PL396389A1 - Sposób nanoszenia warstw w wielotargetowym układzie do rozpylania magnetronowego - Google Patents

Sposób nanoszenia warstw w wielotargetowym układzie do rozpylania magnetronowego

Info

Publication number
PL396389A1
PL396389A1 PL396389A PL39638911A PL396389A1 PL 396389 A1 PL396389 A1 PL 396389A1 PL 396389 A PL396389 A PL 396389A PL 39638911 A PL39638911 A PL 39638911A PL 396389 A1 PL396389 A1 PL 396389A1
Authority
PL
Poland
Prior art keywords
magnetron sputtering
layer application
sputtering system
target magnetron
target
Prior art date
Application number
PL396389A
Other languages
English (en)
Other versions
PL221077B1 (pl
Inventor
Jarosław Domaradzki
Danuta Kaczmarek
Bogdan Adamiak
Jerzy Dora
Sławomir Maguda
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL396389A priority Critical patent/PL221077B1/pl
Publication of PL396389A1 publication Critical patent/PL396389A1/pl
Publication of PL221077B1 publication Critical patent/PL221077B1/pl

Links

PL396389A 2011-09-20 2011-09-20 Sposób nanoszenia warstw w wielotargetowym układzie do rozpylania magnetronowego PL221077B1 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL396389A PL221077B1 (pl) 2011-09-20 2011-09-20 Sposób nanoszenia warstw w wielotargetowym układzie do rozpylania magnetronowego

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL396389A PL221077B1 (pl) 2011-09-20 2011-09-20 Sposób nanoszenia warstw w wielotargetowym układzie do rozpylania magnetronowego

Publications (2)

Publication Number Publication Date
PL396389A1 true PL396389A1 (pl) 2012-04-23
PL221077B1 PL221077B1 (pl) 2016-02-29

Family

ID=46002834

Family Applications (1)

Application Number Title Priority Date Filing Date
PL396389A PL221077B1 (pl) 2011-09-20 2011-09-20 Sposób nanoszenia warstw w wielotargetowym układzie do rozpylania magnetronowego

Country Status (1)

Country Link
PL (1) PL221077B1 (pl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107245701A (zh) * 2017-06-26 2017-10-13 广东振华科技股份有限公司 一种多靶材磁控溅射卷绕镀膜机及镀膜方法
PL445255A1 (pl) 2023-06-17 2024-12-23 Sieć Badawcza Łukasiewicz - Poznański Instytut Technologiczny Sposób wytwarzania wieloskładnikowej tarczy do rozpylania magnetronowego i zestaw narzędziowy do wytwarzania wieloskładnikowej tarczy oraz wieloskładnikowa tarcza magnetronowa i jej zastosowanie do wytwarzania powłoki ochronnej

Also Published As

Publication number Publication date
PL221077B1 (pl) 2016-02-29

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