, isolation and prevention |
| PL2416629T3 (pl) | 2009-08-07 | 2021-11-02 | Kyosan Electric Mfg. Co., Ltd. | Sposób sterowania impulsowego mocą o wysokiej częstotliwości oraz urządzenie w postaci zasilacza impulsowego o wysokiej częstotliwości |
| JP2011052279A (ja) * | 2009-09-02 | 2011-03-17 | Mitsubishi Electric Corp | 放電状態検知装置および放電状態検知方法 |
| JP4891384B2 (ja) * | 2009-12-10 | 2012-03-07 | 株式会社新川 | プラズマ発生装置 |
| JP5847496B2 (ja) * | 2011-09-01 | 2016-01-20 | 株式会社日立国際電気 | プラズマ生成用電源装置及びプラズマ生成パラメータ設定方法 |
-
2013
- 2013-11-29 JP JP2013247660A patent/JP5850581B2/ja active Active
- 2013-12-26 PL PL13898096T patent/PL3068197T3/pl unknown
- 2013-12-26 EP EP13898096.6A patent/EP3068197B1/en active Active
- 2013-12-26 KR KR1020167012131A patent/KR101689509B1/ko active Active
- 2013-12-26 US US15/037,609 patent/US9699878B2/en active Active
- 2013-12-26 WO PCT/JP2013/084820 patent/WO2015079595A1/ja not_active Ceased
- 2013-12-26 CN CN201380080864.2A patent/CN105723813B/zh active Active
-
2014
- 2014-02-18 TW TW103105207A patent/TWI549569B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| KR101689509B1 (ko) | 2016-12-23 |
| JP2015106484A (ja) | 2015-06-08 |
| CN105723813A (zh) | 2016-06-29 |
| JP5850581B2 (ja) | 2016-02-03 |
| EP3068197B1 (en) | 2018-05-16 |
| TW201521522A (zh) | 2015-06-01 |
| KR20160056958A (ko) | 2016-05-20 |
| TWI549569B (zh) | 2016-09-11 |
| EP3068197A1 (en) | 2016-09-14 |
| WO2015079595A1 (ja) | 2015-06-04 |
| US20160295675A1 (en) | 2016-10-06 |
| CN105723813B (zh) | 2017-02-22 |
| US9699878B2 (en) | 2017-07-04 |
| EP3068197A4 (en) | 2017-06-07 |
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