SE362015B - - Google Patents

Info

Publication number
SE362015B
SE362015B SE09510/71A SE951071A SE362015B SE 362015 B SE362015 B SE 362015B SE 09510/71 A SE09510/71 A SE 09510/71A SE 951071 A SE951071 A SE 951071A SE 362015 B SE362015 B SE 362015B
Authority
SE
Sweden
Application number
SE09510/71A
Inventor
R L Meek
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of SE362015B publication Critical patent/SE362015B/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/60Wet etching
    • H10P50/61Electrolytic etching
    • H10P50/613Electrolytic etching of Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/914Doping
    • Y10S438/924To facilitate selective etching
SE09510/71A 1970-07-31 1971-07-23 SE362015B (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5997770A 1970-07-31 1970-07-31

Publications (1)

Publication Number Publication Date
SE362015B true SE362015B (fr) 1973-11-26

Family

ID=22026542

Family Applications (1)

Application Number Title Priority Date Filing Date
SE09510/71A SE362015B (fr) 1970-07-31 1971-07-23

Country Status (11)

Country Link
US (1) US3642593A (fr)
JP (1) JPS517980B1 (fr)
AU (1) AU432312B2 (fr)
BE (1) BE770538A (fr)
CH (1) CH530093A (fr)
ES (1) ES394152A1 (fr)
FR (1) FR2099721B1 (fr)
GB (1) GB1307030A (fr)
IE (1) IE35540B1 (fr)
NL (1) NL152705B (fr)
SE (1) SE362015B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554059A (en) * 1983-11-04 1985-11-19 Harris Corporation Electrochemical dielectric isolation technique
DE3889830D1 (de) * 1987-09-30 1994-07-07 Siemens Ag Verfahren zum Ätzen von (100) Silizium.
US5136344A (en) * 1988-11-02 1992-08-04 Universal Energy Systems, Inc. High energy ion implanted silicon on insulator structure
US5702586A (en) * 1994-06-28 1997-12-30 The United States Of America As Represented By The Secretary Of The Navy Polishing diamond surface

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USB421061I5 (fr) * 1964-12-24
NL6703014A (fr) * 1967-02-25 1968-08-26
US3523042A (en) * 1967-12-26 1970-08-04 Hughes Aircraft Co Method of making bipolar transistor devices

Also Published As

Publication number Publication date
BE770538A (fr) 1971-12-01
ES394152A1 (es) 1974-04-01
GB1307030A (en) 1973-02-14
IE35540B1 (en) 1976-03-18
NL152705B (nl) 1977-03-15
CH530093A (de) 1972-10-31
DE2137423A1 (de) 1972-02-03
DE2137423B2 (de) 1973-10-31
IE35540L (en) 1972-01-31
AU3165371A (en) 1973-02-01
FR2099721A1 (fr) 1972-03-17
NL7110572A (fr) 1972-02-02
FR2099721B1 (fr) 1977-08-05
AU432312B2 (en) 1973-02-22
US3642593A (en) 1972-02-15
JPS517980B1 (fr) 1976-03-12

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