PL399438A1 - Zespolony detektor kierunkowy elektronów - Google Patents

Zespolony detektor kierunkowy elektronów

Info

Publication number
PL399438A1
PL399438A1 PL399438A PL39943812A PL399438A1 PL 399438 A1 PL399438 A1 PL 399438A1 PL 399438 A PL399438 A PL 399438A PL 39943812 A PL39943812 A PL 39943812A PL 399438 A1 PL399438 A1 PL 399438A1
Authority
PL
Poland
Prior art keywords
directional detector
combined electron
electron directional
combined
detector
Prior art date
Application number
PL399438A
Other languages
English (en)
Other versions
PL224742B1 (pl
Inventor
Witold Slówko
Original Assignee
Politechnika Wroclawska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wroclawska filed Critical Politechnika Wroclawska
Priority to PL399438A priority Critical patent/PL224742B1/pl
Publication of PL399438A1 publication Critical patent/PL399438A1/pl
Priority to EP13460034.5A priority patent/EP2672504A3/en
Publication of PL224742B1 publication Critical patent/PL224742B1/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
PL399438A 2012-06-06 2012-06-06 Zespolony detektor kierunkowy elektronów PL224742B1 (pl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL399438A PL224742B1 (pl) 2012-06-06 2012-06-06 Zespolony detektor kierunkowy elektronów
EP13460034.5A EP2672504A3 (en) 2012-06-06 2013-05-27 Combined directional electron detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL399438A PL224742B1 (pl) 2012-06-06 2012-06-06 Zespolony detektor kierunkowy elektronów

Publications (2)

Publication Number Publication Date
PL399438A1 true PL399438A1 (pl) 2013-03-04
PL224742B1 PL224742B1 (pl) 2017-01-31

Family

ID=47846496

Family Applications (1)

Application Number Title Priority Date Filing Date
PL399438A PL224742B1 (pl) 2012-06-06 2012-06-06 Zespolony detektor kierunkowy elektronów

Country Status (2)

Country Link
EP (1) EP2672504A3 (pl)
PL (1) PL224742B1 (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106680305B (zh) * 2016-11-23 2023-08-04 聚束科技（北京）有限公司 一种真空气氛处理装置、样品观测系统及方法
CN113707522B (zh) * 2021-08-26 2022-07-08 北京中科科仪股份有限公司 固定装置、扫描电镜和电子束曝光机
CN119064640B (zh) * 2024-09-06 2025-09-09 中国科学院近代物理研究所 一种提高三维原子探针图像重构精度系统和方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
WO2001041180A1 (de) * 1999-11-29 2001-06-07 Leo Elektronenmikroskopie Gmbh Detektor für ein rasterelektronenmikroskop mit variablem druck und rasterelektronenmikroskop mit einem solchen detektor
JP4636897B2 (ja) * 2005-02-18 2011-02-23 株式会社日立ハイテクサイエンスシステムズ 走査電子顕微鏡
PL226521B1 (pl) 2011-08-23 2017-08-31 Politechnika Wroclawska Zespół kierunkowej detekcji elektronów

Also Published As

Publication number Publication date
EP2672504A3 (en) 2015-04-15
EP2672504A2 (en) 2013-12-11
PL224742B1 (pl) 2017-01-31

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