PL416758A1 - Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe - Google Patents

Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe

Info

Publication number
PL416758A1
PL416758A1 PL416758A PL41675816A PL416758A1 PL 416758 A1 PL416758 A1 PL 416758A1 PL 416758 A PL416758 A PL 416758A PL 41675816 A PL41675816 A PL 41675816A PL 416758 A1 PL416758 A1 PL 416758A1
Authority
PL
Poland
Prior art keywords
electromagnetic field
plasma discharge
heats
adapter
toroidal plasma
Prior art date
Application number
PL416758A
Other languages
English (en)
Other versions
PL235377B1 (pl
Inventor
Krzysztof Jankowski
Andrzej Ramsza
Edward Reszke
Original Assignee
Edward Reszke
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edward Reszke filed Critical Edward Reszke
Priority to PL416758A priority Critical patent/PL235377B1/pl
Priority to EP17725371.3A priority patent/EP3449699B1/en
Priority to AU2017246939A priority patent/AU2017246939B2/en
Priority to CA3020093A priority patent/CA3020093A1/en
Priority to PCT/PL2017/000032 priority patent/WO2017176131A1/en
Priority to US16/091,479 priority patent/US12022601B2/en
Priority to JP2018552656A priority patent/JP6873152B2/ja
Publication of PL416758A1 publication Critical patent/PL416758A1/pl
Publication of PL235377B1 publication Critical patent/PL235377B1/pl

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/463—Microwave discharges using antennas or applicators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

Przedmiotem zgłoszenia jest adapter kształtujący mikrofalowe pole elektromagnetyczne, nagrzewające toroidalne wyładowanie plazmowe, przeznaczony do stosowania w palnikach źródeł wzbudzenia plazmy dla spektrometrów. Adapter ma co najmniej dwa elementy kształtujące pole elektromagnetyczne (1), które są osadzone pomiędzy tuleją górną przyłącza mikrofalowego (2) i tuleją dolną przyłącza mikrofalowego (3), przy czym element kształtujący pole elektromagnetyczne (1) jest ustawiony względem tworzącej tulei (2, 3) pod kątem w zakresie od 0 stopni do 90 stopni.
PL416758A 2016-04-05 2016-04-05 Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe PL235377B1 (pl)

Priority Applications (7)

Application Number Priority Date Filing Date Title
PL416758A PL235377B1 (pl) 2016-04-05 2016-04-05 Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe
EP17725371.3A EP3449699B1 (en) 2016-04-05 2017-03-28 Method of use of a microwave electromagnetic field shaping adapter, which heats a toroidal plasma discharge
AU2017246939A AU2017246939B2 (en) 2016-04-05 2017-03-28 An adapter shaping electromagnetic field, which heats toroidal plasma discharge at microwave frequency
CA3020093A CA3020093A1 (en) 2016-04-05 2017-03-28 An adapter shaping electromagnetic field, which heats toroidal plasma discharge at microwave frequency
PCT/PL2017/000032 WO2017176131A1 (en) 2016-04-05 2017-03-28 An adapter shaping electromagnetic field, which heats toroidal plasma discharge at microwave frequency
US16/091,479 US12022601B2 (en) 2016-04-05 2017-03-28 Adapter shaping electromagnetic field, which heats toroidal plasma discharge at microwave frequency
JP2018552656A JP6873152B2 (ja) 2016-04-05 2017-03-28 マイクロ波周波数においてトロイダルプラズマ放電を加熱する電磁場を成形するアダプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL416758A PL235377B1 (pl) 2016-04-05 2016-04-05 Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe

Publications (2)

Publication Number Publication Date
PL416758A1 true PL416758A1 (pl) 2017-10-09
PL235377B1 PL235377B1 (pl) 2020-07-13

Family

ID=58765888

Family Applications (1)

Application Number Title Priority Date Filing Date
PL416758A PL235377B1 (pl) 2016-04-05 2016-04-05 Adapter kształtujący mikrofalowe pole elektromagnetyczne nagrzewające toroidalne wyładowanie plazmowe

Country Status (7)

Country Link
US (1) US12022601B2 (pl)
EP (1) EP3449699B1 (pl)
JP (1) JP6873152B2 (pl)
AU (1) AU2017246939B2 (pl)
CA (1) CA3020093A1 (pl)
PL (1) PL235377B1 (pl)
WO (1) WO2017176131A1 (pl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT523626B1 (de) * 2020-05-22 2021-10-15 Anton Paar Gmbh Hohlleiter-Einkoppeleinheit
EP4089713A1 (en) 2021-05-12 2022-11-16 Analytik Jena GmbH Hybrid mass spectrometry apparatus
EP4089716A1 (en) 2021-05-12 2022-11-16 Analytik Jena GmbH Mass spectrometry apparatus

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2675561B2 (ja) * 1987-12-18 1997-11-12 株式会社日立製作所 プラズマ微量元素分折装置
JP2805009B2 (ja) * 1988-05-11 1998-09-30 株式会社日立製作所 プラズマ発生装置及びプラズマ元素分析装置
JPH02215038A (ja) * 1989-02-15 1990-08-28 Hitachi Ltd マイクロ波プラズマ極微量元素分析装置
US5537004A (en) * 1993-03-06 1996-07-16 Tokyo Electron Limited Low frequency electron cyclotron resonance plasma processor
JPH11162694A (ja) * 1997-10-31 1999-06-18 Applied Materials Inc 放電用部品及びプラズマ装置
AUPQ861500A0 (en) 2000-07-06 2000-08-03 Varian Australia Pty Ltd Plasma source for spectrometry
EP1421832B1 (de) 2001-08-28 2006-10-04 Jeng-Ming Wu Plasmabrenner mit mikrowellenanregung
KR100551138B1 (ko) * 2003-09-09 2006-02-10 어댑티브프라즈마테크놀로지 주식회사 균일한 플라즈마 발생을 위한 적응형 플라즈마 소스
US20070287295A1 (en) * 2004-09-14 2007-12-13 Kim Nam H Adaptively Plasma Source And Method Of Processing Semiconductor Wafer Using The Same
US7291985B2 (en) * 2005-10-04 2007-11-06 Topanga Technologies, Inc. External resonator/cavity electrode-less plasma lamp and method of exciting with radio-frequency energy
US8154216B2 (en) * 2005-10-04 2012-04-10 Topanga Technologies, Inc. External resonator/cavity electrode-less plasma lamp and method of exciting with radio-frequency energy
JP4765648B2 (ja) * 2006-02-07 2011-09-07 パナソニック株式会社 マイクロプラズマジェット発生装置
US8216433B2 (en) * 2006-03-07 2012-07-10 University Of The Ryukyus Plasma generator and method of generating plasma using the same
PL221507B1 (pl) * 2008-06-20 2016-04-29 Edward Reszke Sposób i układ do wytwarzania plazmy
CA2905931C (en) 2013-03-13 2021-10-26 Radom Corporation Microwave plasma spectrometer using dielectric resonator
PL408615A1 (pl) 2014-06-19 2015-12-21 Instytut Optyki Stosowanej Im. Prof. Maksymiliana Pluty Palnik do rotacyjnego źródła wzbudzenia plazmy

Also Published As

Publication number Publication date
EP3449699A1 (en) 2019-03-06
US20190159329A1 (en) 2019-05-23
AU2017246939A1 (en) 2018-10-25
JP2019514168A (ja) 2019-05-30
AU2017246939B2 (en) 2022-05-12
CA3020093A1 (en) 2017-10-12
WO2017176131A1 (en) 2017-10-12
US12022601B2 (en) 2024-06-25
PL235377B1 (pl) 2020-07-13
EP3449699B1 (en) 2021-12-15
JP6873152B2 (ja) 2021-05-19

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