PL3279631T3 - Piezorezystywny czujnik ciśnienia wyposażony w rezystor kalibracyjny - Google Patents

Piezorezystywny czujnik ciśnienia wyposażony w rezystor kalibracyjny

Info

Publication number
PL3279631T3
PL3279631T3 PL17182279T PL17182279T PL3279631T3 PL 3279631 T3 PL3279631 T3 PL 3279631T3 PL 17182279 T PL17182279 T PL 17182279T PL 17182279 T PL17182279 T PL 17182279T PL 3279631 T3 PL3279631 T3 PL 3279631T3
Authority
PL
Poland
Prior art keywords
pressure sensor
sensor provided
piezoresistive pressure
calibration resistor
calibration
Prior art date
Application number
PL17182279T
Other languages
English (en)
Inventor
Roberto MAY
Erminio Maria BERSANI
Paolo Pietro SUVIGHI
Original Assignee
Kolektor Microtel S.P.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kolektor Microtel S.P.A. filed Critical Kolektor Microtel S.P.A.
Publication of PL3279631T3 publication Critical patent/PL3279631T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005—Apparatus for calibrating pressure sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
PL17182279T 2016-08-03 2017-07-20 Piezorezystywny czujnik ciśnienia wyposażony w rezystor kalibracyjny PL3279631T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102016000081649A IT201600081649A1 (it) 2016-08-03 2016-08-03 Sensore di pressione piezoresistivo munito di resistore di calibrazione dell’offset
EP17182279.4A EP3279631B1 (en) 2016-08-03 2017-07-20 Piezoresistive pressure sensor provided with a calibration resistor

Publications (1)

Publication Number Publication Date
PL3279631T3 true PL3279631T3 (pl) 2020-11-16

Family

ID=58159271

Family Applications (1)

Application Number Title Priority Date Filing Date
PL17182279T PL3279631T3 (pl) 2016-08-03 2017-07-20 Piezorezystywny czujnik ciśnienia wyposażony w rezystor kalibracyjny

Country Status (5)

Country Link
US (1) US10481026B2 (pl)
EP (1) EP3279631B1 (pl)
CN (1) CN107687915B (pl)
IT (1) IT201600081649A1 (pl)
PL (1) PL3279631T3 (pl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6410105B2 (ja) 2015-09-18 2018-10-24 Smc株式会社 圧力センサ及びその製造方法
JP6340734B2 (ja) * 2015-09-18 2018-06-13 Smc株式会社 圧力センサ
DE102016218211A1 (de) * 2016-09-22 2018-03-22 Robert Bosch Gmbh Drucksensor zur Erfassung eines Drucks eines fluiden Mediums in einem Messraum
US11885704B2 (en) 2020-07-27 2024-01-30 Precision Biomems Corporation Flexible two-dimensional sheet array of electronic sensor devices
EP3971547B1 (en) * 2020-09-21 2024-03-27 Brimind S.r.l. Electronic pressure sensor with improved sealing system
TWI753713B (zh) * 2020-12-21 2022-01-21 財團法人工業技術研究院 具校正功能之壓力感測器及其校正方法
CN113270240B (zh) * 2021-05-17 2022-07-19 深圳聚德寿科技有限公司 一种陶瓷平膜压阻芯片及其制备方法
CN114441069B (zh) * 2021-12-22 2024-08-02 西安近代化学研究所 一种适用于爆炸场下的压阻式压力传感器及其制备方法
CN118891502A (zh) 2022-03-10 2024-11-01 瑞士富巴自动化控制股份有限公司 压力测量单元
US12467802B2 (en) * 2022-10-18 2025-11-11 Te Connectivity Solutions Gmbh Membrane of a sensor with multiple deflectable sections for different ranges of a sensed force or pressure

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3766355A (en) * 1971-08-23 1973-10-16 E Kottkamp Apparatus for use with electron beam welding machines
FR2679662B1 (fr) * 1991-07-26 1994-08-05 Schlumberger Services Petrol Circuit electrique tel qu'un pont de wheatstone pourvu d'une partie d'ajustage de resistance.
CN1024438C (zh) * 1991-08-15 1994-05-04 中国科学院上海光学精密机械研究所 多功能激光调阻机
IT1270894B (it) * 1993-10-07 1997-05-13 Microtel Tecnologie Elettronic Sensore di accelerazione a film spesso,procedimento per la sua fabbricazione e dispositivo di rilevamento di urti utilizzante detto sensore.
US20020073783A1 (en) * 2000-10-18 2002-06-20 Endevco Corporation Pressure sensor
JP2002310826A (ja) * 2001-02-08 2002-10-23 Tgk Co Ltd 圧力センサの調整方法
CN2656972Y (zh) * 2003-08-25 2004-11-17 杨晖 微功耗高精度温度传感器
US7073389B2 (en) * 2003-10-02 2006-07-11 Kulite Semiconductor Products, Inc. Shunt calibration for electronic pressure switches
JP4303161B2 (ja) * 2004-05-25 2009-07-29 株式会社東海理化電機製作所 磁気センサ及び磁気センサの製造方法
CN201154403Y (zh) * 2008-01-28 2008-11-26 齐齐哈尔二机床(集团)有限责任公司 电桥式主轴箱重心补偿装置
CN101526411A (zh) * 2009-01-19 2009-09-09 中国电子科技集团公司第四十八研究所 带自补偿网络的薄膜压力传感器芯体
EP2458359B1 (en) * 2009-07-24 2022-04-27 Rohm Co., Ltd. Semiconductor pressure sensor, pressure sensor device, electronic apparatus, and method for manufacturing semiconductor pressure sensor
GB2474665B (en) * 2009-10-22 2011-10-12 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
CN101862905B (zh) * 2010-05-04 2012-07-25 南京环科电子技术有限公司 陶瓷压力传感器压力芯片零位电阻的激光修调方法
CN103052870B (zh) * 2010-08-30 2014-10-08 Ifm电子股份有限公司 具有诊断功能的电阻式压力测量单元
ITMI20120456A1 (it) * 2012-03-23 2013-09-24 Microtel Tecnologie Elettroniche S P A Sensore di pressione ceramico e relativo metodo di produzione, e trasduttore che incorpora un sensore di pressione ceramico
ITTO20120293A1 (it) * 2012-04-03 2013-10-04 Metallux Sa Procedimento per tarare un elemento di calibrazione, e relativo dispositivo
CN203396534U (zh) * 2013-07-26 2014-01-15 无锡盛迈克传感技术有限公司 压力传感器
DE102013110368A1 (de) * 2013-09-19 2015-03-19 Endress + Hauser Gmbh + Co. Kg Druckmessumformer
CN103557969B (zh) * 2013-11-07 2016-02-24 南京环科电子技术有限公司 可精确修调温漂误差的陶瓷压力传感器芯片及修调系统和修调方法
US9285289B2 (en) * 2013-12-06 2016-03-15 Freescale Semiconductor, Inc. Pressure sensor with built-in calibration capability
US10317297B2 (en) * 2013-12-11 2019-06-11 Melexis Technologies Nv Semiconductor pressure sensor
FR3017211B1 (fr) * 2014-02-05 2016-01-22 Coutier Moulage Gen Ind Dispositif de determination de pression et de temperature, capteur de pression et de temperature comprenant un tel dispositif et procede de fabrication d’un tel dispositif
CN203837866U (zh) * 2014-05-16 2014-09-17 常州曼淇威压力控制技术有限公司 多密封型压力传感器
CN204143275U (zh) * 2014-09-19 2015-02-04 江苏骏龙电力科技股份有限公司 半导体激光器自动温度控制系统
CN204177507U (zh) * 2014-11-04 2015-02-25 徐兴才 一种新型齐平膜压阻式陶瓷压力传感器

Also Published As

Publication number Publication date
CN107687915B (zh) 2021-11-23
US10481026B2 (en) 2019-11-19
EP3279631A1 (en) 2018-02-07
IT201600081649A1 (it) 2018-02-03
US20180038753A1 (en) 2018-02-08
CN107687915A (zh) 2018-02-13
EP3279631B1 (en) 2020-04-08

Similar Documents

Publication Publication Date Title
PL3279631T3 (pl) Piezorezystywny czujnik ciśnienia wyposażony w rezystor kalibracyjny
EP3669151A4 (en) PIEZORESISTIVE SENSOR
SG11201707294XA (en) A resistive microfluidic pressure sensor
EP3566036C0 (en) BLOOD PRESSURE MEASUREMENT SYSTEM USING AN ARRAY OF RESISTIVE FORCE SENSORS
PL3482180T3 (pl) Czujnik siły i/lub nacisku
GB201820244D0 (en) A photoplethhysmorgraphy sensor device
EP3642584B8 (en) Distributed pressure sensing
GB201500472D0 (en) Piezoresistive pressure sensor device
GB2535691B (en) Determining the partial pressure of a gas, calibrating a pressure sensor
GB201412246D0 (en) Pressure sensor device with high sensitivity and high accuracy
GB201507263D0 (en) Symmetrical piezoresistive pressure sensor with stacking ICs
GB201710445D0 (en) A force sensitive resistor
GB2568578B (en) Pressure sensor with improved strain gauge
GB201513623D0 (en) Pressure sensor device with a MEMS piezoresistive element attached to an in-circuit ceramic board
GB2552385B (en) Calibrating position sensor readings
GB2548766B (en) Trampoline comprising multiple movement sensors and a trampoline movement sensor and mount
GB201710443D0 (en) A force sensitive resistor
GB201710444D0 (en) A force sensitive resistor
PL3366931T3 (pl) Tulejka z układem zawierającym czujniki RFID
GB201712907D0 (en) Sensing pressure using a detector-laminate
GB201614674D0 (en) A pressure sensor
EP3529135A4 (en) WHEEL UNIT WITH A POSITION SENSOR
GB2565181B (en) Pressure sensor element with barrier material configured for increased capacitive response
EP3534130A4 (en) PRESSURE SENSOR
EP3562675A4 (en) FLUID BACK PRESSURE DETECTION WITH A STRAIN SENSOR