PL408320A1 - Micromechanical ionization vacuum gauge - Google Patents

Micromechanical ionization vacuum gauge

Info

Publication number
PL408320A1
PL408320A1 PL408320A PL40832014A PL408320A1 PL 408320 A1 PL408320 A1 PL 408320A1 PL 408320 A PL408320 A PL 408320A PL 40832014 A PL40832014 A PL 40832014A PL 408320 A1 PL408320 A1 PL 408320A1
Authority
PL
Poland
Prior art keywords
vacuum gauge
housing
spacer
vacuum
micromechanical
Prior art date
Application number
PL408320A
Other languages
Polish (pl)
Other versions
PL228498B1 (en
Inventor
Tomasz Grzebyk
Anna Górecka-Drzazga
Jan Dziuban
Original Assignee
Politechnika Wrocławska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wrocławska filed Critical Politechnika Wrocławska
Priority to PL408320A priority Critical patent/PL228498B1/en
Publication of PL408320A1 publication Critical patent/PL408320A1/en
Publication of PL228498B1 publication Critical patent/PL228498B1/en

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Abstract

Przedmiotem wynalazku jest mikromechaniczny próżniomierz jonizacyjny, stosowany zwłaszcza do oceny poziomu próżni wewnątrz obudowy próżniowej, w szczególności obudowy mikromechanicznej lub w próżni kosmicznej. Próżniomierz składa się z połączonych kolejno ze sobą i tworzących jednocześnie obudowę próżniomierza współosiowych warstw: pierwszej katody (1), dystansownika dolnego (2), anody (3), dystansownika górnego (4) oraz drugiej katody (5), przy czym pierwsza i druga katoda (1, 5) są ze sobą połączone elektrycznie, ponadto w dystansowniku dolnym (2) i dystansowniku górnym (4) wykonane są współśrodkowe otwory przelotowe, odpowiednio otwór dolny (6) i otwór górny (7), a w anodzie (3) wykonana jest matryca otworów (8) o osiach symetrii równoległych do osi otworów, dolnego (6) i górnego (7), ponadto przynajmniej w jednym dystansowniku (7) wykonany jest przynajmniej jeden kanał (9), łączący komorę roboczą próżniomierza z atmosferą zewnętrzną. Obudowa czujnika jest umieszczona w jednorodnym polu magnetycznym o liniach równoległych do osi obudowy, natomiast do anody (3) przykładany jest potencjał od 200 V do 4 kV względem obu katod (1, 5).The subject of the invention is a micromechanical ionization vacuum gauge, used in particular for assessing the level of vacuum inside a vacuum housing, in particular a micromechanical housing or in a space vacuum. The vacuum gauge consists of coaxial layers connected in succession and simultaneously forming the housing of the vacuum gauge: the first cathode (1), the bottom spacer (2), the anode (3), the top spacer (4) and the second cathode (5), the first and second the cathode (1, 5) are electrically connected to each other, in addition, the bottom spacer (2) and the top spacer (4) have concentric through holes, respectively the bottom hole (6) and the top hole (7), and in the anode (3) there is a matrix of holes (8) with axes of symmetry parallel to the axis of the holes, bottom (6) and top (7), in addition at least one channel (9) is made in at least one spacer (7), connecting the working chamber of the vacuum gauge with the external atmosphere. The sensor housing is placed in a homogeneous magnetic field with lines parallel to the housing axis, while the anode (3) has a potential of 200 V to 4 kV applied to both cathodes (1, 5).

PL408320A 2014-05-26 2014-05-26 Micromechanical ionization vacuum gauge PL228498B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL408320A PL228498B1 (en) 2014-05-26 2014-05-26 Micromechanical ionization vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL408320A PL228498B1 (en) 2014-05-26 2014-05-26 Micromechanical ionization vacuum gauge

Publications (2)

Publication Number Publication Date
PL408320A1 true PL408320A1 (en) 2015-08-03
PL228498B1 PL228498B1 (en) 2018-04-30

Family

ID=53723654

Family Applications (1)

Application Number Title Priority Date Filing Date
PL408320A PL228498B1 (en) 2014-05-26 2014-05-26 Micromechanical ionization vacuum gauge

Country Status (1)

Country Link
PL (1) PL228498B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022111959B4 (en) 2022-05-12 2023-12-21 KETEK GmbH Halbleiter- und Reinraumtechnik Ionization detector and detection method
DE102022005104B4 (en) 2022-05-12 2024-12-12 KETEK GmbH Halbleiter- und Reinraumtechnik ionization detector and detection method

Also Published As

Publication number Publication date
PL228498B1 (en) 2018-04-30

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