PL3712924T3 - Urządzenie i sposób przekazywania elektronów z próbki do analizatora energii i urządzenie spektrometru elektronów - Google Patents

Urządzenie i sposób przekazywania elektronów z próbki do analizatora energii i urządzenie spektrometru elektronów

Info

Publication number
PL3712924T3
PL3712924T3 PL20163611.5T PL20163611T PL3712924T3 PL 3712924 T3 PL3712924 T3 PL 3712924T3 PL 20163611 T PL20163611 T PL 20163611T PL 3712924 T3 PL3712924 T3 PL 3712924T3
Authority
PL
Poland
Prior art keywords
sample
energy analyzer
electron spectrometer
transfering
electrons
Prior art date
Application number
PL20163611.5T
Other languages
English (en)
Inventor
Gerd Schönhense
Thorsten Kampen
Oliver Schaff
Sven Mähl
Original Assignee
Specs Surface Nano Analysis Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specs Surface Nano Analysis Gmbh filed Critical Specs Surface Nano Analysis Gmbh
Publication of PL3712924T3 publication Critical patent/PL3712924T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0004—Imaging particle spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/061—Ion deflecting means, e.g. ion gates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
PL20163611.5T 2019-03-21 2020-03-17 Urządzenie i sposób przekazywania elektronów z próbki do analizatora energii i urządzenie spektrometru elektronów PL3712924T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102019107327.8A DE102019107327A1 (de) 2019-03-21 2019-03-21 Vorrichtung und Verfahren zum Elektronentransfer von einer Probe zu einem Energieanalysator und Elektronen-Spektrometervorrichtung

Publications (1)

Publication Number Publication Date
PL3712924T3 true PL3712924T3 (pl) 2023-11-27

Family

ID=69845193

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20163611.5T PL3712924T3 (pl) 2019-03-21 2020-03-17 Urządzenie i sposób przekazywania elektronów z próbki do analizatora energii i urządzenie spektrometru elektronów

Country Status (8)

Country Link
US (1) US11328918B2 (pl)
EP (1) EP3712924B1 (pl)
JP (1) JP7577403B2 (pl)
KR (1) KR102865800B1 (pl)
CN (1) CN111739782B (pl)
DE (1) DE102019107327A1 (pl)
PL (1) PL3712924T3 (pl)
TW (1) TW202036653A (pl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3110026B1 (fr) * 2020-05-05 2022-06-10 Commissariat Energie Atomique Source pulsée d’électrons et système d’analyse de surface comprenant une telle source pulsée
US20210398772A1 (en) * 2020-06-17 2021-12-23 Axcelis Technologies, Inc. Tuning apparatus for minimum divergence ion beam
EP4230995A4 (en) 2020-10-15 2024-11-13 ThinkCyte K.K. FLOW CYTOMETER, CELL SORTER, METHOD FOR GENERATING OPTICAL INFORMATION AND PROGRAM
CN112649453B (zh) * 2020-12-09 2021-11-12 北京大学 一种测量待测样品四维电子能量损失谱的方法
SE544610C2 (en) * 2021-01-29 2022-09-20 Scienta Omicron Ab Angle-resolving photoelectron spectrometer and method
DE102021119406B4 (de) 2021-07-27 2023-07-13 GST Gesellschaft für systembezogene Technologieentwicklung mbH Vorrichtung und verfahren zur elektronenoptischen abbildung schneller zeitabhängiger prozesse
SE545152C2 (en) * 2021-09-21 2023-04-18 Scienta Omicron Ab Charged particle spectrometer operable in an angular mode
JP2025010792A (ja) * 2023-07-10 2025-01-23 コニカミノルタ株式会社 測定用光学系及び測光測色装置

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GB8612099D0 (en) * 1986-05-19 1986-06-25 Vg Instr Group Spectrometer
US5506414A (en) * 1993-03-26 1996-04-09 Fisons Plc Charged-particle analyzer
DE19701192C2 (de) 1997-01-15 2000-10-05 Staib Instr Gmbh Vorrichtung und Verfahren zum Betrieb eines Spektrometers mit Energie- und Winkelauflösung
GB9718012D0 (en) * 1997-08-26 1997-10-29 Vg Systems Ltd A spectrometer and method of spectroscopy
DE19929185A1 (de) * 1999-06-25 2001-01-04 Staib Instr Gmbh Vorrichtung und Verfahren zur energie- und winkelaufgelösten Elektronenspektroskopie
JP3360115B2 (ja) * 2000-03-17 2002-12-24 東京大学長 回折面アパチャー透過エネルギー制御方式の角度分解型電子分光器及びこの分光器を用いた分析方法
JP3360114B2 (ja) * 2000-03-17 2002-12-24 東京大学長 角度分解・リターディング独立動作型入射レンズシステムを備えた電子分光器及び分光器を用いた分析方法
DE10252129A1 (de) * 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
JP4092280B2 (ja) * 2003-10-23 2008-05-28 株式会社東芝 荷電ビーム装置および荷電粒子検出方法
DE102005045622B4 (de) 2005-09-23 2009-04-30 GST Gesellschaft für systembezogene Technologieentwicklung mbH Verfahren und Anordnungen zum Nachweis der Elektronen-Spinpolarisation
GB0801663D0 (en) * 2008-01-30 2008-03-05 Krizek Jiri G F Electromagnetic imaging analyzer
KR20090008283A (ko) * 2008-10-27 2009-01-21 멀티빔 시스템즈, 인코퍼레이티드 고전류 밀도 패턴 하전 입자 빔의 생성을 위한 광학계
WO2011019457A1 (en) * 2009-08-11 2011-02-17 Regents Of The University Of California Time-of-flight electron energy analyzer
DE102009044989A1 (de) * 2009-09-24 2011-03-31 Funnemann, Dietmar, Dr. Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen
PL2823504T3 (pl) 2012-03-06 2019-03-29 Scienta Omicron Ab Układ analizatora do spektrometru cząstek
DE102013005173C5 (de) * 2013-03-25 2019-04-04 Johannes Gutenberg-Universität Mainz Messvorrichtung und Verfahren zur Erfassung einer Impulsverteilung geladener Teilchen
JP6104756B2 (ja) * 2013-08-16 2017-03-29 日本電子株式会社 電子分光装置
DE102014019408B4 (de) 2014-12-22 2017-02-09 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Abbildende Energiefiltervorrichtung und Verfahren zu deren Betrieb
TWI722855B (zh) * 2015-03-24 2021-03-21 美商克萊譚克公司 用於具有改良之影像光束穩定性及詢問之帶電粒子顯微鏡之方法及系統
SE539849C2 (en) 2016-05-27 2017-12-19 Mb Scient Ab Electron spectrometer with a displaceable lens
US9997346B1 (en) 2017-06-30 2018-06-12 Mb Scientific Ab Electron spectrometer
DE102017009299C5 (de) * 2017-10-08 2021-04-08 Focus GmbH Geräte zur Elektronenspektroskopie und Oberflächenanalytik Vorrichtung zur Analyse einer Probe mittels Elektronen sowie Verwendung und Verfahren

Also Published As

Publication number Publication date
EP3712924B1 (de) 2023-08-16
US11328918B2 (en) 2022-05-10
CN111739782A (zh) 2020-10-02
KR20200113166A (ko) 2020-10-06
EP3712924A1 (de) 2020-09-23
CN111739782B (zh) 2025-02-14
KR102865800B1 (ko) 2025-09-26
US20200303177A1 (en) 2020-09-24
JP2020174037A (ja) 2020-10-22
DE102019107327A1 (de) 2020-09-24
JP7577403B2 (ja) 2024-11-05
EP3712924C0 (de) 2023-08-16
TW202036653A (zh) 2020-10-01

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