PT1864314E - Método para operação de uma fonte de vaporização de arco pulsada bem como uma instalação de processamento a vácuo com uma fonte de vaporização de arco pulsada - Google Patents

Método para operação de uma fonte de vaporização de arco pulsada bem como uma instalação de processamento a vácuo com uma fonte de vaporização de arco pulsada Download PDF

Info

Publication number: PT1864314E
Authority: PT; Portugal
Prior art keywords: evaporation source; arc evaporation; pulsed arc; workpiece; vacuum process
Prior art date: 2005-03-24

Application number

PT06705365T

Other languages

English (en)

Inventor

Volker Derflinger

Juergen Ramm

Beno Widrig

Daniel Lendi

Andreas Reiter

Original Assignee

Oerlikon Trading Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-03-24

Filing date

2006-03-01

Publication date

2012-07-12

2006-03-01 Application filed by Oerlikon Trading Ag filed Critical Oerlikon Trading Ag

2012-07-12 Publication of PT1864314E publication Critical patent/PT1864314E/pt

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/30—Manufacture with deposition of material
- F05D2230/31—Layer deposition
- F05D2230/313—Layer deposition by physical vapour deposition

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
Toxicology (AREA)
General Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Health & Medical Sciences (AREA)
Physical Vapour Deposition (AREA)
Cutting Tools, Boring Holders, And Turrets (AREA)
Plasma Technology (AREA)
Polishing Bodies And Polishing Tools (AREA)
Glass Compositions (AREA)
Chemical Vapour Deposition (AREA)
Laminated Bodies (AREA)
Inorganic Insulating Materials (AREA)

PT06705365T 2005-03-24 2006-03-01 Método para operação de uma fonte de vaporização de arco pulsada bem como uma instalação de processamento a vácuo com uma fonte de vaporização de arco pulsada PT1864314E (pt)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
CH5182005		2005-03-24
CH12892005		2005-08-03

Publications (1)

Publication Number	Publication Date
PT1864314E true PT1864314E (pt)	2012-07-12

Family

ID=36102569

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
PT06700563T PT1863947E (pt)	2005-03-24	2006-01-19	Camada de material duro
PT06705365T PT1864314E (pt)	2005-03-24	2006-03-01	Método para operação de uma fonte de vaporização de arco pulsada bem como uma instalação de processamento a vácuo com uma fonte de vaporização de arco pulsada

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
PT06700563T PT1863947E (pt)	2005-03-24	2006-01-19	Camada de material duro

Country Status (13)

Country	Link
EP (3)	EP2355126B1 (pt)
JP (1)	JP5877147B2 (pt)
KR (3)	KR101361224B1 (pt)
AT (1)	ATE527392T1 (pt)
BR (2)	BRPI0609673A2 (pt)
CA (2)	CA2601722C (pt)
ES (3)	ES2562454T3 (pt)
HU (1)	HUE026952T2 (pt)
MX (1)	MX2007011703A (pt)
PL (3)	PL1863947T3 (pt)
PT (2)	PT1863947E (pt)
SG (3)	SG193877A1 (pt)
WO (2)	WO2006099754A1 (pt)

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US9605338B2 (en)	2006-10-11	2017-03-28	Oerlikon Surface Solutions Ag, Pfaffikon	Method for depositing electrically insulating layers
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US8129040B2 (en)	2007-05-16	2012-03-06	Oerlikon Trading Ag, Truebbach	Cutting tool
JP5537782B2 (ja) *	2007-09-14	2014-07-02	スルザーメタプラスゲーエムベーハー	切削工具及び切削工具の製造方法
WO2009040406A2 (de) *	2007-09-25	2009-04-02	Von Ardenne Anlagentechnik Gmbh	Verfahren und anordnung zum redundanten anoden-sputtern mit einer dual-anoden-anordnung
US8968830B2 (en)	2007-12-06	2015-03-03	Oerlikon Trading Ag, Trubbach	PVD—vacuum coating unit
US8652589B2 (en) *	2008-01-25	2014-02-18	Oerlikon Trading Ag, Truebbach	Permeation barrier layer
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ATE532886T1 (de)	2008-09-19	2011-11-15	Oerlikon Trading Ag	Verfahren zum herstellen von metalloxidschichten durch funkenverdampfung
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DE102009028579B4 (de) *	2009-08-17	2013-08-22	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Beschichtete Körper aus Metall, Hartmetall, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper
EP2369031B1 (de)	2010-03-18	2016-05-04	Oerlikon Trading AG, Trübbach	Beschichtung auf nial2o4 basis in spinellstruktur
DE102010053751A1 (de) *	2010-10-28	2012-05-03	Oerlikon Trading Ag, Trübbach	Molybdänmonoxidschichten und deren Herstellung mittels PVD
DE102010052687A1 (de) *	2010-11-26	2012-05-31	GFE Gesellschaft für Fertigungstechnik u. Entwicklung Schmalkalden e.V.	Hartstoff-Beschichtung für Maschinenteile und Werkzeuge zum Verschleißschutz und zur Wärmedämmung
DE102011016681A1 (de) *	2011-04-11	2012-10-11	Oerlikon Trading Ag, Trübbach	Kohlenstofffunkenverdampfung
ES2532898T3 (es)	2011-06-30	2015-04-01	Lamina Technologies Sa	Deposición por arco catódico
EP2607517A1 (en) *	2011-12-22	2013-06-26	Oerlikon Trading AG, Trübbach	Low temperature arc ion plating coating
EP2986752B1 (de) *	2013-04-16	2021-04-07	Oerlikon Surface Solutions AG, Pfäffikon	Oxidationsschutzschicht auf chrombasis
WO2014187570A1 (de) *	2013-05-23	2014-11-27	Oerlikon Trading Ag, Trübbach	Barriereschicht für turbolader
EP2829635B1 (en) *	2013-07-23	2017-12-27	Semih Oncel	Method for controlled production of diffusion based coatings by vacuum cathodic arc systems
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2006
- 2006-01-19 PL PL06700563T patent/PL1863947T3/pl unknown
- 2006-01-19 EP EP10011124.4A patent/EP2355126B1/de not_active Expired - Lifetime
- 2006-01-19 SG SG2013068739A patent/SG193877A1/en unknown
- 2006-01-19 CA CA2601722A patent/CA2601722C/en not_active Expired - Fee Related
- 2006-01-19 KR KR1020137004861A patent/KR101361224B1/ko not_active Expired - Fee Related
- 2006-01-19 MX MX2007011703A patent/MX2007011703A/es active IP Right Grant
- 2006-01-19 BR BRPI0609673-5A patent/BRPI0609673A2/pt not_active Application Discontinuation
- 2006-01-19 AT AT06700563T patent/ATE527392T1/de active
- 2006-01-19 EP EP06700563A patent/EP1863947B1/de not_active Expired - Lifetime
- 2006-01-19 SG SG201001774-7A patent/SG160397A1/en unknown
- 2006-01-19 ES ES10011124.4T patent/ES2562454T3/es not_active Expired - Lifetime
- 2006-01-19 PL PL10011124T patent/PL2355126T3/pl unknown
- 2006-01-19 ES ES06700563T patent/ES2374832T3/es not_active Expired - Lifetime
- 2006-01-19 KR KR1020077024393A patent/KR101361240B1/ko not_active Expired - Fee Related
- 2006-01-19 PT PT06700563T patent/PT1863947E/pt unknown
- 2006-01-19 WO PCT/CH2006/000042 patent/WO2006099754A1/de not_active Ceased
- 2006-01-19 HU HUE10011124A patent/HUE026952T2/en unknown
- 2006-03-01 WO PCT/CH2006/000125 patent/WO2006099760A2/de not_active Ceased
- 2006-03-01 PT PT06705365T patent/PT1864314E/pt unknown
- 2006-03-01 PL PL06705365T patent/PL1864314T3/pl unknown
- 2006-03-01 EP EP06705365A patent/EP1864314B1/de not_active Expired - Lifetime
- 2006-03-01 CA CA2601729A patent/CA2601729C/en not_active Expired - Lifetime
- 2006-03-01 KR KR1020077024392A patent/KR101235393B1/ko not_active Expired - Fee Related
- 2006-03-01 SG SG201001776-2A patent/SG160398A1/en unknown
- 2006-03-01 BR BRPI0609466-0A patent/BRPI0609466A2/pt not_active IP Right Cessation
- 2006-03-01 ES ES06705365T patent/ES2388175T3/es not_active Expired - Lifetime
2012
- 2012-12-11 JP JP2012270287A patent/JP5877147B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
KR101235393B1 (ko)	2013-02-22
SG160398A1 (en)	2010-04-29
ES2388175T3 (es)	2012-10-10
EP2355126B1 (de)	2015-12-02
EP1864314B1 (de)	2012-05-16
WO2006099754A1 (de)	2006-09-28
MX2007011703A (es)	2008-03-10
EP2355126A2 (de)	2011-08-10
WO2006099760A2 (de)	2006-09-28
WO2006099760A3 (de)	2007-12-06
KR20070114832A (ko)	2007-12-04
ES2562454T3 (es)	2016-03-04
BRPI0609673A2 (pt)	2010-04-20
JP2013079452A (ja)	2013-05-02
EP2355126A3 (de)	2011-10-19
ES2374832T3 (es)	2012-02-22
HUE026952T2 (en)	2016-08-29
KR101361224B1 (ko)	2014-02-10
PL1863947T3 (pl)	2012-06-29
KR20130027584A (ko)	2013-03-15
PL1864314T3 (pl)	2012-11-30
CA2601729A1 (en)	2006-09-28
EP1863947A1 (de)	2007-12-12
KR20070114402A (ko)	2007-12-03
EP1863947B1 (de)	2011-10-05
KR101361240B1 (ko)	2014-02-11
PT1863947E (pt)	2011-12-15
JP5877147B2 (ja)	2016-03-02
SG193877A1 (en)	2013-10-30
CA2601722C (en)	2014-02-25
CA2601722A1 (en)	2006-09-28
CA2601729C (en)	2014-07-08
SG160397A1 (en)	2010-04-29
ATE527392T1 (de)	2011-10-15
EP1864314A2 (de)	2007-12-12
PL2355126T3 (pl)	2016-04-29
BRPI0609466A2 (pt)	2010-04-13

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