PL377259A1 - Sposób osadzania DLC na podłożu - Google Patents

Sposób osadzania DLC na podłożu

Info

Publication number
PL377259A1
PL377259A1 PL377259A PL37725904A PL377259A1 PL 377259 A1 PL377259 A1 PL 377259A1 PL 377259 A PL377259 A PL 377259A PL 37725904 A PL37725904 A PL 37725904A PL 377259 A1 PL377259 A1 PL 377259A1
Authority
PL
Poland
Prior art keywords
substrate
depositing dlc
dlc
depositing
Prior art date
Application number
PL377259A
Other languages
English (en)
Other versions
PL211099B1 (pl
Inventor
Vijayen S. Veerasamy
Scott V. Thomsen
Original Assignee
Guardian Industries Corp.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guardian Industries Corp. filed Critical Guardian Industries Corp.
Publication of PL377259A1 publication Critical patent/PL377259A1/pl
Publication of PL211099B1 publication Critical patent/PL211099B1/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
PL377259A 2003-02-06 2004-02-04 Sposób formowania warstwy zawierającej węgiel typu diamentu (DLC) na podłożu, wyrób powlekany obejmujący węgiel typu diamentu DLC i sposób wytwarzania wyrobu powlekanego PL211099B1 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/359,298 US6878404B2 (en) 2003-02-06 2003-02-06 Method of depositing DLC on substrate

Publications (2)

Publication Number Publication Date
PL377259A1 true PL377259A1 (pl) 2006-01-23
PL211099B1 PL211099B1 (pl) 2012-04-30

Family

ID=32823799

Family Applications (1)

Application Number Title Priority Date Filing Date
PL377259A PL211099B1 (pl) 2003-02-06 2004-02-04 Sposób formowania warstwy zawierającej węgiel typu diamentu (DLC) na podłożu, wyrób powlekany obejmujący węgiel typu diamentu DLC i sposób wytwarzania wyrobu powlekanego

Country Status (5)

Country Link
US (1) US6878404B2 (pl)
EP (1) EP1595004A4 (pl)
CA (1) CA2513935C (pl)
PL (1) PL211099B1 (pl)
WO (1) WO2004071981A2 (pl)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6261693B1 (en) * 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6827977B2 (en) * 2002-03-07 2004-12-07 Guardian Industries Corp. Method of making window unit including diamond-like carbon (DLC) coating
US7060322B2 (en) * 2003-09-02 2006-06-13 Guardian Industries Corp. Method of making heat treatable coated article with diamond-like carbon (DLC) coating
JP2006107607A (ja) * 2004-10-05 2006-04-20 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及びその製造方法
JP2006107673A (ja) * 2004-10-08 2006-04-20 Shinka Jitsugyo Kk 磁気ヘッド及びその製造方法、並びにヘッドサスペンションアセンブリ
CN101058894B (zh) * 2006-04-19 2010-08-25 鸿富锦精密工业（深圳）有限公司 去除类金刚石碳膜的方法
TWI320432B (en) * 2006-06-16 2010-02-11 Hon Hai Prec Ind Co Ltd Apparatus and method for synthesizing carbon nanotube film
DE102006029415B4 (de) * 2006-06-27 2023-07-06 Schaeffler Technologies AG & Co. KG Verschleißfeste Beschichtung sowie Herstellverfahren hierfür
US7632543B2 (en) * 2006-12-05 2009-12-15 Guardian Industries Corp. Method of making IG window unit and forming silicon oxide based hydrophilic coating using chlorosilane vapor deposition
US8029875B2 (en) 2007-05-23 2011-10-04 Southwest Research Institute Plasma immersion ion processing for coating of hollow substrates
US9175381B2 (en) * 2008-07-09 2015-11-03 Southwest Research Institute Processing tubular surfaces using double glow discharge
JP2012523677A (ja) * 2009-04-13 2012-10-04 アプライド マテリアルズ インコーポレイテッド 金属化カーボンナノチューブおよびナノファイバを含む複合材料
US8753725B2 (en) 2011-03-11 2014-06-17 Southwest Research Institute Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode
US9121540B2 (en) 2012-11-21 2015-09-01 Southwest Research Institute Superhydrophobic compositions and coating process for the internal surface of tubular structures
CN108315701A (zh) * 2017-01-16 2018-07-24 中国南玻集团股份有限公司 镀膜基材以及离子束源沉积制备镀膜基材的方法
EP3658702A1 (de) 2017-07-26 2020-06-03 Saint-Gobain Glass France Temperbare beschichtungen mit diamantähnlichem kohlenstoff
CN110914468A (zh) 2017-07-26 2020-03-24 法国圣戈班玻璃厂 借助pecvd磁控管法用类金刚石碳进行涂覆
FR3124805B1 (fr) 2021-06-30 2024-03-22 Saint Gobain Substrat revêtu d’au moins une couche de carbone de type diamant protégée par une couche temporaire à base de germanium ou à base d’oxyde de germanium
WO2023161080A1 (de) 2022-02-23 2023-08-31 Saint-Gobain Glass France Verfahren zur herstellung eines mit einer diamantähnlichen beschichtung versehenen wärmebehandelten substrats
WO2023198554A1 (de) 2022-04-11 2023-10-19 Saint-Gobain Glass France Verglasung mit kommunikationsfenster für sensoren und kamerasysteme
WO2024008565A1 (de) 2022-07-04 2024-01-11 Saint-Gobain Glass France Verbundscheibe für eine projektionsanordnung
DE202023103844U1 (de) 2023-07-11 2023-08-01 Saint-Gobain Glass France Beheizbare Verbundscheibe
CN122055337A (zh) 2023-10-19 2026-05-15 法国圣戈班安全玻璃公司 具有改进的抗划伤涂层的基材
WO2025214852A1 (de) 2024-04-12 2025-10-16 Saint-Gobain Sekurit France Verbundscheibe für eine projektionsanordnung

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104684A (en) * 1990-05-25 1992-04-14 Massachusetts Institute Of Technology Ion beam induced deposition of metals
US5455081A (en) 1990-09-25 1995-10-03 Nippon Steel Corporation Process for coating diamond-like carbon film and coated thin strip
US5637353A (en) * 1990-09-27 1997-06-10 Monsanto Company Abrasion wear resistant coated substrate product
BR9204887A (pt) * 1991-12-23 1993-06-29 Comision Nac Energ Atom Processo para formar sobre um substrato solido uma pelicula de propriedade similares as do diamante,os corpos solidos assim revestidos e a pelicula revestida assim obtida
US5455258A (en) * 1993-01-06 1995-10-03 Ciba-Geigy Corporation Arylsulfonamido-substituted hydroxamic acids
US5846649A (en) * 1994-03-03 1998-12-08 Monsanto Company Highly durable and abrasion-resistant dielectric coatings for lenses
US5618619A (en) * 1994-03-03 1997-04-08 Monsanto Company Highly abrasion-resistant, flexible coatings for soft substrates
US5635258A (en) * 1995-04-03 1997-06-03 National Science Council Method of forming a boron-doped diamond film by chemical vapor deposition
US6020677A (en) * 1996-11-13 2000-02-01 E. I. Du Pont De Nemours And Company Carbon cone and carbon whisker field emitters
US6086962A (en) * 1997-07-25 2000-07-11 Diamonex, Incorporated Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source
US6046758A (en) * 1998-03-10 2000-04-04 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
US6338901B1 (en) * 1999-05-03 2002-01-15 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6312808B1 (en) * 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6335086B1 (en) * 1999-05-03 2002-01-01 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6280834B1 (en) * 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
US6261693B1 (en) * 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6277480B1 (en) * 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6461731B1 (en) * 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
JP4102515B2 (ja) * 1999-05-24 2008-06-18 株式会社日立グローバルストレージテクノロジーズ 磁気記録媒体、この製造方法及びこの媒体を用いた磁気記憶装置
US6761736B1 (en) * 1999-11-10 2004-07-13 St. Jude Medical, Inc. Medical article with a diamond-like carbon coated polymer
US6660340B1 (en) * 2000-02-08 2003-12-09 Epion Corporation Diamond-like carbon film with enhanced adhesion

Also Published As

Publication number Publication date
US20040157058A1 (en) 2004-08-12
EP1595004A4 (en) 2008-04-23
CA2513935A1 (en) 2004-08-26
CA2513935C (en) 2012-12-18
EP1595004A2 (en) 2005-11-16
PL211099B1 (pl) 2012-04-30
WO2004071981A2 (en) 2004-08-26
US6878404B2 (en) 2005-04-12
WO2004071981A3 (en) 2005-03-17

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Legal Events

Date Code Title Description
LAPS Decisions on the lapse of the protection rights

Effective date: 20140204