PL3602601T3 - Generator plazmy, urządzenie do obróbki plazmy i sposób impulsowego dostarczania energii elektrycznej - Google Patents

Generator plazmy, urządzenie do obróbki plazmy i sposób impulsowego dostarczania energii elektrycznej

Info

Publication number
PL3602601T3
PL3602601T3 PL18715016T PL18715016T PL3602601T3 PL 3602601 T3 PL3602601 T3 PL 3602601T3 PL 18715016 T PL18715016 T PL 18715016T PL 18715016 T PL18715016 T PL 18715016T PL 3602601 T3 PL3602601 T3 PL 3602601T3
Authority
PL
Poland
Prior art keywords
electric power
treatment device
providing electric
pulsed manner
plasma
Prior art date
Application number
PL18715016T
Other languages
English (en)
Inventor
Sebastian Hubertus SCHULZ
Thomas Pernau
Florian NACHBAUER
Felix WALK
Original Assignee
centrotherm international AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by centrotherm international AG filed Critical centrotherm international AG
Publication of PL3602601T3 publication Critical patent/PL3602601T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32146—Amplitude modulation, includes pulsing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32889—Connection or combination with other apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32899—Multiple chambers, e.g. cluster tools
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32944—Arc detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
PL18715016T 2017-03-31 2018-03-29 Generator plazmy, urządzenie do obróbki plazmy i sposób impulsowego dostarczania energii elektrycznej PL3602601T3 (pl)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102017205582 2017-03-31
DE102018204585.2A DE102018204585A1 (de) 2017-03-31 2018-03-26 Plasmagenerator, Plasma-Behandlungsvorrichtung und Verfahren zum gepulsten Bereitstellen von elektrischer Leistung
EP18715016.4A EP3602601B1 (de) 2017-03-31 2018-03-29 Plasmagenerator, plasma-behandlungsvorrichtung und verfahren zum gepulsten bereitstellen von elektrischer leistung
PCT/EP2018/058193 WO2018178289A1 (de) 2017-03-31 2018-03-29 Plasmagenerator, plasma-behandlungsvorrichtung und verfahren zum gepulsten bereitstellen von elektrischer leistung

Publications (1)

Publication Number Publication Date
PL3602601T3 true PL3602601T3 (pl) 2021-10-25

Family

ID=63524659

Family Applications (2)

Application Number Title Priority Date Filing Date
PL18715016T PL3602601T3 (pl) 2017-03-31 2018-03-29 Generator plazmy, urządzenie do obróbki plazmy i sposób impulsowego dostarczania energii elektrycznej
PL21171624.6T PL3879558T3 (pl) 2017-03-31 2018-03-29 Generator plazmy, urządzenie do obróbki plazmy i sposób impulsowego dostarczania energii elektrycznej

Family Applications After (1)

Application Number Title Priority Date Filing Date
PL21171624.6T PL3879558T3 (pl) 2017-03-31 2018-03-29 Generator plazmy, urządzenie do obróbki plazmy i sposób impulsowego dostarczania energii elektrycznej

Country Status (9)

Country Link
US (3) US11355316B2 (pl)
EP (2) EP3879558B1 (pl)
KR (2) KR102838071B1 (pl)
CN (2) CN114709126B (pl)
DE (1) DE102018204585A1 (pl)
MY (1) MY202814A (pl)
PL (2) PL3602601T3 (pl)
TW (1) TWI762613B (pl)
WO (1) WO2018178289A1 (pl)

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DE102018216969A1 (de) * 2018-10-03 2020-04-09 centrotherm international AG Plasma-Behandlungsvorrichtung und Verfahren zum Ausgeben von Pulsen elektischer Leistung an wenigstens eine Prozesskammer
DE102018132700A1 (de) 2018-12-18 2020-06-18 Krones Ag Vorrichtung und Verfahren zum Beschichten und insbesondere Plasmabeschichten von Behältnissen
CN114424447A (zh) * 2019-07-29 2022-04-29 先进工程解决方案全球控股私人有限公司 用于多个负载的脉冲驱动的具有通道偏移的多路复用功率发生器输出
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Also Published As

Publication number Publication date
KR102838071B1 (ko) 2025-07-23
KR20190130019A (ko) 2019-11-20
MY202814A (en) 2024-05-23
CN114709126B (zh) 2025-04-11
DE102018204585A1 (de) 2018-10-04
CN110494949B (zh) 2022-04-29
EP3602601B1 (de) 2021-05-05
EP3879558A1 (de) 2021-09-15
US12087544B2 (en) 2024-09-10
EP3879558C0 (de) 2023-11-22
US20210111001A1 (en) 2021-04-15
US20240429026A1 (en) 2024-12-26
TWI762613B (zh) 2022-05-01
CN114709126A (zh) 2022-07-05
PL3879558T3 (pl) 2024-03-25
US11355316B2 (en) 2022-06-07
EP3602601A1 (de) 2020-02-05
KR20230142821A (ko) 2023-10-11
WO2018178289A1 (de) 2018-10-04
KR102588542B1 (ko) 2023-10-11
TW201904358A (zh) 2019-01-16
CN110494949A (zh) 2019-11-22
US20220254609A1 (en) 2022-08-11
EP3879558B1 (de) 2023-11-22

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