RU2012136472A - Способ очистки для установок нанесения покрытий - Google Patents
Способ очистки для установок нанесения покрытий Download PDFInfo
- Publication number
- RU2012136472A RU2012136472A RU2012136472/02A RU2012136472A RU2012136472A RU 2012136472 A RU2012136472 A RU 2012136472A RU 2012136472/02 A RU2012136472/02 A RU 2012136472/02A RU 2012136472 A RU2012136472 A RU 2012136472A RU 2012136472 A RU2012136472 A RU 2012136472A
- Authority
- RU
- Russia
- Prior art keywords
- coating
- layer
- release layer
- auxiliary surfaces
- release
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract 11
- 238000000576 coating method Methods 0.000 title claims abstract 10
- 239000011248 coating agent Substances 0.000 title claims abstract 8
- 238000004140 cleaning Methods 0.000 title claims abstract 5
- 230000000694 effects Effects 0.000 claims abstract 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract 2
- 240000002853 Nelumbo nucifera Species 0.000 claims abstract 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 claims abstract 2
- 235000006510 Nelumbo pentapetala Nutrition 0.000 claims abstract 2
- 238000005422 blasting Methods 0.000 claims abstract 2
- 235000011089 carbon dioxide Nutrition 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims abstract 2
- 239000000843 powder Substances 0.000 claims abstract 2
- 239000002904 solvent Substances 0.000 claims abstract 2
- 239000000725 suspension Substances 0.000 claims abstract 2
- 241000196324 Embryophyta Species 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract 6
- 239000012790 adhesive layer Substances 0.000 abstract 1
- 230000000181 anti-adherent effect Effects 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1. Способ очистки вспомогательных поверхностей установок нанесения покрытий, содержащий следующие этапы:- нанесение антиадгезионного слоя на вспомогательные поверхности камеры для нанесения покрытия, предшествующее нанесению покрытия,- обработка вспомогательных поверхностей с помощью струйной обработки сухим льдом и/или способа очистки струями снега CO, следующая за нанесением покрытия.2. Способ по п.1, отличающийся тем, что антиадгезионный слой содержит суспензию порошка в летучем растворителе.3. Способ по п.1, отличающийся тем, что антиадгезионный слой включает в себя металлический слой, который существенно толще, чем слой, наносимый в процессе нанесения покрытия.4. Способ по п.1, отличающийся тем, что антиадгезионный слой представляет собой слой, антиадгезионное воздействие которого основано на эффекте лотоса.
Claims (4)
1. Способ очистки вспомогательных поверхностей установок нанесения покрытий, содержащий следующие этапы:
- нанесение антиадгезионного слоя на вспомогательные поверхности камеры для нанесения покрытия, предшествующее нанесению покрытия,
- обработка вспомогательных поверхностей с помощью струйной обработки сухим льдом и/или способа очистки струями снега CO2, следующая за нанесением покрытия.
2. Способ по п.1, отличающийся тем, что антиадгезионный слой содержит суспензию порошка в летучем растворителе.
3. Способ по п.1, отличающийся тем, что антиадгезионный слой включает в себя металлический слой, который существенно толще, чем слой, наносимый в процессе нанесения покрытия.
4. Способ по п.1, отличающийся тем, что антиадгезионный слой представляет собой слой, антиадгезионное воздействие которого основано на эффекте лотоса.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010005762A DE102010005762A1 (de) | 2010-01-25 | 2010-01-25 | Reinigungsverfahren für Beschichtungsanlagen |
| DE102010005762.2 | 2010-01-25 | ||
| PCT/EP2010/007971 WO2011088884A1 (de) | 2010-01-25 | 2010-12-22 | Reinigungsverfahren für beschichtungsanlagen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2012136472A true RU2012136472A (ru) | 2014-03-10 |
| RU2554838C2 RU2554838C2 (ru) | 2015-06-27 |
Family
ID=43706705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2012136472/02A RU2554838C2 (ru) | 2010-01-25 | 2010-12-22 | Способ очистки для установок нанесения покрытий |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US20120298139A1 (ru) |
| EP (1) | EP2529040A1 (ru) |
| JP (1) | JP2013518177A (ru) |
| KR (1) | KR20120120944A (ru) |
| CN (1) | CN102812154B (ru) |
| BR (1) | BR112012018524A2 (ru) |
| CA (1) | CA2788448A1 (ru) |
| DE (1) | DE102010005762A1 (ru) |
| MX (1) | MX2012008661A (ru) |
| RU (1) | RU2554838C2 (ru) |
| SG (2) | SG10201500561SA (ru) |
| WO (1) | WO2011088884A1 (ru) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012003514A1 (de) * | 2012-02-24 | 2013-08-29 | Acp-Advanced Clean Production Gmbh | Verfahren und Vorrichtung zur Reinigung von Oberflächen mittels Kohlendioxid-Schnee unter Zufuhr synergetischer Medien |
| WO2017031571A1 (en) * | 2015-08-22 | 2017-03-02 | Novena Tec Inc. | Process chamber shielding system and method |
| FI3879604T3 (fi) * | 2018-11-09 | 2024-12-05 | Grinergy Co Ltd | Negatiivisen litiummetallielektrodin pintakäsittelymenetelmä |
| FR3088564B1 (fr) * | 2018-11-16 | 2020-12-25 | Safran Aircraft Engines | Procede de compactage d'une peinture anti-corrosion d'une piece de turbomachine |
| CN109663790B (zh) * | 2018-12-12 | 2021-02-19 | 盐城市国泰混凝土有限公司 | 一种混凝土搅拌车回厂余料的清洗方法 |
| DE102019110642A1 (de) | 2019-04-25 | 2020-10-29 | Vtd Vakuumtechnik Dresden Gmbh | Anode für PVD-Prozesse |
| DE102021105761A1 (de) * | 2021-03-10 | 2022-09-15 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zum Trennen oder Wiedergewinnen von Materialien von Elektroden, Verfahren zur Herstellung einer Elektrode sowie Elektrode |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06170735A (ja) * | 1992-12-03 | 1994-06-21 | Shin Etsu Chem Co Ltd | 多結晶ダイヤモンド砥石の製造方法 |
| JPH1136061A (ja) * | 1997-07-17 | 1999-02-09 | Mitsubishi Materials Corp | 物理蒸着装置のマスキング治具 |
| JP2000044843A (ja) * | 1998-08-04 | 2000-02-15 | Mitsubishi Heavy Ind Ltd | コーティング材料及びその製造方法 |
| JP3030287B1 (ja) * | 1998-10-09 | 2000-04-10 | 株式会社協同インターナショナル | 成膜装置のクリーニング方法、スパッタリングターゲットのクリーニング方法及びこれらに使用するクリーニング装置 |
| US6890853B2 (en) * | 2000-04-25 | 2005-05-10 | Tokyo Electron Limited | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| JP3984833B2 (ja) * | 2001-01-16 | 2007-10-03 | キヤノン株式会社 | 現像剤担持体の再生方法 |
| JP4200662B2 (ja) * | 2001-02-19 | 2008-12-24 | 富士ゼロックス株式会社 | 画像表示媒体の製造方法 |
| DE10111235A1 (de) | 2001-03-08 | 2002-09-19 | Linde Ag | Verfahren zur Strahlbehandlung mit Strahlmitteln |
| ITMI20010134U1 (it) | 2001-03-12 | 2002-09-12 | Valentini Guido | Platorello operativo di forma sostanzialmente circolare per utensile portatile |
| JP2002339059A (ja) * | 2001-05-16 | 2002-11-27 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| US20030037879A1 (en) * | 2001-08-24 | 2003-02-27 | Applied Materials, Inc. | Top gas feed lid for semiconductor processing chamber |
| JP3876167B2 (ja) * | 2002-02-13 | 2007-01-31 | 川崎マイクロエレクトロニクス株式会社 | 洗浄方法および半導体装置の製造方法 |
| US7002790B2 (en) * | 2002-09-30 | 2006-02-21 | Medtronic, Inc. | Capacitor in an implantable medical device |
| US6902628B2 (en) * | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Method of cleaning a coated process chamber component |
| JP4653406B2 (ja) * | 2004-03-10 | 2011-03-16 | 株式会社アルバック | 水崩壊性Ａｌ複合材料、水崩壊性Ａｌ溶射膜、及び水崩壊性Ａｌ粉の製造方法、並びに成膜室用構成部材及び成膜材料の回収方法 |
| US7384486B2 (en) * | 2004-03-26 | 2008-06-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chamber cleaning method |
| EP1598444B1 (de) * | 2004-05-06 | 2006-11-15 | Siemens Aktiengesellschaft | Verfahren zum Einstellen der elektrischen Leitfähigkeit einer durch Druck in ihrer elektrischen Leitfähigkeit veränderbaren Beschichtung eines Maschinenbauteils durch Trockeneisstrahlen |
| DE102006002653B4 (de) | 2005-01-27 | 2009-10-08 | Luderer Schweißtechnik GmbH | Trockeneisstrahlverfahren |
| EP1772529A1 (de) * | 2005-10-07 | 2007-04-11 | Siemens Aktiengesellschaft | Trockene Zusammensetzung, Verwendung derer, Schichtsystem und Verfahren zur Beschichtung |
| WO2008040819A1 (de) | 2006-10-06 | 2008-04-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur dekontamination mit trockeneis |
| DE102007033788A1 (de) * | 2007-07-09 | 2009-01-15 | Gerd Wurster | Vorbehandlungsanlage und Verfahren zur Vorbehandlung von Werkstücken |
| JP5736317B2 (ja) * | 2008-11-20 | 2015-06-17 | エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト，トリュープバッハ | コーティング設備のための洗浄方法 |
-
2010
- 2010-01-25 DE DE102010005762A patent/DE102010005762A1/de not_active Withdrawn
- 2010-12-22 SG SG10201500561SA patent/SG10201500561SA/en unknown
- 2010-12-22 WO PCT/EP2010/007971 patent/WO2011088884A1/de not_active Ceased
- 2010-12-22 MX MX2012008661A patent/MX2012008661A/es unknown
- 2010-12-22 CN CN201080062436.3A patent/CN102812154B/zh not_active Expired - Fee Related
- 2010-12-22 BR BR112012018524A patent/BR112012018524A2/pt not_active IP Right Cessation
- 2010-12-22 SG SG2012055216A patent/SG182730A1/en unknown
- 2010-12-22 US US13/574,817 patent/US20120298139A1/en not_active Abandoned
- 2010-12-22 EP EP10800894A patent/EP2529040A1/de not_active Withdrawn
- 2010-12-22 CA CA2788448A patent/CA2788448A1/en not_active Abandoned
- 2010-12-22 RU RU2012136472/02A patent/RU2554838C2/ru not_active IP Right Cessation
- 2010-12-22 KR KR1020127021306A patent/KR20120120944A/ko not_active Ceased
- 2010-12-22 JP JP2012549264A patent/JP2013518177A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013518177A (ja) | 2013-05-20 |
| SG182730A1 (en) | 2012-08-30 |
| MX2012008661A (es) | 2012-10-15 |
| KR20120120944A (ko) | 2012-11-02 |
| EP2529040A1 (de) | 2012-12-05 |
| WO2011088884A1 (de) | 2011-07-28 |
| CN102812154B (zh) | 2015-07-15 |
| BR112012018524A2 (pt) | 2016-08-23 |
| CA2788448A1 (en) | 2011-07-28 |
| US20120298139A1 (en) | 2012-11-29 |
| CN102812154A (zh) | 2012-12-05 |
| SG10201500561SA (en) | 2015-05-28 |
| RU2554838C2 (ru) | 2015-06-27 |
| DE102010005762A1 (de) | 2011-07-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| HZ9A | Changing address for correspondence with an applicant | ||
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20171223 |