PL4045884T3 - Czujnik ciśnienia - Google Patents
Czujnik ciśnieniaInfo
- Publication number
- PL4045884T3 PL4045884T3 PL20804676.3T PL20804676T PL4045884T3 PL 4045884 T3 PL4045884 T3 PL 4045884T3 PL 20804676 T PL20804676 T PL 20804676T PL 4045884 T3 PL4045884 T3 PL 4045884T3
- Authority
- PL
- Poland
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0045—Diaphragm associated with a buried cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
- G01L9/0064—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm the element and the diaphragm being in intimate contact
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/007—Transmitting or indicating the displacement of flexible diaphragms using variations in inductance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT102019000019274A IT201900019274A1 (it) | 2019-10-18 | 2019-10-18 | Sensore di pressione |
| PCT/IB2020/059707 WO2021074846A1 (en) | 2019-10-18 | 2020-10-15 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL4045884T3 true PL4045884T3 (pl) | 2025-04-07 |
Family
ID=69701423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL20804676.3T PL4045884T3 (pl) | 2019-10-18 | 2020-10-15 | Czujnik ciśnienia |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US12152953B2 (pl) |
| EP (1) | EP4045884B1 (pl) |
| JP (1) | JP7681014B2 (pl) |
| KR (1) | KR20220082057A (pl) |
| CN (1) | CN114787603B (pl) |
| AU (1) | AU2020365569B2 (pl) |
| BR (1) | BR112022007148A2 (pl) |
| CA (1) | CA3158022A1 (pl) |
| IT (1) | IT201900019274A1 (pl) |
| PL (1) | PL4045884T3 (pl) |
| WO (1) | WO2021074846A1 (pl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11867574B1 (en) | 2023-05-23 | 2024-01-09 | Sanctuary Cognitive Systems Corporation | Fluidic tactile sensor |
| DE102023209056A1 (de) | 2023-09-19 | 2025-03-20 | Robert Bosch Gesellschaft mit beschränkter Haftung | Drucksensor zur Erfassung des Drucks eines Messmediums und Dichtungselement für einen solchen Drucksensor |
| CN120576427B (zh) * | 2025-06-10 | 2025-11-11 | 东莞市莞大节能技术有限公司 | 一种生产车间用节能空调及系统 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5581038A (en) * | 1994-04-04 | 1996-12-03 | Sentir, Inc. | Pressure measurement apparatus having a reverse mounted transducer and overpressure guard |
| JPH09329516A (ja) * | 1996-06-06 | 1997-12-22 | Hitachi Ltd | 半導体圧力センサ及びこれを用いた複合伝送器 |
| DE10221219B4 (de) * | 2002-05-13 | 2007-06-28 | Ifm Electronic Gmbh | Drucksensor |
| CN101268350B (zh) * | 2005-07-22 | 2012-11-28 | 意法半导体股份有限公司 | 带有双测量刻度和高满刻度值的集成式压力传感器 |
| WO2007032032A1 (en) * | 2005-09-16 | 2007-03-22 | Stmicroelectronics S.R.L. | Pressure sensor having a high full-scale value with package thereof |
| ITTO20060906A1 (it) | 2006-12-20 | 2008-06-21 | Eltek Spa | Dispositivo sensore di pressione |
| EP2095545A1 (en) | 2006-12-23 | 2009-09-02 | Telefonaktiebolaget LM Ericsson (PUBL) | Signal processor for compensating for optical fiber chromatic dispersion |
| IT1394791B1 (it) * | 2009-05-20 | 2012-07-13 | Metallux Sa | Sensore di pressione |
| JP5897940B2 (ja) * | 2012-03-14 | 2016-04-06 | アズビル株式会社 | 圧力センサチップ |
| DE102012109587A1 (de) * | 2012-10-09 | 2014-04-10 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor und Verfahren zu seiner Herstellung |
| ITTO20121130A1 (it) * | 2012-12-21 | 2014-06-22 | Metallux Sa | Sensore di pressione |
| CN104272073B (zh) * | 2013-07-17 | 2016-06-22 | 株式会社和广 | 力传感器 |
| ITUB20150460A1 (it) * | 2015-04-16 | 2016-10-16 | Metallux Sa | Sensore per la rilevazione di una o piu' grandezze di un fluido, particolarmente un sensore di pressione |
| CN106197776B (zh) * | 2015-05-27 | 2019-11-05 | 意法半导体股份有限公司 | 压力传感器、压力测量设备、制动系统和测量压力的方法 |
| CA3021078C (en) * | 2016-04-11 | 2024-02-13 | The Alfred E. Mann Foundation For Scientific Research | Pressure sensors with tensioned membranes |
| JP6769741B2 (ja) * | 2016-05-20 | 2020-10-14 | Nissha株式会社 | 半導体センサ |
| DE102016216974A1 (de) * | 2016-08-11 | 2018-02-15 | Robert Bosch Gmbh | Druckmesszelle und Verfahren zum Beschichten und Kontaktieren eines Trägers einer Druckmesszelle |
| US10548492B2 (en) * | 2016-12-08 | 2020-02-04 | MEAS Switzerland S.a.r.l. | Pressure sensor |
| US11385118B2 (en) * | 2018-12-07 | 2022-07-12 | Vitesco Technologies USA, LLC | Pressure sensor with external vertical electrical interconnection system |
-
2019
- 2019-10-18 IT IT102019000019274A patent/IT201900019274A1/it unknown
-
2020
- 2020-10-15 US US17/754,963 patent/US12152953B2/en active Active
- 2020-10-15 CN CN202080087884.2A patent/CN114787603B/zh active Active
- 2020-10-15 WO PCT/IB2020/059707 patent/WO2021074846A1/en not_active Ceased
- 2020-10-15 KR KR1020227016422A patent/KR20220082057A/ko active Pending
- 2020-10-15 EP EP20804676.3A patent/EP4045884B1/en active Active
- 2020-10-15 PL PL20804676.3T patent/PL4045884T3/pl unknown
- 2020-10-15 CA CA3158022A patent/CA3158022A1/en active Pending
- 2020-10-15 AU AU2020365569A patent/AU2020365569B2/en active Active
- 2020-10-15 JP JP2022523128A patent/JP7681014B2/ja active Active
- 2020-10-15 BR BR112022007148A patent/BR112022007148A2/pt not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| US20220381634A1 (en) | 2022-12-01 |
| EP4045884A1 (en) | 2022-08-24 |
| KR20220082057A (ko) | 2022-06-16 |
| WO2021074846A1 (en) | 2021-04-22 |
| AU2020365569B2 (en) | 2025-02-27 |
| CN114787603B (zh) | 2024-11-29 |
| JP2022553018A (ja) | 2022-12-21 |
| CA3158022A1 (en) | 2021-04-22 |
| BR112022007148A2 (pt) | 2022-09-20 |
| JP7681014B2 (ja) | 2025-05-21 |
| IT201900019274A1 (it) | 2021-04-18 |
| US12152953B2 (en) | 2024-11-26 |
| EP4045884B1 (en) | 2024-12-25 |
| CN114787603A (zh) | 2022-07-22 |
| AU2020365569A1 (en) | 2022-05-05 |
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