PL3586954T3 - Ulepszony sposób i urządzenie do osadzania powłok na podłożu za pomocą strumienia plazmy pod ciśnieniem atmosferycznym - Google Patents

Ulepszony sposób i urządzenie do osadzania powłok na podłożu za pomocą strumienia plazmy pod ciśnieniem atmosferycznym

Info

Publication number
PL3586954T3
PL3586954T3 PL18179354.8T PL18179354T PL3586954T3 PL 3586954 T3 PL3586954 T3 PL 3586954T3 PL 18179354 T PL18179354 T PL 18179354T PL 3586954 T3 PL3586954 T3 PL 3586954T3
Authority
PL
Poland
Prior art keywords
substrate
atmospheric pressure
improved method
plasma jet
depositing coatings
Prior art date
Application number
PL18179354.8T
Other languages
English (en)
Inventor
Gill SCHELTJENS
Régis HEYBERGER
Malek ALNASSER
Original Assignee
Molecular Plasma Group Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Molecular Plasma Group Sa filed Critical Molecular Plasma Group Sa
Publication of PL3586954T3 publication Critical patent/PL3586954T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
    • B05B15/65—Mounting arrangements for fluid connection of the spraying apparatus or its outlets to flow conduits
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/14—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts
    • B05B15/18—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts for improving resistance to wear, e.g. inserts or coatings; for indicating wear; for handling or replacing worn parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/025—Nozzles having elongated outlets, e.g. slots, for the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder or liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0207—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe
    • B05B13/0214—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe the liquid or other fluent material being applied to the whole periphery of the cross section of the elongated body
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0228—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being rotative
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
PL18179354.8T 2018-06-22 2018-06-22 Ulepszony sposób i urządzenie do osadzania powłok na podłożu za pomocą strumienia plazmy pod ciśnieniem atmosferycznym PL3586954T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18179354.8A EP3586954B1 (en) 2018-06-22 2018-06-22 Improved method and apparatus for atmospheric pressure plasma jet coating deposition on a substrate

Publications (1)

Publication Number Publication Date
PL3586954T3 true PL3586954T3 (pl) 2023-12-27

Family

ID=62750869

Family Applications (1)

Application Number Title Priority Date Filing Date
PL18179354.8T PL3586954T3 (pl) 2018-06-22 2018-06-22 Ulepszony sposób i urządzenie do osadzania powłok na podłożu za pomocą strumienia plazmy pod ciśnieniem atmosferycznym

Country Status (11)

Country Link
US (2) US11767594B2 (pl)
EP (2) EP3586954B1 (pl)
JP (1) JP2021527565A (pl)
KR (1) KR102626649B1 (pl)
CN (2) CN119932534A (pl)
AU (1) AU2019291136A1 (pl)
CA (1) CA3104812A1 (pl)
ES (1) ES2952997T3 (pl)
HU (1) HUE063134T2 (pl)
PL (1) PL3586954T3 (pl)
WO (1) WO2019243631A1 (pl)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3840541A1 (en) * 2019-12-20 2021-06-23 Molecular Plasma Group SA Improved shield for atmospheric pressure plasma jet coating deposition on a substrate
EP3881941A1 (en) 2020-03-17 2021-09-22 Molecular Plasma Group SA Plasma coating method and apparatus for biological surface modification
EP3992330A1 (en) 2020-10-29 2022-05-04 PartiX Powder coating method
AU2021411950A1 (en) 2020-12-30 2023-07-06 Convatec Technologies Inc. Surface treatment system and method for subcutaneous device
KR102492662B1 (ko) * 2021-03-08 2023-01-27 (주)에이피아이 분사 노즐 장치
EP4316213B1 (en) 2021-04-01 2025-05-14 Universiteit Gent A device and method for generating a plasma jet
WO2022248604A1 (en) 2021-05-25 2022-12-01 Deltrian International Sa Method for coating filter media and filter media obtained therefrom
EP4095283A1 (en) 2021-05-25 2022-11-30 Molecular Plasma Group SA Method and system for coating filter media
CN113219588B (zh) * 2021-07-08 2021-09-14 武汉聚合光子技术有限公司 一种光纤合束器的制作方法及装置
TWI845867B (zh) 2021-10-12 2024-06-21 財團法人工業技術研究院 適用於電漿系統的流體導入模組
FR3128398B1 (fr) 2021-10-21 2024-01-26 Hexcel Reinforcements Matériau de renfort comprenant une couche poreuse en un polymère thermoplastique réactif et procédés associés
FR3128399A1 (fr) 2021-10-21 2023-04-28 Hexcel Reinforcements Procédé de fabrication de pièces composites à partir d’un matériau de renfort comprenant une couche poreuse en un polymère thermoplastique réactif et d’une résine thermodurcissable
EP4419315A1 (fr) 2021-10-21 2024-08-28 Hexcel Reinforcements Matériau de renfort comprenant une couche poreuse en un polymère thermoplastique réactif et procédés associés
EP4257250A1 (en) 2022-04-06 2023-10-11 Molecular Plasma Group S.A. Improved atomizer for plasma coating apparatus
CN115522159A (zh) * 2022-10-31 2022-12-27 广东电网有限责任公司广州供电局 干式空心电抗器表面裂纹等离子体喷涂修复装置
EP4412402A1 (en) 2023-02-02 2024-08-07 Molecular Plasma Group SA Plasma coating method and apparatus for profiles
FR3163933A1 (fr) 2024-06-27 2026-01-02 Compagnie Generale Des Etablissements Michelin Procédé d’amélioration de la résistance aux alcalins d’un support

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3914573A (en) * 1971-05-17 1975-10-21 Geotel Inc Coating heat softened particles by projection in a plasma stream of Mach 1 to Mach 3 velocity
US3707615A (en) * 1971-11-12 1972-12-26 Metco Inc Nozzle for a plasma generator
JPS60248234A (ja) * 1984-05-25 1985-12-07 Hitachi Ltd プラズマ粉体処理装置
EP0217399A2 (en) * 1985-10-02 1987-04-08 The Perkin-Elmer Corporation Nozzle assembly for plasma spray gun
JP3566824B2 (ja) * 1996-12-27 2004-09-15 高周波熱錬株式会社 熱プラズマによる加熱処理装置
DE19847774C2 (de) 1998-10-16 2002-10-17 Peter Foernsel Vorrichtung zur Plasmabehandlung von stab- oder fadenförmigem Material
CN1317423C (zh) * 2000-11-14 2007-05-23 积水化学工业株式会社 常压等离子体处理方法及其装置
US7510664B2 (en) * 2001-01-30 2009-03-31 Rapt Industries, Inc. Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
JP2002274812A (ja) * 2001-03-23 2002-09-25 Fujikin Inc 水分発生用反応炉
US20030098367A1 (en) 2001-11-27 2003-05-29 General Electric Company Processes and systems for determining the identity of metal alloys
TW200308187A (en) 2002-04-10 2003-12-16 Dow Corning Ireland Ltd An atmospheric pressure plasma assembly
US20060057016A1 (en) * 2002-05-08 2006-03-16 Devendra Kumar Plasma-assisted sintering
DE50311294D1 (en) 2002-11-19 2009-04-23 Ibeda Sicherheitsgeraete Und G Ystem
CA2546411A1 (en) * 2003-11-18 2003-11-18 Stanislav Begounov Method and device for continuous treatment of the surface of an elongate object
WO2006048650A1 (en) * 2004-11-05 2006-05-11 Dow Corning Ireland Limited Plasma system
EP1689216A1 (en) 2005-02-04 2006-08-09 Vlaamse Instelling Voor Technologisch Onderzoek (Vito) Atmospheric-pressure plasma jet
US7759599B2 (en) * 2005-04-29 2010-07-20 Sulzer Metco (Us), Inc. Interchangeable plasma nozzle interface
JP4682917B2 (ja) 2006-05-30 2011-05-11 パナソニック株式会社 大気圧プラズマ発生方法及び装置
GB2439934A (en) * 2006-07-07 2008-01-16 William Geoffrey Hopkins Laser-assisted spray system and nozzle
ES2534215T3 (es) * 2006-08-30 2015-04-20 Oerlikon Metco Ag, Wohlen Dispositivo de pulverización de plasma y un método para la introducción de un precursor líquido en un sistema de gas de plasma
JP5725688B2 (ja) 2006-11-24 2015-05-27 学校法人トヨタ学園 大気圧プラズマジェット装置
DE102006061435A1 (de) * 2006-12-23 2008-06-26 Leoni Ag Verfahren und Vorrichtung zum Aufspritzen insbesondere einer Leiterbahn, elektrisches Bauteil mit einer Leiterbahn sowie Dosiervorrichtung
US8742282B2 (en) * 2007-04-16 2014-06-03 General Electric Company Ablative plasma gun
CN101619434B (zh) 2009-05-12 2011-04-13 四川大学 悬浮液等离子喷涂制备多孔羟基磷灰石涂层的方法
GB2489493B (en) * 2011-03-31 2013-03-13 Norsk Titanium Components As Method and arrangement for building metallic objects by solid freeform fabrication
KR101301967B1 (ko) * 2011-05-20 2013-08-30 한국에너지기술연구원 플라즈마 나노 분말 합성 및 코팅 장치 와 그 방법
US20160030910A1 (en) * 2012-08-17 2016-02-04 SDCmaterials, Inc. High-throughput particle production using a plasma system
CN103533738A (zh) 2013-10-21 2014-01-22 芜湖鼎恒材料技术有限公司 一种等离子体喷枪的喷嘴
GB201409692D0 (en) 2014-05-31 2014-07-16 Element Six Gmbh Thermal spray assembly and method for using it
US11511298B2 (en) 2014-12-12 2022-11-29 Oerlikon Metco (Us) Inc. Corrosion protection for plasma gun nozzles and method of protecting gun nozzles
US20170095929A1 (en) * 2015-10-06 2017-04-06 General Electric Company System for checking calibration of a robotic multi-axis machine
US11241833B2 (en) 2016-03-09 2022-02-08 Universities Space Research Association 3D printed electronics using directional plasma jet

Also Published As

Publication number Publication date
CN119932534A (zh) 2025-05-06
US11767594B2 (en) 2023-09-26
US20210254218A1 (en) 2021-08-19
EP3586954B1 (en) 2023-07-19
EP3586954A1 (en) 2020-01-01
US20230416921A1 (en) 2023-12-28
EP3586954C0 (en) 2023-07-19
HUE063134T2 (hu) 2023-12-28
AU2019291136A1 (en) 2021-01-07
CA3104812A1 (en) 2019-12-26
WO2019243631A1 (en) 2019-12-26
ES2952997T3 (es) 2023-11-07
EP3810318A1 (en) 2021-04-28
KR20210024030A (ko) 2021-03-04
CN112313005A (zh) 2021-02-02
JP2021527565A (ja) 2021-10-14
KR102626649B1 (ko) 2024-01-19

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