PL415366A1 - Czujnik optyczny konfokalny do pomiaru średnic wewnętrznych - Google Patents

Czujnik optyczny konfokalny do pomiaru średnic wewnętrznych

Info

Publication number
PL415366A1
PL415366A1 PL415366A PL41536615A PL415366A1 PL 415366 A1 PL415366 A1 PL 415366A1 PL 415366 A PL415366 A PL 415366A PL 41536615 A PL41536615 A PL 41536615A PL 415366 A1 PL415366 A1 PL 415366A1
Authority
PL
Poland
Prior art keywords
double mirror
inner diameters
double
confocal sensor
optical
Prior art date
Application number
PL415366A
Other languages
English (en)
Other versions
PL227852B1 (pl
Inventor
Tadeusz Kryszczyński
Jerzy Mikucki
Adam Czyżewski
Dariusz Litwin
Jacek Galas
Stefan Sitarek
Original Assignee
Instytut Optyki Stosowanej Im. Prof. Maksymiliana Pluty
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Optyki Stosowanej Im. Prof. Maksymiliana Pluty filed Critical Instytut Optyki Stosowanej Im. Prof. Maksymiliana Pluty
Priority to PL415366A priority Critical patent/PL227852B1/pl
Priority to EP15460127.2A priority patent/EP3182056A1/en
Publication of PL415366A1 publication Critical patent/PL415366A1/pl
Publication of PL227852B1 publication Critical patent/PL227852B1/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Lenses (AREA)

Abstract

Czujnik jest wyposażony w sprzęgacz światłowodowy (9) i element optyczny, rozdzielający wiązkę światła na dwie gałęzie pomiarowe, który stanowi zwierciadło podwójne (2), a w osi optycznej pomiędzy zwierciadłem podwójnym (2) a sprzęgaczem światłowodowym (9) jest umieszczony obiektyw dwustronnie telecentryczny złożony z części chromatycznej (3, 4), usytuowanej po stronie zwierciadła podwójnego (2), z części apochromatycznej (6, 7, 8), usytuowanej po stronie sprzęgacza światłowodowego (9) oraz z przysłony aperturowej (5), usytuowanej w płaszczyznach ogniskowych części chromatycznej (3, 4) i apochromatycznej (6, 7, 8). Ponadto powierzchnie odbijające zwierciadła podwójnego (2) tworzą ze sobą kąt prosty.
PL415366A 2015-12-17 2015-12-17 Czujnik optyczny konfokalny do pomiaru średnic wewnętrznych PL227852B1 (pl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PL415366A PL227852B1 (pl) 2015-12-17 2015-12-17 Czujnik optyczny konfokalny do pomiaru średnic wewnętrznych
EP15460127.2A EP3182056A1 (en) 2015-12-17 2015-12-20 Optical confocal sensor for measurments of inner diameters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL415366A PL227852B1 (pl) 2015-12-17 2015-12-17 Czujnik optyczny konfokalny do pomiaru średnic wewnętrznych

Publications (2)

Publication Number Publication Date
PL415366A1 true PL415366A1 (pl) 2017-06-19
PL227852B1 PL227852B1 (pl) 2018-01-31

Family

ID=55299185

Family Applications (1)

Application Number Title Priority Date Filing Date
PL415366A PL227852B1 (pl) 2015-12-17 2015-12-17 Czujnik optyczny konfokalny do pomiaru średnic wewnętrznych

Country Status (2)

Country Link
EP (1) EP3182056A1 (pl)
PL (1) PL227852B1 (pl)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005059550A1 (de) * 2005-12-13 2007-06-14 Siemens Ag Optische Messvorrichtung zum Vermessen eines Hohlraums
EP2093536B1 (en) * 2006-12-13 2021-01-20 Nikon Corporation Measurement device and measurement method
DE102012212785A1 (de) 2012-07-20 2014-01-23 Robert Bosch Gmbh Optische Messsonde und Verfahren zur optischen Messung von Innen- und Außendurchmessern

Also Published As

Publication number Publication date
EP3182056A1 (en) 2017-06-21
PL227852B1 (pl) 2018-01-31

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