PL4045884T3 - Czujnik ciśnienia - Google Patents

Czujnik ciśnienia

Info

Publication number
PL4045884T3
PL4045884T3 PL20804676.3T PL20804676T PL4045884T3 PL 4045884 T3 PL4045884 T3 PL 4045884T3 PL 20804676 T PL20804676 T PL 20804676T PL 4045884 T3 PL4045884 T3 PL 4045884T3
Authority
PL
Poland
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
PL20804676.3T
Other languages
English (en)
Inventor
Massimo Monichino
Original Assignee
Metallux Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metallux Sa filed Critical Metallux Sa
Publication of PL4045884T3 publication Critical patent/PL4045884T3/pl

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618Overload protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0045Diaphragm associated with a buried cavity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/006Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
    • G01L9/0064Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm the element and the diaphragm being in intimate contact
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/007Transmitting or indicating the displacement of flexible diaphragms using variations in inductance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
PL20804676.3T 2019-10-18 2020-10-15 Czujnik ciśnienia PL4045884T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102019000019274A IT201900019274A1 (it) 2019-10-18 2019-10-18 Sensore di pressione
PCT/IB2020/059707 WO2021074846A1 (en) 2019-10-18 2020-10-15 Pressure sensor

Publications (1)

Publication Number Publication Date
PL4045884T3 true PL4045884T3 (pl) 2025-04-07

Family

ID=69701423

Family Applications (1)

Application Number Title Priority Date Filing Date
PL20804676.3T PL4045884T3 (pl) 2019-10-18 2020-10-15 Czujnik ciśnienia

Country Status (11)

Country Link
US (1) US12152953B2 (pl)
EP (1) EP4045884B1 (pl)
JP (1) JP7681014B2 (pl)
KR (1) KR20220082057A (pl)
CN (1) CN114787603B (pl)
AU (1) AU2020365569B2 (pl)
BR (1) BR112022007148A2 (pl)
CA (1) CA3158022A1 (pl)
IT (1) IT201900019274A1 (pl)
PL (1) PL4045884T3 (pl)
WO (1) WO2021074846A1 (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11867574B1 (en) 2023-05-23 2024-01-09 Sanctuary Cognitive Systems Corporation Fluidic tactile sensor
DE102023209056A1 (de) 2023-09-19 2025-03-20 Robert Bosch Gesellschaft mit beschränkter Haftung Drucksensor zur Erfassung des Drucks eines Messmediums und Dichtungselement für einen solchen Drucksensor
CN120576427B (zh) * 2025-06-10 2025-11-11 东莞市莞大节能技术有限公司 一种生产车间用节能空调及系统

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5581038A (en) * 1994-04-04 1996-12-03 Sentir, Inc. Pressure measurement apparatus having a reverse mounted transducer and overpressure guard
JPH09329516A (ja) * 1996-06-06 1997-12-22 Hitachi Ltd 半導体圧力センサ及びこれを用いた複合伝送器
DE10221219B4 (de) * 2002-05-13 2007-06-28 Ifm Electronic Gmbh Drucksensor
CN101268350B (zh) * 2005-07-22 2012-11-28 意法半导体股份有限公司 带有双测量刻度和高满刻度值的集成式压力传感器
WO2007032032A1 (en) * 2005-09-16 2007-03-22 Stmicroelectronics S.R.L. Pressure sensor having a high full-scale value with package thereof
ITTO20060906A1 (it) 2006-12-20 2008-06-21 Eltek Spa Dispositivo sensore di pressione
EP2095545A1 (en) 2006-12-23 2009-09-02 Telefonaktiebolaget LM Ericsson (PUBL) Signal processor for compensating for optical fiber chromatic dispersion
IT1394791B1 (it) * 2009-05-20 2012-07-13 Metallux Sa Sensore di pressione
JP5897940B2 (ja) * 2012-03-14 2016-04-06 アズビル株式会社 圧力センサチップ
DE102012109587A1 (de) * 2012-10-09 2014-04-10 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor und Verfahren zu seiner Herstellung
ITTO20121130A1 (it) * 2012-12-21 2014-06-22 Metallux Sa Sensore di pressione
CN104272073B (zh) * 2013-07-17 2016-06-22 株式会社和广 力传感器
ITUB20150460A1 (it) * 2015-04-16 2016-10-16 Metallux Sa Sensore per la rilevazione di una o piu' grandezze di un fluido, particolarmente un sensore di pressione
CN106197776B (zh) * 2015-05-27 2019-11-05 意法半导体股份有限公司 压力传感器、压力测量设备、制动系统和测量压力的方法
CA3021078C (en) * 2016-04-11 2024-02-13 The Alfred E. Mann Foundation For Scientific Research Pressure sensors with tensioned membranes
JP6769741B2 (ja) * 2016-05-20 2020-10-14 Nissha株式会社 半導体センサ
DE102016216974A1 (de) * 2016-08-11 2018-02-15 Robert Bosch Gmbh Druckmesszelle und Verfahren zum Beschichten und Kontaktieren eines Trägers einer Druckmesszelle
US10548492B2 (en) * 2016-12-08 2020-02-04 MEAS Switzerland S.a.r.l. Pressure sensor
US11385118B2 (en) * 2018-12-07 2022-07-12 Vitesco Technologies USA, LLC Pressure sensor with external vertical electrical interconnection system

Also Published As

Publication number Publication date
US20220381634A1 (en) 2022-12-01
EP4045884A1 (en) 2022-08-24
KR20220082057A (ko) 2022-06-16
WO2021074846A1 (en) 2021-04-22
AU2020365569B2 (en) 2025-02-27
CN114787603B (zh) 2024-11-29
JP2022553018A (ja) 2022-12-21
CA3158022A1 (en) 2021-04-22
BR112022007148A2 (pt) 2022-09-20
JP7681014B2 (ja) 2025-05-21
IT201900019274A1 (it) 2021-04-18
US12152953B2 (en) 2024-11-26
EP4045884B1 (en) 2024-12-25
CN114787603A (zh) 2022-07-22
AU2020365569A1 (en) 2022-05-05

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