RO87878B - Reper pentru pozitionarea automata a unui substrat de semiconductor si procedeu pentru fabricarea acestuia - Google Patents
Reper pentru pozitionarea automata a unui substrat de semiconductor si procedeu pentru fabricarea acestuiaInfo
- Publication number
- RO87878B RO87878B RO111968A RO11196883A RO87878B RO 87878 B RO87878 B RO 87878B RO 111968 A RO111968 A RO 111968A RO 11196883 A RO11196883 A RO 11196883A RO 87878 B RO87878 B RO 87878B
- Authority
- RO
- Romania
- Prior art keywords
- corrosion
- edges
- isotropic
- trenches
- ditches
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000005260 corrosion Methods 0.000 abstract 6
- 230000007797 corrosion Effects 0.000 abstract 6
- 239000004065 semiconductor Substances 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 229920005591 polysilicon Polymers 0.000 abstract 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Inventia se refera la un reper pentru pozitionarea automata a unui szbstrat de semiconductor fata de o masca sau de un sablon aferent, precum si la un procedeu pentru fanricarea acestuia, utilizate în industria dispozitivelor semiconductoare. reperul conform inventiei, este constituit din adîncituri execuatte ca cel putin doua santuri de coordonare încrucisate, dispuse perpendicular si simetric fata de axele lor marcaje de dimensiuni diferite, cere se succed periodic si alternativ si ale caror muchii structurale adiacente se ating între ele, aceste marcaje constînd din santuri lungi, ale caror muchii putîn fi marit prin divizarea santurilor sau prin dublarea santurilor scurte. procedeul, conforn inventiei, prevede o corodare suplimentara izotropa a structurii adiacente ale structurii se ating în interiorul santurilor de corodare, iar suprafata muchiilor de corodare prezinta o înasprire, corodarea izotropa realizîndu-se concomitent cu cea antizotropa si folosind un agent de corodare din polisiliciu.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD24296382A DD206450A1 (de) | 1982-09-02 | 1982-09-02 | Justiermarke zur automatischen positionierung eines halbleitersubstrates und verfahren zu ihrer herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RO87878B true RO87878B (ro) | 1985-12-01 |
| RO87878A RO87878A (ro) | 1985-12-20 |
Family
ID=5540977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO83111968A RO87878A (ro) | 1982-09-02 | 1983-08-31 | Reper pentru pozitionarea automata a unui substrat de semiconductor si procedeu pentru fabricarea acestuia |
Country Status (4)
| Country | Link |
|---|---|
| BG (1) | BG48907A1 (ro) |
| DD (1) | DD206450A1 (ro) |
| HU (1) | HU189741B (ro) |
| RO (1) | RO87878A (ro) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4134291A1 (de) * | 1991-10-17 | 1993-04-22 | Bosch Gmbh Robert | Verfahren zur exakten ausrichtung von masken zum anisotropen aetzen von dreidimensionalen strukturen aus siliziumwafern |
-
1982
- 1982-09-02 DD DD24296382A patent/DD206450A1/de not_active IP Right Cessation
-
1983
- 1983-08-24 BG BG6218783A patent/BG48907A1/xx unknown
- 1983-08-31 RO RO83111968A patent/RO87878A/ro unknown
- 1983-09-02 HU HU307983A patent/HU189741B/hu unknown
Also Published As
| Publication number | Publication date |
|---|---|
| BG48907A1 (en) | 1991-06-14 |
| DD206450A1 (de) | 1984-01-25 |
| RO87878A (ro) | 1985-12-20 |
| HU189741B (en) | 1986-07-28 |
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