PL355608A1 - Urządzenie do kontrolowania masowego natężenia przepływu na zasadzie zjawiska Coriolisa - Google Patents

Urządzenie do kontrolowania masowego natężenia przepływu na zasadzie zjawiska Coriolisa

Info

Publication number
PL355608A1
PL355608A1 PL00355608A PL35560800A PL355608A1 PL 355608 A1 PL355608 A1 PL 355608A1 PL 00355608 A PL00355608 A PL 00355608A PL 35560800 A PL35560800 A PL 35560800A PL 355608 A1 PL355608 A1 PL 355608A1
Authority
PL
Poland
Prior art keywords
mass flow
flow controller
coriolis mass
coriolis
controller
Prior art date
Application number
PL00355608A
Other languages
English (en)
Other versions
PL200852B1 (pl
Inventor
Michael J. Barger
Joseph C. Dille
Jeffrey L. Whiteley
Timothy W. Scott
Original Assignee
Emerson Electric Co.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emerson Electric Co. filed Critical Emerson Electric Co.
Publication of PL355608A1 publication Critical patent/PL355608A1/pl
Publication of PL200852B1 publication Critical patent/PL200852B1/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8436—Coriolis or gyroscopic mass flowmeters constructional details signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Signal Processing (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Volume Flow (AREA)
PL355608A 1999-11-01 2000-10-30 Przepływomierz do pomiaru masowego natężenia przepływu z wykorzystaniem siły Coriolisa i urządzenie do pomiaru masowego natężenia przepływu zawierające przepływomierz do pomiaru masowego natężenia przepływu PL200852B1 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/430,881 US6526839B1 (en) 1998-12-08 1999-11-01 Coriolis mass flow controller and capacitive pick off sensor

Publications (2)

Publication Number Publication Date
PL355608A1 true PL355608A1 (pl) 2004-05-04
PL200852B1 PL200852B1 (pl) 2009-02-27

Family

ID=23709469

Family Applications (2)

Application Number Title Priority Date Filing Date
PL99349630A PL195922B1 (pl) 1999-11-01 1999-12-07 Czujnik pojemnościowy do urządzenia mierzącego masowe natężenie przepływu
PL355608A PL200852B1 (pl) 1999-11-01 2000-10-30 Przepływomierz do pomiaru masowego natężenia przepływu z wykorzystaniem siły Coriolisa i urządzenie do pomiaru masowego natężenia przepływu zawierające przepływomierz do pomiaru masowego natężenia przepływu

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PL99349630A PL195922B1 (pl) 1999-11-01 1999-12-07 Czujnik pojemnościowy do urządzenia mierzącego masowe natężenie przepływu

Country Status (14)

Country Link
US (2) US6526839B1 (pl)
EP (1) EP1226407B1 (pl)
JP (3) JP3904926B2 (pl)
KR (3) KR20070012865A (pl)
CN (1) CN1176352C (pl)
AR (3) AR026329A1 (pl)
AU (1) AU778137B2 (pl)
BR (1) BR0015173A (pl)
CA (3) CA2389433C (pl)
MX (1) MXPA02004348A (pl)
MY (1) MY136531A (pl)
PL (2) PL195922B1 (pl)
RU (1) RU2272257C2 (pl)
WO (1) WO2001036918A2 (pl)

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DE102009030904A1 (de) * 2009-06-26 2010-12-30 Krohne Ag Durchflussmessgerät und Verfahren zu dessen Herstellung
US20120197446A1 (en) * 2010-12-01 2012-08-02 Glaudel Stephen P Advanced feed-forward valve-control for a mass flow controller
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GB2539504B (en) * 2015-06-19 2019-04-17 Aqua21 Ltd Absorption Sensor for Measuring Substance Concentration
JP6471078B2 (ja) * 2015-10-26 2019-02-13 日立オートモティブシステムズ株式会社 多結晶材表面の加工方法およびそれを用いて加工された多結晶材の接合方法
JP6876798B2 (ja) 2016-11-30 2021-05-26 マイクロ モーション インコーポレイテッド メータ検証に使用されるテストトーンの温度補償
CN111406243A (zh) * 2017-11-30 2020-07-10 株式会社富士金 流量控制装置
JP7382339B2 (ja) * 2018-03-30 2023-11-16 ラム リサーチ コーポレーション Memsに基づくコリオリ質量流コントローラ
CN108871480B (zh) * 2018-07-04 2021-03-19 韩泽方 动密封铰链管式科里奥利质量流量计
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Also Published As

Publication number Publication date
KR20020049006A (ko) 2002-06-24
EP1226407B1 (en) 2017-08-02
RU2002113168A (ru) 2004-03-27
US6526839B1 (en) 2003-03-04
WO2001036918A3 (en) 2002-03-21
AU1442801A (en) 2001-05-30
CA2389433A1 (en) 2001-05-25
CA2389433C (en) 2007-08-14
CN1415069A (zh) 2003-04-30
AR026329A1 (es) 2003-02-05
AU778137B2 (en) 2004-11-18
JP2007041010A (ja) 2007-02-15
MY136531A (en) 2008-10-31
CN1176352C (zh) 2004-11-17
JP4522985B2 (ja) 2010-08-11
EP1226407A2 (en) 2002-07-31
CA2571653C (en) 2012-05-22
JP3904926B2 (ja) 2007-04-11
AR054942A2 (es) 2007-07-25
WO2001036918A2 (en) 2001-05-25
PL195922B1 (pl) 2007-11-30
PL200852B1 (pl) 2009-02-27
JP2007041009A (ja) 2007-02-15
KR20070012865A (ko) 2007-01-29
CA2571655A1 (en) 2001-05-25
KR100798530B1 (ko) 2008-01-28
US20030140712A1 (en) 2003-07-31
RU2272257C2 (ru) 2006-03-20
KR20070012864A (ko) 2007-01-29
HK1051720A1 (en) 2003-08-15
CA2571653A1 (en) 2001-05-25
AR054943A2 (es) 2007-07-25
BR0015173A (pt) 2002-06-18
JP2003527578A (ja) 2003-09-16
US7032462B2 (en) 2006-04-25
MXPA02004348A (es) 2002-11-07

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