PL385484A1 - Method and system for heating of plasma - Google Patents

Method and system for heating of plasma

Info

Publication number
PL385484A1
PL385484A1 PL385484A PL38548408A PL385484A1 PL 385484 A1 PL385484 A1 PL 385484A1 PL 385484 A PL385484 A PL 385484A PL 38548408 A PL38548408 A PL 38548408A PL 385484 A1 PL385484 A1 PL 385484A1
Authority
PL
Poland
Prior art keywords
plasma
heating
Prior art date
Application number
PL385484A
Other languages
Polish (pl)
Other versions
PL221507B1 (en
Inventor
Krzysztof Jankowski
Andrzej Ramsza
Edward Reszke
Original Assignee
Edward Reszke
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edward Reszke filed Critical Edward Reszke
Priority to PL385484A priority Critical patent/PL221507B1/en
Publication of PL385484A1 publication Critical patent/PL385484A1/en
Publication of PL221507B1 publication Critical patent/PL221507B1/en

Links

PL385484A 2008-06-20 2008-06-20 Method and system for heating of plasma PL221507B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL385484A PL221507B1 (en) 2008-06-20 2008-06-20 Method and system for heating of plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL385484A PL221507B1 (en) 2008-06-20 2008-06-20 Method and system for heating of plasma

Publications (2)

Publication Number Publication Date
PL385484A1 true PL385484A1 (en) 2009-12-21
PL221507B1 PL221507B1 (en) 2016-04-29

Family

ID=42988686

Family Applications (1)

Application Number Title Priority Date Filing Date
PL385484A PL221507B1 (en) 2008-06-20 2008-06-20 Method and system for heating of plasma

Country Status (1)

Country Link
PL (1) PL221507B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013055241A1 (en) 2011-10-13 2013-04-18 Instytut Optyki Stosowanej Electrode cooling system in a multi-electrode microwave plasma excitation source
EP3449699B1 (en) * 2016-04-05 2021-12-15 Apan Instruments Sp. z o.o. Method of use of a microwave electromagnetic field shaping adapter, which heats a toroidal plasma discharge

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013055241A1 (en) 2011-10-13 2013-04-18 Instytut Optyki Stosowanej Electrode cooling system in a multi-electrode microwave plasma excitation source
CN103891418A (en) * 2011-10-13 2014-06-25 应用光学研究所 Electrode cooling system in a multi-electrode microwave plasma excitation source
US8829770B2 (en) 2011-10-13 2014-09-09 Instytut Optyki Stosowanej Electrode cooling system in a multi-electrode microwave plasma excitation source
CN103891418B (en) * 2011-10-13 2015-12-09 应用光学研究所 Electrode cooling system in the microwave plasma excitated source of multi-electrode
EP3449699B1 (en) * 2016-04-05 2021-12-15 Apan Instruments Sp. z o.o. Method of use of a microwave electromagnetic field shaping adapter, which heats a toroidal plasma discharge
AU2017246939B2 (en) * 2016-04-05 2022-05-12 Apan Instruments SP. Z O.O. An adapter shaping electromagnetic field, which heats toroidal plasma discharge at microwave frequency

Also Published As

Publication number Publication date
PL221507B1 (en) 2016-04-29

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