SE0301637D0 - a micromachined knife gate valve for high-flow pressure regulation applications - Google Patents

a micromachined knife gate valve for high-flow pressure regulation applications

Info

Publication number
SE0301637D0
SE0301637D0 SE0301637A SE0301637A SE0301637D0 SE 0301637 D0 SE0301637 D0 SE 0301637D0 SE 0301637 A SE0301637 A SE 0301637A SE 0301637 A SE0301637 A SE 0301637A SE 0301637 D0 SE0301637 D0 SE 0301637D0
Authority
SE
Sweden
Prior art keywords
flow
micromachined
microvalve
substrate layer
knife gate
Prior art date
Application number
SE0301637A
Other languages
English (en)
Inventor
Wouter Van Der Wijngaart
A Shane Ridgeway
Goeran Stemme
Original Assignee
Wouter Van Der Wijngaart Royal
A Shane Ridgeway
Goeran Stemme Royal Inst Of Te
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wouter Van Der Wijngaart Royal, A Shane Ridgeway, Goeran Stemme Royal Inst Of Te filed Critical Wouter Van Der Wijngaart Royal
Priority to SE0301637A priority Critical patent/SE0301637D0/sv
Publication of SE0301637D0 publication Critical patent/SE0301637D0/sv
Priority to US10/559,409 priority patent/US20070090314A1/en
Priority to PCT/IB2004/050854 priority patent/WO2004109163A2/en
Priority to EP20040736248 priority patent/EP1631760A2/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87217—Motor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
SE0301637A 2003-06-06 2003-06-06 a micromachined knife gate valve for high-flow pressure regulation applications SE0301637D0 (sv)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SE0301637A SE0301637D0 (sv) 2003-06-06 2003-06-06 a micromachined knife gate valve for high-flow pressure regulation applications
US10/559,409 US20070090314A1 (en) 2003-06-06 2004-06-07 Micromachined knife gate valve for high-flow pressure regulation applications
PCT/IB2004/050854 WO2004109163A2 (en) 2003-06-06 2004-06-07 A micromachined knife gate valve for high-flow pressure regulation applications
EP20040736248 EP1631760A2 (en) 2003-06-06 2004-06-07 A micromachined knife gate valve for high-flow pressure regulation applications

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0301637A SE0301637D0 (sv) 2003-06-06 2003-06-06 a micromachined knife gate valve for high-flow pressure regulation applications

Publications (1)

Publication Number Publication Date
SE0301637D0 true SE0301637D0 (sv) 2003-06-06

Family

ID=20291492

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0301637A SE0301637D0 (sv) 2003-06-06 2003-06-06 a micromachined knife gate valve for high-flow pressure regulation applications

Country Status (4)

Country Link
US (1) US20070090314A1 (sv)
EP (1) EP1631760A2 (sv)
SE (1) SE0301637D0 (sv)
WO (1) WO2004109163A2 (sv)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006090414A (ja) * 2004-09-22 2006-04-06 Toshiba Corp スライドバルブ装置及びスライドバルブ装置の製造方法
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
DE102007035472A1 (de) * 2007-07-26 2009-01-29 Svm Schultz Verwaltungs-Gmbh & Co. Kg Ventil
US8062612B2 (en) * 2008-06-20 2011-11-22 Silverbrook Research Pty Ltd MEMS integrated circuit comprising microfluidic diaphragm valve
US8092761B2 (en) * 2008-06-20 2012-01-10 Silverbrook Research Pty Ltd Mechanically-actuated microfluidic diaphragm valve
US8075855B2 (en) * 2008-06-20 2011-12-13 Silverbrook Research Pty Ltd MEMS integrated circuit comprising peristaltic microfluidic pump
US20100148100A1 (en) * 2008-12-17 2010-06-17 Parker Hannifin Corporation Media isolated piezo valve
JP5286483B2 (ja) * 2011-10-26 2013-09-11 株式会社メトラン 呼吸補助装置
JP5593471B2 (ja) * 2013-04-24 2014-09-24 株式会社メトラン 呼吸補助装置
US20140374633A1 (en) * 2013-06-24 2014-12-25 Zhejiang Dunan Hetian Metal Co., Ltd. Microvalve Having Improved Resistance to Contamination
CN105805412B (zh) * 2014-12-30 2019-04-16 浙江盾安人工环境股份有限公司 基于pzt压电致动的双刀型闸微阀装置
CN105822829B (zh) * 2015-01-08 2019-04-16 浙江盾安人工环境股份有限公司 一种微阀
US11105319B2 (en) 2017-05-05 2021-08-31 Hutchinson Technology Incorporated Shape memory alloy actuators and methods thereof
US11815794B2 (en) 2017-05-05 2023-11-14 Hutchinson Technology Incorporated Shape memory alloy actuators and methods thereof
GB2602950B (en) 2017-05-05 2022-10-26 Hutchinson Technology Shape memory alloy actuators and methods thereof
US11859598B2 (en) * 2021-06-10 2024-01-02 Hutchinson Technology Incorporated Shape memory alloy actuators and methods thereof
US12510061B2 (en) 2023-04-12 2025-12-30 Hutchinson Technology Incorporated Shape memory alloy (SMA) bimorph actuators and methods for manufacturing the same
US11982263B1 (en) 2023-05-02 2024-05-14 Hutchinson Technology Incorporated Shape metal alloy (SMA) bimorph actuators with reduced wire exit angle
US20250207687A1 (en) * 2023-12-20 2025-06-26 Taiwan Semiconductor Manufacturing Company, Ltd. Normally-open piezoelectric mems valve

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3667503A (en) * 1970-06-05 1972-06-06 Elkay Mfg Co Single-handle mixing and proportioning valve
US5065978A (en) * 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5445185A (en) * 1993-04-05 1995-08-29 Ford Motor Company Piezoelectric fluid control valve
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
DE19735156C1 (de) * 1996-11-25 1999-04-29 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
US7320457B2 (en) * 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US6523560B1 (en) * 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US6279606B1 (en) * 1999-10-18 2001-08-28 Kelsey-Hayes Company Microvalve device having a check valve
US6306773B1 (en) * 2000-02-01 2001-10-23 Adaas Christian Method of producing a semiconductor device of SiC
DE10027354C2 (de) * 2000-06-02 2003-08-14 Bartels Mikrotechnik Gmbh Aktorarray mit fluidischem Antrieb, Blindenschriftdisplay, flächenhaftes elektrisches 2D-Relais, Ventilarray und Spiegelarray mit derartigem Aktorarray sowie Verfahren zur Herstellung einer Aktorplatte zur Verwendung für ein derartiges Aktorarray
DE20116898U1 (de) * 2001-10-15 2002-01-17 FESTO AG & Co., 73734 Esslingen Mikroventil

Also Published As

Publication number Publication date
WO2004109163A2 (en) 2004-12-16
US20070090314A1 (en) 2007-04-26
WO2004109163A3 (en) 2005-04-07
EP1631760A2 (en) 2006-03-08

Similar Documents

Publication Publication Date Title
SE0301637D0 (sv) a micromachined knife gate valve for high-flow pressure regulation applications
WO2006044458A3 (en) Electrostatic actuation for management of flow
EP1080323B1 (en) Electrically controllable valve
WO2006083833A3 (en) Valves and reservoirs for microfluidic systems
WO2001090614A3 (en) Surface tension valves for microfluidic applications
WO2009139898A8 (en) Valves and other flow control in fluidic systems including microfluidic systems
WO2003070467A3 (en) Fluid pumping and droplet deposition apparatus
AU2002365999A1 (en) Fluid flow control freeze/thaw valve for narrow bore capillaries or microfluidic devices
DE502004001034D1 (de) Dämpfventileinrichtung mit progressiver Dämpfkraftkennlinie
ATE328205T1 (de) Durch mikrofabrikation hergestellte fluidikschaltkreiselemente und -anwendungen
WO2002070932A3 (en) Microvalve
AR063084A1 (es) Dispositivo de posicionamiento para regulador de la presion
ATE545078T1 (de) Thermostatisches sicherheitsventil
MX2010006981A (es) Valvula con auxiliar de acionamiento.
WO2009108059A3 (en) Tubular member having self-adjusting valves controlling the flow of fluid into or out of the tubular member
US20130192704A1 (en) Mems valve operating profile
ATE340324T1 (de) Ventil für raumfahrtanwendungen mit sma-aktor
EP1413775A3 (en) Microelectromechanical high pressure gas microvalve
GB2437019A (en) Equalizing flapper for high slam rate applications
CA2555646A1 (en) Apparatus for changing wellbore fluid temperature
ATE483930T1 (de) Sanitärmembranventil
NO20076351L (no) Bistabil aktuaror samt boresystem innbefattende samme
ATE535673T1 (de) Lüftungsvorrichtung
GB2401926B (en) Electromagnetic actuator and integrated actuator and fluid flow control valve
CN103797288B (zh) 双稳态流体阀